JPS6247601A - Antireflection film - Google Patents
Antireflection filmInfo
- Publication number
- JPS6247601A JPS6247601A JP60187723A JP18772385A JPS6247601A JP S6247601 A JPS6247601 A JP S6247601A JP 60187723 A JP60187723 A JP 60187723A JP 18772385 A JP18772385 A JP 18772385A JP S6247601 A JPS6247601 A JP S6247601A
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- layer
- film
- thin film
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims abstract description 57
- 239000007788 liquid Substances 0.000 claims abstract description 54
- 239000010408 film Substances 0.000 claims abstract description 50
- 239000000463 material Substances 0.000 claims abstract description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 28
- 238000001246 colloidal dispersion Methods 0.000 claims abstract description 12
- 229910000410 antimony oxide Inorganic materials 0.000 claims abstract description 11
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000002904 solvent Substances 0.000 claims abstract description 8
- 239000010419 fine particle Substances 0.000 claims description 18
- 239000000203 mixture Substances 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 6
- 239000012298 atmosphere Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 abstract description 71
- 239000011248 coating agent Substances 0.000 abstract description 68
- 239000002245 particle Substances 0.000 abstract description 14
- 239000011347 resin Substances 0.000 abstract description 14
- 229920005989 resin Polymers 0.000 abstract description 14
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000001035 drying Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 23
- 238000000034 method Methods 0.000 description 22
- 239000000243 solution Substances 0.000 description 20
- 239000002609 medium Substances 0.000 description 19
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 18
- 238000001723 curing Methods 0.000 description 17
- 239000007787 solid Substances 0.000 description 17
- 239000002585 base Substances 0.000 description 16
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 12
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 12
- 238000003756 stirring Methods 0.000 description 12
- 238000002360 preparation method Methods 0.000 description 11
- LJCFOYOSGPHIOO-UHFFFAOYSA-N antimony pentoxide Chemical compound O=[Sb](=O)O[Sb](=O)=O LJCFOYOSGPHIOO-UHFFFAOYSA-N 0.000 description 10
- 239000008119 colloidal silica Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 9
- 238000011282 treatment Methods 0.000 description 9
- 239000002612 dispersion medium Substances 0.000 description 8
- 239000007864 aqueous solution Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 229920001296 polysiloxane Polymers 0.000 description 6
- 239000004094 surface-active agent Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 5
- 241000501754 Astronotus ocellatus Species 0.000 description 5
- SYFOAKAXGNMQAX-UHFFFAOYSA-N bis(prop-2-enyl) carbonate;2-(2-hydroxyethoxy)ethanol Chemical compound OCCOCCO.C=CCOC(=O)OCC=C SYFOAKAXGNMQAX-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229920003002 synthetic resin Polymers 0.000 description 5
- 239000000057 synthetic resin Substances 0.000 description 5
- IVIDDMGBRCPGLJ-UHFFFAOYSA-N 2,3-bis(oxiran-2-ylmethoxy)propan-1-ol Chemical compound C1OC1COC(CO)COCC1CO1 IVIDDMGBRCPGLJ-UHFFFAOYSA-N 0.000 description 4
- WRMNZCZEMHIOCP-UHFFFAOYSA-N 2-phenylethanol Chemical compound OCCC1=CC=CC=C1 WRMNZCZEMHIOCP-UHFFFAOYSA-N 0.000 description 4
- MPCRDALPQLDDFX-UHFFFAOYSA-L Magnesium perchlorate Chemical compound [Mg+2].[O-]Cl(=O)(=O)=O.[O-]Cl(=O)(=O)=O MPCRDALPQLDDFX-UHFFFAOYSA-L 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- -1 polyethylene terephthalate Polymers 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000004043 dyeing Methods 0.000 description 3
- 238000009501 film coating Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002736 metal compounds Chemical class 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 150000004756 silanes Chemical class 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 235000010980 cellulose Nutrition 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 239000007822 coupling agent Substances 0.000 description 2
- YQGOWXYZDLJBFL-UHFFFAOYSA-N dimethoxysilane Chemical compound CO[SiH2]OC YQGOWXYZDLJBFL-UHFFFAOYSA-N 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- DKAGJZJALZXOOV-UHFFFAOYSA-N hydrate;hydrochloride Chemical compound O.Cl DKAGJZJALZXOOV-UHFFFAOYSA-N 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000000025 natural resin Substances 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 210000003454 tympanic membrane Anatomy 0.000 description 2
- UWFRVQVNYNPBEF-UHFFFAOYSA-N 1-(2,4-dimethylphenyl)propan-1-one Chemical compound CCC(=O)C1=CC=C(C)C=C1C UWFRVQVNYNPBEF-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- UZFMOKQJFYMBGY-UHFFFAOYSA-N 4-hydroxy-TEMPO Chemical compound CC1(C)CC(O)CC(C)(C)N1[O] UZFMOKQJFYMBGY-UHFFFAOYSA-N 0.000 description 1
- FPJPAIQDDFIEKJ-UHFFFAOYSA-N 4-trimethoxysilylbutanenitrile Chemical compound CO[Si](OC)(OC)CCCC#N FPJPAIQDDFIEKJ-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229920002101 Chitin Polymers 0.000 description 1
- 229920001661 Chitosan Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229920002845 Poly(methacrylic acid) Chemical class 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 108010009736 Protein Hydrolysates Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- PQCCZSBUXOQGIU-UHFFFAOYSA-N [La].[Pb] Chemical compound [La].[Pb] PQCCZSBUXOQGIU-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000004423 acyloxy group Chemical group 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000003368 amide group Chemical group 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- 239000013522 chelant Chemical class 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- JVLRYPRBKSMEBF-UHFFFAOYSA-K diacetyloxystibanyl acetate Chemical compound [Sb+3].CC([O-])=O.CC([O-])=O.CC([O-])=O JVLRYPRBKSMEBF-UHFFFAOYSA-K 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000000986 disperse dye Substances 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- SBRXLTRZCJVAPH-UHFFFAOYSA-N ethyl(trimethoxy)silane Chemical compound CC[Si](OC)(OC)OC SBRXLTRZCJVAPH-UHFFFAOYSA-N 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 150000003948 formamides Chemical class 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 229920002100 high-refractive-index polymer Polymers 0.000 description 1
- 238000007602 hot air drying Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920005615 natural polymer Polymers 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920002006 poly(N-vinylimidazole) polymer Polymers 0.000 description 1
- 229920001308 poly(aminoacid) Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 238000012643 polycondensation polymerization Methods 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920002717 polyvinylpyridine Polymers 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009331 sowing Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 229920001059 synthetic polymer Polymers 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-VIFPVBQESA-N trimethoxy-[3-[[(2r)-oxiran-2-yl]methoxy]propyl]silane Chemical compound CO[Si](OC)(OC)CCCOC[C@H]1CO1 BPSIOYPQMFLKFR-VIFPVBQESA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、透明基材上に施される反射防止膜VC関する
。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an antireflection coating VC applied on a transparent substrate.
本発明は、透明基材の表面反射を低減させるための反射
防止膜において、透明基材の少なくとも一部に屈折率の
異なる三層の薄膜からなる反射防止l11!を液状組成
物の塗布・硬化により施すにあたり、透明基材層よりも
高屈折率全盲する薄膜全形我するための塗布族に、水ま
たは他の浴媒に分散した酸化アンチモン微粒子のコロイ
ド分散体を用いることにより、付も一性、硬度、面]薬
品1生、而づ擦傷性、耐水性、染色性などの諸物性を向
上させ、大容M1犬級生産が可能な反射防止膜を提供す
るものである。The present invention provides an anti-reflection film for reducing surface reflection of a transparent substrate, which comprises three layers of thin films with different refractive indexes on at least a portion of the transparent substrate. A colloidal dispersion of fine antimony oxide particles dispersed in water or other bath medium is used to coat a thin film with a higher refractive index than the transparent base material layer by coating and curing a liquid composition. By using this material, we improve physical properties such as uniformity, hardness, surface resistance, scratch resistance, water resistance, dyeability, etc., and provide an anti-reflection film that can be produced in large volumes such as M1 dog grade. It is something to do.
反射防止に■理論とそO積層状については、多くの方法
が提案されており、真空蒸着法により、金極醒化物やフ
ッ化物再0薄膜?形成する方法やスパッタ蒸着、イオン
ブレーティング等のPVD法や各種のCVD技術が一般
的でおる。Many methods have been proposed for anti-reflection ■Theory and layered structure. Vacuum evaporation can be used to create a thin film of gold or fluoride compounds. PVD methods such as sputter deposition, ion blating, and various CVD techniques are commonly used.
一方、これらの物理蒸着法以外に、液状で塗布し硬化さ
せることによって反射防止膜を得る方法として、特開昭
58−46301号公報には二層からなる反射防止膜、
特開昭59−49501号公報には三層からなる反射防
止膜が提案づれている。これらの方法は、チタンアルコ
ラードとコロイダルシリカからなる組成物全高Mjll
折率薄折率薄材用材料、シランカップリング剤とエポキ
シ化合物オよびコロイダルシリカからなる組成物を吐油
折率薄膜用材料に用いることにより反射防止効果を発現
している。On the other hand, in addition to these physical vapor deposition methods, there is a method for obtaining an antireflection film by coating it in liquid form and curing it.
