JPS6245834U - - Google Patents
Info
- Publication number
- JPS6245834U JPS6245834U JP1985137939U JP13793985U JPS6245834U JP S6245834 U JPS6245834 U JP S6245834U JP 1985137939 U JP1985137939 U JP 1985137939U JP 13793985 U JP13793985 U JP 13793985U JP S6245834 U JPS6245834 U JP S6245834U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- wafer
- support plate
- semiconductor device
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985137939U JPS6245834U (fr) | 1985-09-09 | 1985-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985137939U JPS6245834U (fr) | 1985-09-09 | 1985-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6245834U true JPS6245834U (fr) | 1987-03-19 |
Family
ID=31042460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985137939U Pending JPS6245834U (fr) | 1985-09-09 | 1985-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6245834U (fr) |
-
1985
- 1985-09-09 JP JP1985137939U patent/JPS6245834U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0385707A3 (fr) | Station terminale d'implanteur ionique | |
| JPH01170585U (fr) | ||
| JPS58193453U (ja) | 電子線装置における反射電子検出装置 | |
| JPH01142452U (fr) | ||
| JPH0615489Y2 (ja) | モーターの軸受構造 | |
| JPH02102653U (fr) | ||
| JPS6196601U (fr) | ||
| JPS62134264U (fr) | ||
| JPS63114035U (fr) | ||
| JPS6397233U (fr) | ||
| JPS61162855U (fr) | ||
| JPH0448258U (fr) | ||
| JPH0352723U (fr) | ||
| JPS62101359U (fr) | ||
| JPS6286054U (fr) | ||
| JPH01125361U (fr) | ||
| JPS6029167U (ja) | エッチング装置等用試料駆動装置 | |
| JPS6284031U (fr) | ||
| JPH0446547U (fr) | ||
| JPS60142206U (ja) | 長尺物移送装置 | |
| JPH02102539U (fr) | ||
| JPS6319758U (fr) | ||
| JPS62138444U (fr) | ||
| JPH0254262U (fr) | ||
| JPH0216100U (fr) |