JPS6247297B2 - - Google Patents

Info

Publication number
JPS6247297B2
JPS6247297B2 JP55110448A JP11044880A JPS6247297B2 JP S6247297 B2 JPS6247297 B2 JP S6247297B2 JP 55110448 A JP55110448 A JP 55110448A JP 11044880 A JP11044880 A JP 11044880A JP S6247297 B2 JPS6247297 B2 JP S6247297B2
Authority
JP
Japan
Prior art keywords
photoresist
mask
profile
lift
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55110448A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5680041A (en
Inventor
Jefuriizu Kurekatsuku Nikorasu
Deian Gurando Baabara
Guranto Uiruson Kaaruton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS5680041A publication Critical patent/JPS5680041A/ja
Publication of JPS6247297B2 publication Critical patent/JPS6247297B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/016—Diazonium salts or compounds
    • G03F7/0163—Non ionic diazonium compounds, e.g. diazosulphonates; Precursors thereof, e.g. triazenes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Materials For Photolithography (AREA)
JP11044880A 1979-12-03 1980-08-13 Resist composition Granted JPS5680041A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/099,806 US4284706A (en) 1979-12-03 1979-12-03 Lithographic resist composition for a lift-off process

Publications (2)

Publication Number Publication Date
JPS5680041A JPS5680041A (en) 1981-07-01
JPS6247297B2 true JPS6247297B2 (2) 1987-10-07

Family

ID=22276712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11044880A Granted JPS5680041A (en) 1979-12-03 1980-08-13 Resist composition

Country Status (5)

Country Link
US (1) US4284706A (2)
EP (1) EP0029901B1 (2)
JP (1) JPS5680041A (2)
CA (1) CA1122467A (2)
DE (1) DE3063170D1 (2)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4339522A (en) * 1979-06-18 1982-07-13 International Business Machines Corporation Ultra-violet lithographic resist composition and process
DE3136484A1 (de) * 1981-09-15 1983-03-31 Kulzer & Co Gmbh, 6380 Bad Homburg "verfahren zur photopolymerisation von vinylverbindu ngen und photopolymerisierbares material"
US4522911A (en) * 1983-06-28 1985-06-11 International Business Machines Corporation Deep ultra-violet lithographic resists with diazohomotetramic acid compounds
US4626491A (en) * 1983-10-07 1986-12-02 J. T. Baker Chemical Company Deep ultra-violet lithographic resist composition and process of using
US4622283A (en) * 1983-10-07 1986-11-11 J. T. Baker Chemical Company Deep ultra-violet lithographic resist composition and process of using
US4624908A (en) * 1985-04-15 1986-11-25 J. T. Baker Chemical Company Deep ultra-violet lithographic resist composition and process of using
US5169741A (en) * 1988-10-11 1992-12-08 Matsushita Electric Industrial Co., Ltd. Method for forming high sensitivity positive patterns employing a material containing a photosensitive compound having a diazo group, an alkaline-soluble polymer, a compound capable of adjusting the pH to 4 or less and a solvent
DE3837438A1 (de) * 1988-11-04 1990-05-10 Basf Ag Strahlungsempfindliches gemisch
DE3837513A1 (de) * 1988-11-04 1990-05-10 Basf Ag Strahlungsempfindliches gemisch
US5275920A (en) * 1989-04-24 1994-01-04 Siemens Aktiengesellschaft Method of dry development utilizing quinone diazide and basic polymer resist with latent image intensification through treatment with silicon-organic compound in water
US5202315A (en) * 1989-05-11 1993-04-13 Lucky, Ltd. Cephalosporin compounds
US5182185A (en) * 1989-06-29 1993-01-26 Hoechst Celanese Corporation Deep u.v. photoresist compositions containing 4-tert-butylstyrene/maleimide copolymer and polycyclic cyclopentane-2-diazo-1,3-dione and elements utilizing the compositions
US5039596A (en) * 1989-06-29 1991-08-13 Hoechst Celanese Corporation Deep u.v. photoresist process utilizing compositions containing polycyclic cyclopentane 2-diazo-1,3-dione
US5773200A (en) * 1994-06-23 1998-06-30 Shin-Etsu Chemical Co., Ltd. Positive resist composition suitable for lift-off technique and pattern forming method
US5876897A (en) * 1997-03-07 1999-03-02 Clariant Finance (Bvi) Limited Positive photoresists containing novel photoactive compounds
JP3368852B2 (ja) * 1998-11-27 2003-01-20 株式会社村田製作所 積層パターンの形成方法
JP3299214B2 (ja) 1999-03-12 2002-07-08 松下電器産業株式会社 パターン形成材料及びパターン形成方法
JP2004264728A (ja) * 2003-03-04 2004-09-24 Sumitomo Chem Co Ltd 感光性樹脂組成物
US7846644B2 (en) * 2007-11-20 2010-12-07 Eastman Kodak Company Photopatternable deposition inhibitor containing siloxane
KR101431466B1 (ko) * 2008-07-30 2014-08-22 삼성디스플레이 주식회사 유기 발광 소자의 제조 방법
US7951525B2 (en) * 2008-09-08 2011-05-31 International Business Machines Corporation Low outgassing photoresist compositions
TWI588139B (zh) * 2010-12-28 2017-06-21 Nissan Chemical Ind Ltd A coating liquid for forming a functional polymer film, and a method for forming a functional polymer film

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE508815A (2) * 1949-07-23
NL255517A (2) * 1959-09-04
US3615532A (en) * 1963-12-09 1971-10-26 Union Carbide Corp Printing plate compositions
GB1116674A (en) * 1966-02-28 1968-06-12 Agfa Gevaert Nv Naphthoquinone diazide sulphofluoride
US3661582A (en) * 1970-03-23 1972-05-09 Western Electric Co Additives to positive photoresists which increase the sensitivity thereof
US3666473A (en) * 1970-10-06 1972-05-30 Ibm Positive photoresists for projection exposure
US3950173A (en) * 1973-02-12 1976-04-13 Rca Corporation Electron beam recording article with o-quinone diazide compound
US3849136A (en) * 1973-07-31 1974-11-19 Ibm Masking of deposited thin films by use of a masking layer photoresist composite
US3982943A (en) * 1974-03-05 1976-09-28 Ibm Corporation Lift-off method of fabricating thin films and a structure utilizable as a lift-off mask
US4123279A (en) * 1974-03-25 1978-10-31 Fuji Photo Film Co., Ltd. Light-sensitive o-quinonediazide containing planographic printing plate
US4093461A (en) * 1975-07-18 1978-06-06 Gaf Corporation Positive working thermally stable photoresist composition, article and method of using
US4115120A (en) * 1977-09-29 1978-09-19 International Business Machines Corporation Method of forming thin film patterns by differential pre-baking of resist

Also Published As

Publication number Publication date
EP0029901B1 (en) 1983-05-11
US4284706A (en) 1981-08-18
DE3063170D1 (en) 1983-06-16
CA1122467A (en) 1982-04-27
EP0029901A1 (en) 1981-06-10
JPS5680041A (en) 1981-07-01

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