Japanese Unexamined Patent Publication No. 59-49501 proposes an antireflection film consisting of three layers. These methods are based on the total height of a composition consisting of titanium alcoholade and colloidal silica.
An antireflection effect is achieved by using a composition consisting of a silane coupling agent, an epoxy compound, and colloidal silica as a material for a refractive index thin film.
また、特開昭57−37301号公報には、合成樹脂の
層からなる単層または多層の反射防止膜を施した合成樹
H゛ぼ製レンズが提案されており、この方法では、高屈
折率薄膜用材料として、チタン、タンタル等■アルコラ
ード、メラミン樹脂等が用いられてhる。Furthermore, Japanese Patent Laid-Open No. 57-37301 proposes a lens made of synthetic resin with a single or multi-layer anti-reflection film made of synthetic resin. Titanium, tantalum, etc., Alcolade, melamine resin, etc. are used as materials for the thin film.
また、透明材料以外の基材上に反射防止8!ij、を設
けるψ(1として、太陽電池の嗅結晶シリコン0衣面に
、テトライソプロポキシチタンを含む液状組成物を塗布
・加熱し、分解生成物として酸化チタンの薄膜を形成さ
せ、単層の反射防止効果を得る方法がある。(RCA、
Review、Vo1m41、No、2.I’133〜
180(1980))〔発明が解決しようとする間@点
及び目的〕しかし、前述の従来技術の内、真空蒸着法、
スパッタ蒸着、イオンブレーティング、CVD法等によ
る反射防止kmの形成法は、
(1)高度の真空度を侠する為、処理すべき基材O大き
さ、材料に制限を生ずる。また製造時間が長くかかり、
生産性、経済性が低い。Also, anti-reflection 8! on base materials other than transparent materials! A liquid composition containing tetraisopropoxy titanium is applied and heated on the olfactory crystal silicon 0 coating surface of a solar cell to form a thin film of titanium oxide as a decomposition product. There is a method to obtain anti-reflection effect (RCA,
Review, Vol. 1m41, No. 2. I'133~
180 (1980)) [Points and objects to be solved by the invention] However, among the above-mentioned conventional techniques, vacuum evaporation method,
Methods of forming anti-reflection film by sputter deposition, ion blating, CVD, etc. (1) require a high degree of vacuum, which imposes restrictions on the size and material of the substrate to be treated; It also takes a long time to manufacture,
Productivity and economy are low.
(2)薄膜材料は、主として無機化合物であり、緻密な
硬い膜を構成する反面、柔軟性に劣り、基材とO線膨張
率■違いがあると環境温度の変化によりクラックを生じ
たり、成形物品Th1G械的に曲げた時にクラックを生
ずる。(2) Thin film materials are mainly inorganic compounds, and while they form a dense, hard film, they are inferior in flexibility, and if there is a difference in the O-line expansion coefficient from the base material, cracks may occur due to changes in the environmental temperature, or molding Cracks occur when article Th1G is mechanically bent.
(3) 薄膜材料が強固に付着する基材材料が非常に
限定され、合1M、樹脂根やフィルムに充分な付着性を
得る事は非常に困難である。(3) The base material to which the thin film material firmly adheres is very limited, and it is very difficult to obtain sufficient adhesion to the resin base or film.
(4)染色、有色等の加工性に乏しい為、可視部に吸収
帯を持つ蒸着材料による有色に限定される。(4) Due to poor processing properties such as dyeing and coloring, coloring is limited to vapor deposition materials that have an absorption band in the visible region.
また、反射防止加工後の朱色は不可能である。In addition, it is impossible to create a vermilion color after anti-reflection processing.
等の問題点を有する。It has the following problems.
また、特開昭58−46301号公報による方法では、
反射防止薄膜が二層より形成されるため用途によって次
のような問題点がある。Furthermore, in the method disclosed in Japanese Patent Application Laid-Open No. 58-46301,
Since the antireflection thin film is formed from two layers, there are the following problems depending on the application.
(1)高い反射防止効果を発現させるための収厚コント
ロール’fc Vk度良く行わねばならず、製造のバラ
ツキが大きい。(1) To achieve a high antireflection effect, thickness control 'fc Vk must be performed with great precision, and manufacturing variations are large.
(2)特に眼鏡レンズ用に要望の強い、緑色系の反射干
渉色が得にくい。(2) It is difficult to obtain a greenish reflective interference color, which is particularly desired for eyeglass lenses.
さらには、特開昭58−46301号公報、特開昭59
−49501号公報による方法では、チタンのアルコラ
ード化合物、キレート化合物等O有機チタン化合物が高
屈折率薄膜材料として用^られているが、これらのチタ
ン化合(吻は通常350℃もしくはそれ以上の温度で完
全に縮重合するため、実施例中の硬化温度では、チタン
酸化物の薄膜が得られ難く、未反応アルコラード等O存
在により付着性、各種耐久性の点でかなりの問題点を有
する。Furthermore, JP-A-58-46301, JP-A-59
In the method according to Publication No. 49501, organic titanium compounds such as titanium alcoholade compounds and chelate compounds are used as high refractive index thin film materials. Since complete condensation polymerization occurs, it is difficult to obtain a thin film of titanium oxide at the curing temperature in the examples, and the presence of unreacted oxygen such as alcolade causes considerable problems in terms of adhesion and various durability.
また、金属アルコラードを用いて薄膜を形成する方法で
は、薄膜O表面側に未反応17)−OR基、−OR基が
残存するため、特に耐水性の点で問題がある。こOため
、太陽電池に用いられる単結晶シリコンや、無限ガラス
等の熱安定性を有する基材であれば、高温加熱が可能で
あり、膜り耐久性O開祖を解決することができるが、プ
ラスチック等■熱可塑性樹脂の場合には、塗布基材とし
て制限を生じるため、金属アルコラードの使用が困難で
ある。Furthermore, in the method of forming a thin film using metal alcoholade, unreacted 17) -OR groups and -OR groups remain on the surface side of the thin film O, which poses a problem particularly in terms of water resistance. Therefore, if the base material has thermal stability such as single crystal silicon used in solar cells or infinite glass, high temperature heating is possible and the problem of film durability can be solved. In the case of thermoplastic resins such as plastics, it is difficult to use metal alcolades due to limitations as a coating base material.
また、特開昭57−37301号公報の天紬例に開示さ
れた方法では、反射防止効果が充分でなく、また耐水性
も充分ではないという問題点を有する。Furthermore, the method disclosed in the Tentsumugi example of JP-A-57-37301 has problems in that the antireflection effect is not sufficient and the water resistance is not sufficient.
そこで、本発明は、このような問題点を解決するもので
、その目的とするところは、優れた反射防止特性を有し
、付着性、各種耐久性に富む反射防止膜を提供すること
にある。Therefore, the present invention is intended to solve these problems, and its purpose is to provide an antireflection film that has excellent antireflection properties and is highly adhesive and durable. .
本発明の反射防止膜は、
α)透明基材■少なくとも一部に、該基材から大気側に
向かって、■、@、θ■三層Q薄暎からなる反射防止膜
を施すにあたり、
b)■、@、○の三層の光学特性は、各々■ 1.55
<71α< 1.80
na X da = Aλ1/4 Cnm>@1.6
5 < nb < 2.25
nb X db = mλ2/4 (?L77L)
nb >na
61.40 < nc < 1.50
nc X dc = nλ3/4 (nm)(ここ
で、na 、 nb jnc は各々、[イ]層、[
ロ]へン。The anti-reflection film of the present invention includes the following steps: α) When applying an anti-reflection film consisting of a three-layer Q thin film to at least a portion of a transparent base material, from the base material toward the atmosphere side, b) ) The optical properties of the three layers of ■, @, and ○ are respectively ■ 1.55
<71α< 1.80 na X da = Aλ1/4 Cnm>@1.6
5 < nb < 2.25 nb X db = mλ2/4 (?L77L)
nb > na 61.40 < nc < 1.50 nc
[B]hen.
0層の屈折率、da 、 clb 、 dcは各々、■
Ii @ (g) I、h、θ層Di厚(nm) kN
L、m’a正O正数整数、nは奇り正整数、λl 、
λ2 、λ3は各々独立に可視領駿■波長(nm単位)
を表す、また、na〉(基材■屈折率)である、)の条
件をイ補たし1、、=)eD層、@層、θ層O各薄膜は
、各々、液状で塗布し、加熱、乾燥或いは活性エネルギ
ー線による硬化で得られ、
d)さらに、■I’:i a @/W k形成するため
の液状組成物は成分として水または他7)浴媒に分散し
た酸化アンチモン微粒子Oフロイド分散体により提供さ
れる仁と全特徴とする。The refractive index of the 0 layer, da, clb, and dc are each
Ii @ (g) I, h, θ layer Di thickness (nm) kN
L, m'a positive O positive integer, n is odd positive integer, λl,
λ2 and λ3 are each independently visible wavelength (in nm)
, and na〉(substrate ■ refractive index). 1, =) e D layer, @ layer, θ layer O Each thin film is applied in liquid form, obtained by heating, drying, or curing with active energy rays, and d) Furthermore, the liquid composition for forming ■I':ia@/Wk contains as a component water or other 7) Antimony oxide fine particles dispersed in a bath medium. O-Floyd dispersion has all the features and characteristics provided by it.
