JPS6237670U - - Google Patents

Info

Publication number
JPS6237670U
JPS6237670U JP12883585U JP12883585U JPS6237670U JP S6237670 U JPS6237670 U JP S6237670U JP 12883585 U JP12883585 U JP 12883585U JP 12883585 U JP12883585 U JP 12883585U JP S6237670 U JPS6237670 U JP S6237670U
Authority
JP
Japan
Prior art keywords
partition plates
vacuum
valve housing
vacuum ports
cutouts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12883585U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12883585U priority Critical patent/JPS6237670U/ja
Publication of JPS6237670U publication Critical patent/JPS6237670U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の実施例の一部截断平面図、第
２図及び第３図は夫々第１図の―線及び―
線截断面図である。 １……弁筐、２，２……真空ポート、３……回
転軸、９……駆動軸、３ａ，３ｂ……逆ねじ、１
１，１１……仕切板、１３，１３……切欠部。 FIG. 1 is a partially cut-away plan view of an embodiment of the present invention, and FIGS. 2 and 3 are lines shown in FIG.
FIG. 1... Valve housing, 2, 2... Vacuum port, 3... Rotating shaft, 9... Drive shaft, 3a, 3b... Reverse thread, 1
1, 11... Partition plate, 13, 13... Notch.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空ポートを形成した弁筐内に、左右に逆ねじ
を形成した回転軸を設けてこれを弁筐外から導入
した駆動軸に連結し、該回転軸の各逆ねじ部分に
、互に重合して前記真空ポートを閉鎖する仕切板
を夫々螺着させ、該仕切板に該回転軸に沿つての
移動に伴い該真空ポートへの開口面積を変化させ
る切欠部を形成して成る超高真空用可変オリフイ
ス。 A rotating shaft with reverse threads formed on the left and right sides is provided inside the valve housing in which a vacuum port is formed, and this is connected to a drive shaft introduced from outside the valve housing. For ultra-high vacuum use, the partition plates are screwed to each other to close the vacuum ports, and cutouts are formed in the partition plates to change the opening area to the vacuum ports as the partition plates move along the rotation axis. Variable orifice.
JP12883585U 1985-08-26 1985-08-26 Pending JPS6237670U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12883585U JPS6237670U (en) 1985-08-26 1985-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12883585U JPS6237670U (en) 1985-08-26 1985-08-26

Publications (1)

Publication Number Publication Date
JPS6237670U true JPS6237670U (en) 1987-03-05

Family

ID=31024859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12883585U Pending JPS6237670U (en) 1985-08-26 1985-08-26

Country Status (1)

Country Link
JP (1) JPS6237670U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06238601A (en) * 1993-02-22 1994-08-30 Romatec Kk Band saw machine
JP2011012730A (en) * 2009-06-30 2011-01-20 Industria:Kk Valve device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06238601A (en) * 1993-02-22 1994-08-30 Romatec Kk Band saw machine
JP2011012730A (en) * 2009-06-30 2011-01-20 Industria:Kk Valve device

Similar Documents

Publication Publication Date Title
JPS6161009U (en)
JPH0348173U (en)
JPH0348174U (en)
JPS6345278U (en)
JPS63133686U (en)
JPS61168361U (en)
JPS62175204U (en)
JPS5925751U (en) Rotary operation valve for simultaneous opening/closing or switching opening/closing of multiple passages
JPH026867U (en)
JPH0377870U (en)
JPS6263473U (en)
JPS629764U (en)
JPS61116921U (en)
JPH01113674U (en)
JPH036170U (en)
JPH0224166U (en)
JPS6293484U (en)
JPS6299320U (en)
JPH0298275U (en)
JPS6380301U (en)
JPH01140337U (en)
JPS61179465U (en)
JPH0369765U (en)
JPS6262073U (en)
JPS62157999U (en)