ここで、透明基材とは、ガラス成形物をはじめPMMA
やポリカーボネート、ポリエチレンテレフタレート、ジ
エチレングリコールビスアリルカーボネート、ポリスチ
レン、核置換フェニル&Th分子内に有する高屈折率樹
脂、アリル樹脂等の光学用途に用いられている合成樹脂
成形物品であり、その形状ハ、フィルム、パネル、レン
ズ、シート、そO他任意の物品に加工したものを用いる
ことができる。これらの基材は、そ7)t−1で、或い
は8焚に応じて艮面を変性させて、反射防止薄膜との付
着性を向上させることがol’能である。この衣面処理
の方法として、アルカリ性耐液或いは酸化力のある強敵
による処理(特公昭38−13784号公報等)、オゾ
ンによる処tl(、T]5P3227605号)、電荷
を負荷した火炎による処理(特開昭48−84879号
公報)、プラズマガスによる処理(特開昭53−137
269号公報)。Here, the transparent base material includes glass molded products and PMMA.
It is a synthetic resin molded article used for optical purposes such as polycarbonate, polyethylene terephthalate, diethylene glycol bisallyl carbonate, polystyrene, high refractive index resin having nuclear substituted phenyl & Th in the molecule, allyl resin, etc., and its shape, film, It is possible to use panels, lenses, sheets, and other arbitrary articles processed. These base materials can be modified to improve adhesion with the antireflection thin film by modifying the surface of the base material in accordance with 7) t-1 or 8 firing. The coating surface treatment methods include treatment with alkaline liquid-resistant or strong oxidizing agents (Japanese Patent Publication No. 38-13784, etc.), treatment with ozone TL (T]5P3227605), treatment with flame loaded with electric charge ( JP-A-48-84879), plasma gas treatment (JP-A-53-137)
Publication No. 269).
酸化剤と還元剤による処理(特開昭48−81966
Jy公報)−ポリエチレングリコールを含むアルカリ金
属溶液による処理(特願昭59−119682号)その
他、コロナ放電、スパッタリン“グ、紫外線や電子線、
放射線等の活性軍田波照射等の例を挙けることができ、
基材■材質や表面■状態により、公知の表面処理¥−施
して使用することができる。Treatment with oxidizing agent and reducing agent (JP-A-48-81966
Jy Publication) - Treatment with an alkali metal solution containing polyethylene glycol (Japanese Patent Application No. 59-119682) In addition, corona discharge, sputtering, ultraviolet rays, electron beams,
Examples include active military irradiation with radiation, etc.
Depending on the substrate material and surface condition, known surface treatments can be applied.
また、基材が合成樹脂■ように比較的傷つき易い場合、
耐摩耗性を向上させる為、予め、耐摩耗性Q硬化被膜を
施し、その上に反射防止薄膜を積層することができる。In addition, if the base material is relatively easily damaged such as synthetic resin,
In order to improve the abrasion resistance, a wear-resistant Q cured coating can be applied in advance, and an antireflection thin film can be laminated thereon.
これらの方法としては、例えば、特願昭58−1554
55号や、特公昭57−2735号公報等に示された表
面硬化被膜全形成する方法がある。また、N色原や調光
性能を有する被膜を有する光学基材(特開昭59−46
623号公報)を用いることもできる。These methods include, for example, Japanese Patent Application No. 58-1554.
55, Japanese Patent Publication No. 57-2735, etc., there is a method of completely forming a surface hardening film. In addition, optical substrates with coatings having N chromogen and dimming performance (Japanese Patent Laid-Open No. 59-46
623) can also be used.
本発明において、反射防止膜として屈折率の相異なる三
層の薄膜を透明基材上に形成する訳であるが、薄膜の光
学機能は、それぞれの薄膜?形成するための液Amg物
およびその塗布法・硬化法により、各薄膜の光学特性が
決定付けられる。In the present invention, three thin films with different refractive indexes are formed on a transparent substrate as an anti-reflection film. The optical properties of each thin film are determined by the liquid Amg material used to form it and its application and curing methods.
本発明における■、[ロ]、[ハ]の各層を形成する為
■液状組成物の成分として、酸化アンチモンO微粒子θ
コロイド分散体は、高屈折率成分として不可欠θもので
ある。また、更に、塗膜′7)耐水性、耐久性、技染色
性を得る為にも重要な成分である。In order to form each layer of (1), (2), and (3) in the present invention, antimony oxide O fine particles θ are used as a component of the liquid composition.
The colloidal dispersion is essential as a high refractive index component. In addition, it is also an important component for obtaining coating film '7) water resistance, durability, and dyeability.
また、これ以外には、溶媒にシリカ微粒子全分散させた
コロイダルシリカ、有機残基kWjる金属化合物やその
加水分解縮合物、天然樹脂、合成便脂等の高分子、重合
性亀緻体、熟硬化反応型単匿体等の反応性化合物から選
ばれる少くとも一成分を用い、屈折率を!1.Il整し
、或1八は染色性を改善することができる。In addition to this, colloidal silica with silica fine particles completely dispersed in a solvent, metal compounds containing organic residues and their hydrolyzed condensates, natural resins, polymers such as synthetic toilet fat, polymerizable crystalline bodies, and mature Use at least one component selected from reactive compounds such as hardening-reactive single-particles to improve the refractive index! 1. It is possible to improve the dyeing properties or improve the stainability.
ここで、酸化アンチモン微粒子のコロイドゾル体とは、
五酸化アンチモン、あるいは、三酸化アンチモン微粒子
で、気相法で得たものを分散媒に分散したものや、液相
法で得たコロイドゾル等が利用できる。このゾルの微粒
子の粒径は、1〜100m1t、好ましくは1〜50m
μの酸化アンチモンが有用である9粒径が100?71
μ以上では鼓膜に白濁金主じ、1mμ以下T:は、鼓膜
の耐水性が低下する。酸化アンチモン微粒子の分散媒と
しては、水、メタノール、エタノール、イングロバノー
ル、セロンルブ等の他、酢酸等のカルボン酸O使用も可
能である。また、特に水を分散媒とした場合、ゾル微粒
子を酢酸、硝酸、硫酸、アミン等で安定化させたものが
有用である。Here, the colloidal sol of antimony oxide fine particles is
Antimony pentoxide or antimony trioxide fine particles obtained by a gas phase method and dispersed in a dispersion medium, or a colloidal sol obtained by a liquid phase method can be used. The particle size of the fine particles of this sol is 1 to 100 m1t, preferably 1 to 50 m1t.
Antimony oxide of μ is useful 9 particle size is 100 to 71
If it is more than μ, the eardrum will become cloudy, and if it is less than 1 mμ, the water resistance of the eardrum will decrease. As a dispersion medium for antimony oxide fine particles, in addition to water, methanol, ethanol, inglobanol, selonlube, etc., carboxylic acid O such as acetic acid can also be used. In addition, particularly when water is used as a dispersion medium, sol fine particles stabilized with acetic acid, nitric acid, sulfuric acid, amine, etc. are useful.
こO酸化アンチモン微粒子は、形成された薄膜中に0層
で10重社チ以上、0層で40重社チ以上含まれること
が必要であり、これは、■層、■層における酸化アンチ
モン微粒子の含有量がそれ以下になると反射防止薄膜と
して要求される所望の屈折率が得られ難いためである。The antimony oxide fine particles must be contained in the formed thin film at least 10 times or more in the 0th layer, and at least 40 times or more in the 0th layer. This is because if the content is less than that, it will be difficult to obtain the desired refractive index required for an antireflection thin film.
次に、コロイダルシリカとしては、粒径1〜10077
1μ■シリ力微粒子を含むも■が、所望■硬さを得る上
で好適であるが、コロイダルシリカの代わりに、池■金
属酸化物微粒子0コロイド状分散体を併用することもで
きる。Next, as colloidal silica, the particle size is 1 to 10077.
Although silica (1) containing 1 µm silica fine particles is suitable for obtaining the desired hardness, a colloidal dispersion containing 0 metal oxide fine particles can also be used in place of colloidal silica.
また、有機残基全方する金属化合物としては、一般式E
eaRh *、 8 i 4−α−すで夫わされるシラ
ンカップリング剤や、テトラアルコキシシラン等がある
。In addition, as a metal compound having all organic residues, the general formula E
Examples include silane coupling agents combined with eaRh*, 8 i 4-α-, tetraalkoxysilane, and the like.
これらの加水分解物、部分縮合物等も同等O性質を有す
る。ここでR1は、アルキル基、アルケニル基、フェニ
ル基、ハロゲン基等、またR?は、エポキシ基、アミン
基、アミド基、メルカプト基、メタクリロイルオキシ基
、シアン基、核ハロゲン化芳香猿を有する基等を含む有
機基を示し、Xはハロゲン基、アルコキシル基、アルコ
キシアルコキシル基、アシルオキシ基等の加水分解可能
な基を示す、また、α、bは、各々0.1または2で、
α+bが1な^し3である。これらの化合物の例として
は、テトラメトキシシラン等の四官能シラン、メチルト
リメトキシシラン、r−クロロプロピルトリメトキシシ
ラン、ビニルトリメトキシシラン、r−メタクリロイル
オキシプロピルトリメトキシシラン、βf3.4−エポ
キシシクロヘキシル)エチルトリメトキシシラン#r−
ダリシドキシプロビルトリメトキシシラン、γ−メチル
カプトプロピルトリメトキシシラン、γ−アミノプロピ
ルトリメトキシシラン、N−β−(アミノエチル)−r
−アミノプロピルトリメトキシシラン、r−ウレイドグ
ロビルトリメトキシシラン、γ−シアノプロピルトリメ
トキシシラン、r−モ゛ルフオリノブロビルトリメトキ
シシラン、N−フェニルアミノグロビルトリメトキシシ
ラン等の三官能シラン、前記三官能シラン〇一部がメチ
ル基、エチル基、ビニル基に置換した三官能シラン等が
挙げられる。この他、特に低屈折率層を形成させる為に
、パーフルオロアルキル基を含む官能シラン化合物が好
適である。These hydrolysates, partial condensates, etc. also have similar O properties. Here, R1 is an alkyl group, an alkenyl group, a phenyl group, a halogen group, etc., or R? represents an organic group including an epoxy group, an amine group, an amide group, a mercapto group, a methacryloyloxy group, a cyan group, a group having a halogenated aromatic group, and X represents a halogen group, an alkoxyl group, an alkoxyalkoxyl group, an acyloxy represents a hydrolyzable group such as a group, and α and b are each 0.1 or 2,
α+b is 1 and 3. Examples of these compounds include tetrafunctional silanes such as tetramethoxysilane, methyltrimethoxysilane, r-chloropropyltrimethoxysilane, vinyltrimethoxysilane, r-methacryloyloxypropyltrimethoxysilane, βf3.4-epoxycyclohexyl ) Ethyltrimethoxysilane #r-
Dalicidoxypropyltrimethoxysilane, γ-methylcaptopropyltrimethoxysilane, γ-aminopropyltrimethoxysilane, N-β-(aminoethyl)-r
- Trifunctional silanes such as aminopropyltrimethoxysilane, r-ureidoglobiltrimethoxysilane, γ-cyanopropyltrimethoxysilane, r-molfluorinobrobiltrimethoxysilane, and N-phenylaminoglobiltrimethoxysilane , and trifunctional silanes in which a portion of the trifunctional silane is substituted with a methyl group, an ethyl group, or a vinyl group. In addition, a functional silane compound containing a perfluoroalkyl group is suitable, especially for forming a low refractive index layer.
また、シラン以外の有機残基全方する金属化合物は、全
般に屈折率の高い薄膜形成に有用である。Furthermore, metal compounds containing all organic residues other than silane are generally useful for forming thin films with a high refractive index.
この例としては、チタネート系カップリング剤やアルミ
ニウム系カップリング剤’thしめ、ジルコニウム、タ
ンタル、スズ、インジウム等のアルコラード、アシレー
トやキレート性化合物が性用である。Examples of this include titanate coupling agents, aluminum coupling agents, alcoholades, acylates, and chelating compounds such as zirconium, tantalum, tin, and indium.
この他、これらと類似O方法で調整出来るハフニウム、
トリウム、バナジウム、ニオブ、クロム、モリブテン、
マンガン、鉄、セリウム、ランタン鉛、亜鉛等のアルコ
ラード、アシレート、キレート性化合物等も利用可能で
ある。In addition, hafnium, which can be prepared by a similar O method to these,
Thorium, vanadium, niobium, chromium, molybdenum,
Alcolades, acylates, chelating compounds, etc. of manganese, iron, cerium, lanthanum lead, zinc, etc. can also be used.
次に、天然樹脂、合成樹脂等の高分子材料としては、主
な目的は、金桟原子■安定化剤、或lAは柔軟性、被染
色性、靭性を付与することである。Next, the main purpose of polymeric materials such as natural resins and synthetic resins is to impart flexibility, dyeability, and toughness.
ttRO例としては、カルボキシアルキル化セルロース
等のセルロース類、テルペン糸樹脂、グルコース訪導体
、ポリアミノ酸、キチン、キトサン類、デンプン類の天
然高分子や、ポリビニルアルコール、ポリエチレングリ
コール、ポリアクリル酸、ポリアクリル酸エステル、ポ
リメタクリル酸エステル、ポリビニルアミン、ポリウレ
タン、ポリビニルピロリドン、ポリビニルピリジン、ポ
リビニルイミダゾール等の陰性基を有する合成高分子や
、ポリスチレン、ビスフェノールA#ポリカーボネート
等の會芳香族高分子やポリサル7オン類■高屈折率高分
子、フッ素樹脂のような低屈折率高分子が挙げられる。Examples of ttRO include celluloses such as carboxyalkylated cellulose, terpene thread resins, glucose conductors, polyamino acids, chitin, chitosans, natural polymers such as starches, polyvinyl alcohol, polyethylene glycol, polyacrylic acid, and polyacrylics. Synthetic polymers with negative groups such as acid esters, polymethacrylic acid esters, polyvinylamines, polyurethanes, polyvinylpyrrolidone, polyvinylpyridine, polyvinylimidazole, aromatic polymers such as polystyrene, bisphenol A# polycarbonate, and polysal 7-ones. ■ Examples include high refractive index polymers and low refractive index polymers such as fluororesins.
また、粘度v!4整、特性改質、強靭さ、耐久性を得る
為に加える反応性化合物0例としては、元硬化型の多官
能アクリレート類をはじめとして、エチレングリコール
ジグリシジルエーテル等Qエポキシ化合物を加えること
ができる。Also, the viscosity v! Examples of reactive compounds added to improve properties, toughness, and durability include precured polyfunctional acrylates and Q epoxy compounds such as ethylene glycol diglycidyl ether. can.
また、上記の有機成分は、形成された薄膜中に少くとも
、20重敞チ含まれることが盛装である。Further, it is preferable that at least 20 parts of the above-mentioned organic component be contained in the formed thin film.
すなわち、20重奮チ以下では、弾力性が充分でなく、
耐熱性、i′を衝撃性等の耐久性に劣る。また薄膜各層
間の付着性も充分なものが得られ難い。In other words, if the tension is less than 20, the elasticity is insufficient.
Poor durability such as heat resistance and impact resistance. Furthermore, it is difficult to obtain sufficient adhesion between each layer of the thin film.
また、上限は限定されないが、有機成分の多いものは、
硬さが劣る傾向にあり、また、高屈折率層の屈折率を高
く保つことが難しい。従って、用途との兼ねおいで該範
囲で有機成分の種類と含址を決めることが望ましい。In addition, there is no upper limit, but if there are many organic components,
Hardness tends to be poor, and it is difficult to maintain a high refractive index of the high refractive index layer. Therefore, it is desirable to determine the type and content of the organic component within the range, taking into consideration the intended use.
本発明における液状組成物は、上記!7:l薄膜形成物
O他に塗布作業性の問題を考慮して、適当な溶剤が加え
られる。溶剤としては、アルコール類、ケトン類、セロ
ンルブ類、ホルムアミド類や水、フレオン等の溶剤を用
いて、1〜20重量%Q固形分を含む溶液が好適である
が、必ずしも限定されるものではない。The liquid composition in the present invention is as described above! In addition to the 7:l thin film forming product O, an appropriate solvent is added in consideration of the problem of coating workability. As the solvent, a solution containing 1 to 20% by weight Q solid content using a solvent such as alcohols, ketones, selonlubes, formamides, water, Freon, etc. is suitable, but is not necessarily limited. .
また、界面活性剤や紫外線吸収剤、酸化防止剤、チキン
トロピー剤、顔料、染料、帯電防止剤、導電性粒子等を
加えることもできる。Further, surfactants, ultraviolet absorbers, antioxidants, chicktroping agents, pigments, dyes, antistatic agents, conductive particles, etc. can also be added.
このようにして得られた組成物は、公知の方法で塗布・
硬化させることによって塗膜を形成させル、即チ、フロ
ーコート、ディップコート、スピンコード、ロールコー
ト、スプレーコートオヨヒ各種の改善された塗布方法を
用いることができる。The composition thus obtained is coated and coated by a known method.
A variety of improved coating methods can be used to form a coating film by curing, such as dry coating, flow coating, dip coating, spin coating, roll coating, and spray coating.
また、乾燥と硬化は、用いる基材および成分によって決
められるが、好ましくは40℃〜130℃で、10分〜
10時間の加熱による硬化が実用的である。Drying and curing are determined depending on the base material and components used, but preferably at 40°C to 130°C for 10 minutes to
Curing by heating for 10 hours is practical.
また、用いた成分中の反応基Q架橋、重合反応を促進す
る為、赤外線、紫外線や、r線、電子線の照射を行うこ
とによっても硬化を行うことが出来る。Further, in order to promote the crosslinking and polymerization reaction of the reactive group Q in the components used, curing can also be carried out by irradiation with infrared rays, ultraviolet rays, r-rays, or electron beams.
また、本発明の■、@、θ層の塗工前に、その付着性を
向上させる目的で、基材をプラズマ処理アルカリ処理等
の表面処理を行うことも有用である。It is also useful to subject the base material to a surface treatment such as plasma treatment or alkali treatment before coating the (1), @, and (theta) layers of the present invention for the purpose of improving their adhesion.
本発明における反射防止薄膜の屈折率は、基材から第1
層、第2層、第3層の屈折率がそれぞれ1.55〜1.
80および1.65〜2.25および1.4σ〜1.5
0であり、且つ屈折率は第2層が最も高く、次に第1層
、第3層と低くなるもQである。また、naは基材の屈
折率より高いものを選択する心安がある。一方、膜厚は
、溶剤或いはコーティング法で調整する事により任意の
直に設定出来る為、屈折率の組合せに応じた任意の膜厚
の組合せから選択するが、特に各層の光学膜厚は、可視
波長の四分の−の奇の整数倍が好ましい、これらの光学
的条件から外れる場合は、反射防止特性が劣るため好ま
しくない。The refractive index of the antireflection thin film in the present invention is the first
layer, the second layer, and the third layer each have a refractive index of 1.55 to 1.55.
80 and 1.65 to 2.25 and 1.4σ to 1.5
0, and the second layer has the highest refractive index, followed by the first layer and the third layer. Furthermore, it is safe to select a value for na that is higher than the refractive index of the base material. On the other hand, the film thickness can be directly set as desired by adjusting it with a solvent or coating method, so it can be selected from any combination of film thicknesses depending on the combination of refractive indexes.In particular, the optical film thickness of each layer is Odd integer multiples of a quarter of the wavelength are preferred; deviations from these optical conditions are not preferred because the antireflection properties are poor.
以下、実施例により本発明の詳細な説明するが、本発明
はこれに限定されるものではない。Hereinafter, the present invention will be explained in detail with reference to Examples, but the present invention is not limited thereto.
実施例1
(1) 高屈折率用コーティング1(Al)の調製反
応用フラスコ内に、酢酸60.0? ’r−入れ、攪拌
下、酢酸を分散媒とする五酸化アンチモン微粒子のコロ
イド分散体(sli−均粒予後15±1mμm5b20
S含有ffl: 19.17%) 50.08 fを加
え、充分攪拌した後、γ−グリシドキシプロビルトリメ
トキシシラン3゜432を加え、室温下1時間攪拌を行
った。その後、メチルセロソルブ140.1?、および
シリコン系界面活性剤0.022ヲ加え、コーテイング
液とした。こ■塗布/10)粘度ハエ。4センチストー
クス(20℃)、固形分濃度は、5.1型針チであった
。Example 1 (1) Preparation of high refractive index coating 1 (Al) In a reaction flask, 60.0% of acetic acid was added. Add a colloidal dispersion of antimony pentoxide fine particles using acetic acid as a dispersion medium (sli-uniform particle size 15±1 mμm5b20).
After adding 50.08 ffl (S-containing ffl: 19.17%) and stirring thoroughly, 3°432 of γ-glycidoxypropyltrimethoxysilane was added and stirring was performed at room temperature for 1 hour. After that, methyl cellosolve 140.1? , and 0.022 of a silicone surfactant were added to prepare a coating liquid. ■ Application/10) Viscosity fly. 4 centistokes (20° C.), and the solid content concentration was 5.1 type needles.
(2) 低屈折率用コーテイング液(A2)の調製反応
用フラスコ内に、エタノール85.729 k入れ、攪
拌下、r−プリシドキシグロビル(メチル) シyl
) キシシラy8.57F 、 0.051J塩酸1.
251P を加え、攪拌下、加水分解を1時間行った。(2) Preparation of coating liquid for low refractive index (A2) Pour 85.729 k of ethanol into a reaction flask, and add r-prisidoxyglobil (methyl) sil under stirring.
) Kishishiray8.57F, 0.051J Hydrochloric acid 1.
251P was added and hydrolysis was carried out for 1 hour while stirring.
この後エタノール分散コロイダルシリカ(オスカル12
32#触媒化FM、■、固形分濃度30チ)202を加
え、室温で30分間攪拌を行った。その後、メチルセロ
ソルブ85.72 F 、シリコン系界面活性剤0.0
29 e加え、コーテイング液とした。この塗布1ff
lo粘度は、1.3センチストークス(20℃)、固形
分濃度は、6.2重鎗チであった。After this, ethanol-dispersed colloidal silica (Oscar 12)
32 #catalyzed FM, ■, solid content concentration 30 cm) 202 was added and stirred at room temperature for 30 minutes. Then, methyl cellosolve 85.72 F, silicone surfactant 0.0
29e was added to prepare a coating liquid. 1ff of this application
The lo viscosity was 1.3 centistokes (20°C), and the solids concentration was 6.2 centistokes.
(3) 中屈折率用コーテイング液(A3)の調製前
項(1)の添加縫をそれぞれ下記に示すとおりに変更す
る他は、すべて同様にして調製した。(3) Preparation of coating liquid for medium refractive index (A3) All preparations were made in the same manner except that the additive stitches in the previous section (1) were changed as shown below.
酢酸 50.03 f
酢酸を分散媒とする五酸化アンチモン微粒子のコロイド
分散体 26.08f
γ−グリシドキシプロビルトリメトキシシラン
7.14 F
メチルセロソルブ 116.75 Fこの塗布液の粘
度は、1.4センチストークス(加℃)、固形分濃度は
、5.2重址チであった。Acetic acid 50.03f Colloidal dispersion of antimony pentoxide fine particles using acetic acid as a dispersion medium 26.08f γ-Glycidoxyprobyltrimethoxysilane
7.14 F Methyl Cellosolve 116.75 F The viscosity of this coating liquid was 1.4 centistokes (warmed), and the solid content concentration was 5.2 centistokes.
なお、上記コーテイング液(1) 、 (2) 、(3
)は、ii調製後、各々、メンブランフィルタ−により
ろ過を行い、巨大粒子や不溶分を除去した。In addition, the above coating liquids (1), (2), (3)
) was prepared using a membrane filter to remove giant particles and insoluble matter.
(4)反射防止膜の塗布および硬化
5チ水酸化す) IJウム水溶液中に5分間浸漬し、ア
ルカリ処理を施したジエチレングリコールビスアリルカ
ーボネート樹脂のフラット板(直径10譚、厚さ0.5
m、屈折率1.50 、全光線透過率92チ)に反射防
止膜を以下の方法で設けた。(4) Application and curing of antireflection film (5% hydroxide) A flat plate of diethylene glycol bisallyl carbonate resin (diameter 10mm, thickness 0.5mm) immersed in an aqueous IJ solution for 5 minutes and treated with alkali.
An antireflection film was provided on the substrate (with a refractive index of 1.50 and a total light transmittance of 92 cm) using the following method.
最初に中屈折率薄膜用の塗布液(A−3)に該樹脂?浸
し、液1110℃、引上げ速度3cm1分の条件で、塗
布を行った。引上げ1.100℃で30分硬化を行い、
中屈折率層を得た。First, add this resin to the coating solution (A-3) for medium refractive index thin film. Coating was carried out under the following conditions: the liquid was immersed at 1110° C. and the pulling speed was 3 cm 1 minute. Pulling 1. Curing at 100℃ for 30 minutes,
A medium refractive index layer was obtained.
続^て該樹脂を、強塩酸水溶液に3分間浸し、充分水洗
を行い乾燥させた後、高屈折率薄膜用塗布液(A−1)
に浸し、液温lO℃、引上は速度3crn/分の条件で
塗布2行った。引上げ後、100℃で40分硬化を行い
、高屈折率層を積16シた。Next, the resin was immersed in a strong hydrochloric acid aqueous solution for 3 minutes, thoroughly washed with water and dried, and then coated with a high refractive index thin film coating solution (A-1).
Coating 2 was carried out at a liquid temperature of 10° C. and a lifting speed of 3 crn/min. After pulling it up, it was cured at 100° C. for 40 minutes to form a high refractive index layer.
最後に、該樹脂を、強塩酸水溶液に2分間浸し、充分水
洗を行い乾燥させた後、低屈折率薄膜用塗布1(A−2
)に浸し、液温7℃、引上げ速度2crn/分の条件で
、塗布を行った。引上げ後、120℃で20分硬化させ
、三層からなる反射防止膜を得た。Finally, the resin was immersed in a strong hydrochloric acid aqueous solution for 2 minutes, thoroughly washed with water, and dried.
), and coating was performed under the conditions of a liquid temperature of 7° C. and a pulling rate of 2 crn/min. After pulling it up, it was cured at 120° C. for 20 minutes to obtain an antireflection film consisting of three layers.
(5)試験結果
反射防止膜?設けたジエチレングリコールビスアリルカ
ーボネート樹脂の全光線透過率は、96.3チであり、
反射干渉色は緑色?呈した。(5) Test result anti-reflection film? The total light transmittance of the diethylene glycol bisallyl carbonate resin provided was 96.3 cm,
Is the reflective interference color green? presented.
クロスカットテープ試験により密着性を評価したところ
、全く間Uがなく、耐水性、耐擦傷性(÷0000スチ
ールウール、l()回擦傷)、耐温水性(60℃)の結
果も良好であった。When the adhesion was evaluated by a cross-cut tape test, there was no gap at all, and the results of water resistance, scratch resistance (÷0000 steel wool, l() times scratches), and hot water resistance (60°C) were also good. Ta.
なお、(A3)、(AI)、(A2)の缶液を塗布して
得られた薄膜を各々、11 、12.13層とすると、
屈折率と膜厚は以下のとおりであった。In addition, if the thin films obtained by applying the can liquids of (A3), (AI), and (A2) are 11 and 12.13 layers, respectively,
The refractive index and film thickness were as follows.
薄膜 屈折率 膜厚(nm)
11 1.61 79.4
12 1.70 71.6
J3 1.49 85.8
実施例2
(1) 高屈折率用コーテイング液(B1)の調製反
応用フラスコ内に、イソプロピルアルコール’17.9
22を入れ、攪拌下、イソプロピルアルコールを分散媒
とする五酸化アンチモン微粒子のコロイド分散体(平均
粒子径21±1mμs 5bZO5含有社23.5チ)
42.55 Fを加え、攪拌した後、γ−グリシドキ
シグロビル(メチル)ジメトキシシラン1゜791.0
.05N塩酸水0.74M’を加え、室温下2時間攪拌
を行った。そ■後、攪拌下、メチルエチルケトン116
.88F、グリセロールジグリシジルエーテル1.25
1 、過塩素酸マグネシウム0.0272を加え、溶解
させた。この塗布液■粘度は、1.3センチストークス
(20℃)、固形分値開は、4.8重社チであった。Thin film Refractive index Film thickness (nm) 11 1.61 79.4 12 1.70 71.6 J3 1.49 85.8 Example 2 (1) Preparation of coating liquid for high refractive index (B1) Inside flask for reaction , isopropyl alcohol '17.9
A colloidal dispersion of antimony pentoxide fine particles using isopropyl alcohol as a dispersion medium (average particle diameter 21 ± 1 mμs, 5bZO5 containing company 23.5 cm) was prepared with stirring.
After adding 42.55 F and stirring, γ-glycidoxyglobyl(methyl)dimethoxysilane 1°791.0
.. 0.74M' of 05N hydrochloric acid was added, and the mixture was stirred at room temperature for 2 hours. Then, under stirring, methyl ethyl ketone 116
.. 88F, glycerol diglycidyl ether 1.25
1. 0.0272 of magnesium perchlorate was added and dissolved. The viscosity of this coating liquid was 1.3 centistokes (20°C), and the solid content value was 4.8 centistokes.
(2) 低屈折率用コーテイング液(B2)■調製反応
用フラスコ内に、エタノール88.91 ? k入れ、
攪拌下、r−グリシドキシプロビルトリメトキシシラン
2.53r、0.05N塩酸水1.32Fを加え、室温
下、1時間攪拌を行った。(2) Coating liquid for low refractive index (B2) ■ Preparation In the reaction flask, add ethanol 88.91? Put k,
While stirring, 2.53 r of r-glycidoxypropyltrimethoxysilane and 1.32 F of 0.05N hydrochloric acid were added, and the mixture was stirred at room temperature for 1 hour.
この後、インプロピルアルコール分散コロイダルシリカ
(オスカル1432.触媒化成■、固形分濃度30%)
a、331 、メチルトリエトキシシラン13.30
9を加え、室温で加分間攪拌を行った。After this, colloidal silica dispersed in inpropyl alcohol (Oscar 1432.Catalyst Chemical ■, solid content concentration 30%)
a, 331, methyltriethoxysilane 13.30
9 was added, and the mixture was stirred at room temperature.
ソノ後、メチルセロソルブ133.36F 、グリセロ
ールジグリシジルエーテル2.53P s過塩素酸マグ
ネシウム0.0749 k加え、溶解させた。この塗布
液の粘度は、1.6センチストークス(20℃)、固形
分濃度は、5.2重量%であった。After sowing, 133.36 F of methyl cellosolve, 2.53 Ps of glycerol diglycidyl ether, and 0.0749 K of magnesium perchlorate were added and dissolved. The viscosity of this coating liquid was 1.6 centistokes (20° C.), and the solid content concentration was 5.2% by weight.
(3) 中屈折率用コーテイング液(B3)■調製前
項α)■添加量をそれぞれ下記に示すとおりに変更する
他は、ナベで同様にして調製した。(3) Coating liquid for medium refractive index (B3) ■ Preparation Previous item α) ■ Prepared in the same manner in a pan except that the amounts added were changed as shown below.
イソプロピルアルコール 86.22 fイソプロピ
ルアルコールを分散媒とする五酸化アンチモン微粒子の
コロイド分散体 26.60 Pγ−グリシドキシブ
aビル(メチル)ジメトキシシラン 5.35 F
0.05N塩酸水 1.02
メチルエチルケトン 129.33 yグリセロール
ジグリシジルエーテル 2.52過塩素酸マグネシウム
0.057 ’?こ■塗布液の粘度は1.4センチス
トークス(20℃)、固形分濃度は、5.0重肚チでお
った。Isopropyl alcohol 86.22 f Colloidal dispersion of antimony pentoxide fine particles using isopropyl alcohol as a dispersion medium 26.60 Pγ-glycidoxib a Viru(methyl)dimethoxysilane 5.35 F 0.05N hydrochloric acid water 1.02 Methyl ethyl ketone 129.33 y Glycerol diglycidyl ether 2.52 Magnesium perchlorate 0.057'? The viscosity of this coating liquid was 1.4 centistokes (20°C), and the solid content concentration was 5.0 centistokes.
なお、上dピコ−ティングI(1)、(2)、(3)は
、液調製後、各々、メンブランフィルタ−によりろ過を
行ム巨大粒子や不溶分を除去した。Incidentally, after preparing the liquids of the above d-picoatings I (1), (2), and (3), each of them was filtered using a membrane filter to remove large particles and insoluble matter.
(4)Aカードコート加工
α)ハードコート液の調製
r−グリシドキシプロビルトリメトキシシラン13.5
F 、エタノール分散コロイダルシリカ(オスカル12
32.触媒化成■、固形分[1加チ)22.5fおよび
メチルセロソルブ135.3 tからなる溶液に、0.
05N塩酸水3.699を徐々に滴下し加水分解を行っ
た。この溶液を0℃で為時間熟成した後、グリセロール
ジグリシジルエーテル9.02と過塩素酸マグネシウム
0.1217fとシリコン系界面活性剤0.04fを加
え室温T3時間攪拌し、ノーードコート液とした。(4) A card coating α) Preparation of hard coating liquid r-glycidoxyprobyltrimethoxysilane 13.5
F, ethanol-dispersed colloidal silica (Oscar 12
32. To a solution consisting of Catalyst Chemical Formation (1), 22.5 f of solids (1 addition) and 135.3 t of methyl cellosolve, 0.
Hydrolysis was carried out by gradually dropping 3.699 g of 05N hydrochloric acid solution. After aging this solution at 0° C. for an hour, 9.02 g of glycerol diglycidyl ether, 0.1217 f of magnesium perchlorate, and 0.04 f of a silicone surfactant were added and stirred at room temperature for T3 hours to obtain a node coating solution.
b)ハードコート液の塗布及び硬化
5%水酸化す) IJウム水溶液中に5分間浸漬し、ア
ルカリ処理5施したジエチレングリコールビスアリルカ
ーボネート樹脂製プラルンズ(屈折率1.50.全光線
透過率92%)を、前記ハードコート液に浸した後、引
上げ速度15crn/分の条件で塗布を行った。続いて
、熱風乾燥炉に2.80℃で1時間、130℃で1時間
別¥p!を行い硬化させた。b) Application of hard coat solution and curing with 5% hydroxide) Diethylene glycol bisallyl carbonate resin Praluns (refractive index 1.50, total light transmittance 92%) immersed in IJium aqueous solution for 5 minutes and subjected to alkali treatment 5 ) was immersed in the hard coat solution, and then applied at a pulling rate of 15 crn/min. Next, put it in a hot air drying oven at 2.80℃ for 1 hour and then at 130℃ for 1 hour. and hardened it.
この時■ハードコート層の膜厚は2.3μmであった。At this time, (2) the thickness of the hard coat layer was 2.3 μm.
(5)反射防止膜の塗布および硬化
前記(4)で得られたレンズを、アルゴンガスプラズマ
処理(400W、20秒)1fr:行った後、以下の方
法で反射防止膜を設けた。(5) Coating and Curing of Anti-Reflection Film After the lens obtained in the above (4) was subjected to argon gas plasma treatment (400 W, 20 seconds) for 1 fr, an anti-reflection film was provided by the following method.
般初に中屈折率薄膜用O塗布後(B−3)に該レンズを
浸し、H@ 10℃、引上げ速度3 cm 7分の条件
’t=塗布を行った。引上げ後100℃で40分硬化を
行い、中屈折率層を得た。After first applying O for a medium refractive index thin film (B-3), the lens was immersed, and the coating was performed under the conditions 't=H@10°C, pulling speed 3 cm, and 7 minutes. After pulling, curing was performed at 100° C. for 40 minutes to obtain a medium refractive index layer.
続いて該レンズを強酸性水溶液中に浸し3分間処哩した
後、十分水洗を行い乾燥させた1次いで、高屈折率薄膜
用塗布液(B−1)に浸し、1mx。Subsequently, the lens was immersed in a strong acidic aqueous solution for 3 minutes, thoroughly washed with water and dried.Then, the lens was immersed in a high refractive index thin film coating solution (B-1) for 1 mx.
℃、引上げ速度3 cm 7分の条件で塗布を行った。The coating was carried out under the following conditions: °C, pulling speed 3 cm, and 7 minutes.
引上げ後、100℃で45分硬化を行い、高屈折率1−
全積層した。After pulling, harden at 100℃ for 45 minutes to obtain a high refractive index of 1-
Fully laminated.
最後に、該レンズを強酸性水溶液中に3分間浸し、十分
水洗を行った後、吐油折率薄膜用塗布液(B−2)に浸
し、′tL温8℃、引上げ速度2儒/分O条件で塗布2
行った。引上げ後、130℃で30分硬化させ、三層か
らなる反射防止膜を得た。Finally, the lens was immersed in a strong acidic aqueous solution for 3 minutes, thoroughly rinsed with water, and then immersed in a coating solution for oil refractive index thin film (B-2) at a temperature of 8°C and a pulling rate of 2 F/min. Coating under O condition 2
went. After pulling it up, it was cured at 130° C. for 30 minutes to obtain an antireflection film consisting of three layers.
(6)試験結果
こ■ようにして得られたレンズO全光線透過率は、 9
6.5%であり、反射干渉色は、緑色を呈しまた。(6) Test results The total light transmittance of the lens O obtained in this way is 9
6.5%, and the reflection interference color is green.
また、この反射防止レンズを赤、宵、黄03色を混合し
た市販の分散染料を水に分散溶解させた染色浴を用い、
凹℃、加分間染色した。こOレンズの全光線透過率は5
6.7%で、良好な染色性を示した。In addition, this anti-reflection lens was made using a dyeing bath in which a commercially available disperse dye mixed with three colors of red, evening, and yellow was dispersed and dissolved in water.
Stained at 10°C. The total light transmittance of this O lens is 5
It showed good stainability at 6.7%.
さらに、クロスカットテープ試験により密着性を評価し
たところ、全く問題がなく、耐水性、耐擦傷性(す。o
ooスチールウール、10回擦傷)、耐温水性(60℃
)の結果も良好であった。Furthermore, when we evaluated the adhesion using a cross-cut tape test, we found that there were no problems at all, and the water resistance and scratch resistance were excellent.
oo steel wool, scratched 10 times), warm water resistance (60℃
) results were also good.
なお、(B3) 、 (Bl) 、 (B2) の缶
液を塗布して得られた薄PIAを各々21 、22 、
お層とすると、屈折率と膜厚は以下のとおりであった。In addition, the thin PIA obtained by applying the can liquids of (B3), (Bl), and (B2) were 21, 22, and 22, respectively.
The refractive index and film thickness were as follows.
薄膜 屈折率 膜厚(nm)
21 1.58 82.82
2 1.71 76.9
Z3 1.48 87.8天
旅例3
(1) 高屈折率用コーテイング液(cl)ok製反
応用フラスコ内に、エチルセロソルブ180.22を入
れ、攪拌下、水を分散媒とする三酢化アンチモン微粒子
のコロイド分散体(乎均粒子径40土1 m A 、
sbo、含有!!−27,3%) 17.589 k加
え充分攪拌した後、γ−グリシドキシプロビルトリエト
キシシラン1.71f 、 0.051J塩酸水0.4
7y 。Thin film Refractive index Film thickness (nm) 21 1.58 82.82
2 1.71 76.9 Z3 1.48 87.8 Heavenly Journey Example 3 (1) Coating liquid for high refractive index (CL) Put ethyl cellosolve 180.22 into an OK reaction flask, and add water while stirring. A colloidal dispersion of antimony triacetate fine particles using as a dispersion medium (average particle size 40 mA,
sbo, included! ! -27.3%) After adding 17.589k and stirring thoroughly, 1.71f of γ-glycidoxyprobyltriethoxysilane, 0.4 of 0.051J hydrochloric acid water
7y.
エタノール分散コロイダルシリカ(オスカル1232、
触媒化成員、固形分製団3oチ)2゜072゜およびシ
リコン系界面活性剤帆02fを加え、コーテイング液と
した。この塗布液0粘度は、1.5my、、)−クス(
20℃)、固形分濃度は、5.91蔽チであった。Ethanol-dispersed colloidal silica (Oscar 1232,
A coating liquid was prepared by adding a catalyst component, a solid content of 30°, 072°, and a silicone surfactant, 02f. The zero viscosity of this coating solution is 1.5 my, )-x(
20°C), and the solid content concentration was 5.91%.
(2) 低屈折率用コーテイング液(C2)■調製低
屈折率コーティング液として市販Oフッ素シリコーンコ
ーティング剤(商品名”KP−801’、信越シリコー
ン作製、固形分3%)を用いた。(2) Low refractive index coating liquid (C2) (1) Preparation A commercially available O fluorosilicone coating agent (trade name "KP-801', manufactured by Shin-Etsu Silicone, solid content 3%) was used as the low refractive index coating liquid.
(3) 中屈折率用コーテイング液(C3)■調製前
□記実施例1における高屈折率用コーティングf& (
AI) 73.8 yと低屈折率用コーテイング液(A
2 ) 64.7t f混合し、中屈折率用コーテイン
グ液(C3)とした。こO塗布液O粘度はC4cmスト
ークス(20℃)、固形分@度は、5.6重量%であっ
た。(3) Coating liquid for medium refractive index (C3) ■ Before preparation □ Coating liquid for high refractive index in Example 1 f & (
AI) 73.8 y and low refractive index coating liquid (A
2) 64.7tf was mixed to obtain a coating liquid for medium refractive index (C3). The viscosity of the coating liquid O was C4 cm Stokes (20° C.), and the solid content was 5.6% by weight.
なお、上記コーテイング液(1) 、 (2) 、 (
3)は、液調製後、各々、メンブランフィルタ−により
ろ過を行い、巨大粒子や不溶分を除去した。In addition, the above coating liquids (1), (2), (
In 3), after preparing the liquid, each solution was filtered using a membrane filter to remove giant particles and insoluble matter.
(4)反射防止膜の塗布および硬化
5チ水酸化す) IJウム水溶液中に3分間浸漬しアル
カリ処理ヲ施した市販の無機ガラスパネル(直径12c
rn、厚さ0.2+wa、屈折率1.52.全光線透過
率92%)に、以下の方法で反射防止膜を設けた。(4) Application and curing of anti-reflection film (5 times hydroxide) A commercially available inorganic glass panel (diameter 12 cm
rn, thickness 0.2+wa, refractive index 1.52. An antireflection film was provided using the following method.
最初に中屈折率薄膜用の塗布液CC−3)に、該ガラス
パネルを浸し、液@9℃、引上げ速度3備/分の条件で
塗布を行った。引上げ後100℃で5分間硬化を行い、
中屈折率層fi!:得た。First, the glass panel was immersed in a coating liquid CC-3 for medium refractive index thin films, and coating was performed at a liquid @9°C and a pulling rate of 3/min. After pulling, harden at 100℃ for 5 minutes,
Medium refractive index layer fi! :Obtained.
続りで該ガラスパネルを強酸性水溶液中に3分間浸し、
十分水洗を行った後、高屈折間膜用塗布液(C−1)に
浸し、液@lO℃、引上げ速度3 cm 1分の条件で
塗布を行った。引上げ後、100℃で30分硬化を行い
、高屈折率層を積層した。Subsequently, the glass panel is immersed in a strong acidic aqueous solution for 3 minutes,
After thoroughly rinsing with water, it was immersed in a coating liquid for high refractive interlayer film (C-1), and coating was carried out under the conditions of liquid @ 10°C, pulling speed of 3 cm, and 1 minute. After pulling, curing was performed at 100° C. for 30 minutes, and a high refractive index layer was laminated.
最後に該ガラスパネルを、酸素プラズマガス処理(50
0W 、 lo秒)を行った後、低屈折率薄膜用塗布液
(C−2)に浸し、液@7℃、引上げ速度2crn/分
の条件で塗布を行った。引上げ後、100℃で加分間乾
燥硬化させ、三層からなる反射−防止膜を得た。Finally, the glass panel was treated with oxygen plasma gas (50
0W, lo seconds), the film was immersed in a low refractive index thin film coating solution (C-2) and coated at a temperature of 7° C. and a pulling rate of 2 crn/min. After pulling, the film was dried and cured at 100° C. to obtain a three-layer antireflection film.
(5)試験結果
このようにして得られたガラスパネルの全光線透過率は
97.5%であり、反射干渉色は、赤紫色を呈した。(5) Test results The total light transmittance of the glass panel thus obtained was 97.5%, and the reflection interference color was reddish-purple.
また、クロスカットテープ試験により密着性を評価した
ところ、全く問題がみられず、耐水性、耐擦傷性(す0
000スチールウール、10 回m ’tJA)、耐温
水性(60℃)■結果も良好であった。In addition, when we evaluated adhesion using a cross-cut tape test, no problems were found, and water resistance and scratch resistance (
000 steel wool, 10 times m'tJA), and hot water resistance (60°C) ■The results were also good.
なお、(C3) 、 (C1) 、 (C2) の缶
液を塗布して得られた薄膜を各々、31 、32ハiと
すると屈折率と膜厚は以下Oとおりであった。Note that the refractive index and film thickness were as follows, assuming that the thin films obtained by applying the can liquids of (C3), (C1), and (C2) were 31 and 32 Hi, respectively.
薄膜 屈折率 膜厚(nm)
311゜62 80.2
32 1.74 74゜7
33 1.45 89.7比較例1
(1)高屈折率用コーテイング液(Dl)■調製反応用
フラスコ内に、インプロピルアルコール127.4 f
、フェネチルアルコール31.86 fを入れ、a
拌T 、エタノール分散コロイダルシリカ(オスカル1
232.触媒化成■、固形分濃度加饅)6.679およ
び、テトラ−n−ブチルチタネート34.04 f 、
シリコン系界面活性剤0゜04vを入れ、室需T1時間
Vt拌し、コーテイング液とした、この塗布液の粘度は
、1.9センチストークス(20℃)、固形分敲度は、
5.2重址チであった。Thin film Refractive index Film thickness (nm) 311゜62 80.2 32 1.74 74゜7 33 1.45 89.7 Comparative example 1 (1) High refractive index coating liquid (Dl) ■ Prepared in reaction flask , inpropyl alcohol 127.4 f
, add 31.86 f of phenethyl alcohol, a
Stirring T, ethanol-dispersed colloidal silica (Oscar 1
232. Catalyst chemical formation (solid content addition) 6.679 and tetra-n-butyl titanate 34.04 f,
A coating solution was prepared by adding 0.04v of silicone surfactant and stirring for 1 hour. The viscosity of this coating solution was 1.9 centistokes (20°C), and the solid content was as follows:
It was 5.2 times.
(2) 低屈折率用コーテイング液(D2)として、
前記実施例1の(A2) ’!に用いた。(2) As a coating liquid for low refractive index (D2),
(A2) of Example 1'! It was used for.
(3) 中屈折率用コーテイング液(D3) O調製
前項α)の象加誓゛をそれぞれ下記に示すとおりに変更
する他は、ナベで同様にし、て調製した。(3) Coating liquid for medium refractive index (D3) O Preparation A coating liquid for medium refractive index (D3) was prepared in the same manner in a pan, except that the addition and addition omitted in the previous section α) were changed as shown below.
イングロビルアルコール 136.97rフエネ
チルアルコール 24.17F工タノール分
散:rC:xイダルシリカ 13.33tテトラ−n−
ブチルチタネート25.53fこ■塗布液の粘度は、1
.6センチストークス(20℃)、固形分離度は、5.
3重111チでありた。Inglobil alcohol 136.97r Phenethyl alcohol 24.17F Tanol dispersion: rC:x Idal silica 13.33t Tetra-n-
Butyl titanate 25.53f The viscosity of the coating liquid is 1
.. 6 centistokes (20°C), solid separation is 5.
It was triple 111 cm.
(4) 反射防止@O塗布および硬化5%水酸化ナト
リウム水溶液中に5分間浸漬し、アルカリ処[eMした
ジエチレングリコールビスアリルカーボネート樹脂Oフ
ラット板を、中屈折率薄膜用の塗布液(D−3’)に浸
し、液@10 ’C、引上げ速度3−7分の条件で、塗
布を行った。(4) Anti-reflection@O coating and hardening A diethylene glycol bisallyl carbonate resin O flat plate that was immersed in a 5% aqueous sodium hydroxide solution for 5 minutes and subjected to alkali treatment [eM] was coated with a coating solution for medium refractive index thin films (D-3). '), and coating was carried out under the conditions of liquid@10'C and pulling speed of 3-7 minutes.
引上げ後、100℃で1時間硬化を行い、中屈折率l1
1t−得た。After pulling, it was cured at 100°C for 1 hour to obtain a medium refractive index l1.
1t-obtained.
しかし、該樹脂を強酸性水溶液中に3分間浸し十分水洗
を行ったところ、中屈折率薄膜が一部消失しており、布
で拭くことにより、薄膜が剥離していた。However, when the resin was immersed in a strongly acidic aqueous solution for 3 minutes and thoroughly washed with water, part of the medium refractive index thin film had disappeared, and when wiped with a cloth, the thin film was peeled off.
以上述べたように、本発明によれば、透明基材の少、な
くとも一部に屈折率の異なる三層の薄膜からなる反射防
止mk液状組成物■塗布および硬化により施すにあたり
、透明基材層よりも高い屈折率を有する高屈折率薄膜、
中屈折率薄膜を形成するためQ液状組成物として、水ま
′たは他の溶媒に分散した酸化アンチモン微粒子○コロ
イド分散体を酵a取分とすることにより、所望の屈折率
が央現され、また従来■金属アルコラードを用いた場合
に比べ、付着性、硬度、耐薬品性、耐擦傷性、耐水性、
染色性などの諸物性に優れた大容量、大量生産が可能な
反射防止膜を得ることが可能となった。As described above, according to the present invention, an antireflection mk liquid composition consisting of three thin films with different refractive indexes is applied to at least a portion of a transparent substrate by coating and curing. a high refractive index thin film having a higher refractive index than the layer;
In order to form a medium refractive index thin film, the desired refractive index can be centrally expressed by using a colloidal dispersion of antimony oxide fine particles dispersed in water or other solvent as a liquid composition. In addition, compared to the case of using conventional metal Alcolade, it has improved adhesion, hardness, chemical resistance, scratch resistance, water resistance,
It has now become possible to obtain an antireflection film that has excellent physical properties such as dyeability and can be produced in large quantities.
嬉1図は、実施例1の反射防止膜の断面図。
11・・・中屈折率薄膜
12・・・高屈折率薄膜
13−・・低屈折率薄膜
14・・・基材樹脂
哨2図は、実施例1の反射防止膜の表面の反射スペクト
ル図。
以 上Figure 1 is a cross-sectional view of the antireflection film of Example 1. 11...Medium refractive index thin film 12...High refractive index thin film 13-...Low refractive index thin film 14...Base material resin stripe Figure 2 is a reflection spectrum diagram of the surface of the antireflection film of Example 1. that's all
Claims (1)
気側に向かって、[イ]、[ロ]、[ハ]の三層の薄膜
からなる反射防止膜を施すにあたり、 b)[イ]、[ロ]、[ハ]の三層の光学特性は、各々 [イ]1.55<na<1.80 na×da=lλ_1/4(nm) [ロ]1.65<nb<2.25 nb×db=mλ_2/4(nm) nb>na [ハ]1.40<nc<1.50 nc×dc=nλ_3/4(nm) (ここで、na、nb、ncは各々、[イ]層、[ロ]
層、[ハ]層の屈折率、da、db、dcは各々、イ層
、ロ層、[ハ]層の膜厚(nm)を表し、mは正の整数
、l、nは奇の正整数、λ_1、λ_2、λ_3は各々
独立に可視領域の波長(nm単位)を表す。また、na
>(基材の屈折率)である。)の条件を満たし、 c)[イ]層、[ロ]層、[ハ]層の各薄膜は、各々、
液状で塗布し、加熱、乾燥或いは活性エネルギー線によ
る硬化で得られ、 d)さらに、[イ]層、[ロ]層を形成するための液状
組成物は成分として水または他の溶媒に分散した酸化ア
ンチモン微粒子のコロイド分散体により提供されること
を特徴とする反射防止膜。(1) a) When applying an anti-reflection film consisting of three thin films of [a], [b], and [c] from the base material toward the atmosphere on at least a part of the transparent base material, b ) The optical properties of the three layers [A], [B], and [C] are respectively [A] 1.55<na<1.80 na×da=lλ_1/4 (nm) [B]1.65<nb<2.25 nb×db=mλ_2/4(nm) nb>na [c]1.40<nc<1.50 nc×dc=nλ_3/4(nm) (Here, na, nb, nc are Respectively, [a] layer, [b]
layer, the refractive index of the [C] layer, da, db, and dc respectively represent the film thickness (nm) of the A layer, B layer, and [C] layer, m is a positive integer, and l and n are odd positive numbers. The integers λ_1, λ_2, and λ_3 each independently represent a wavelength (in nm) in the visible region. Also, na
>(refractive index of base material). c) Each thin film of the [a] layer, [b] layer, and [c] layer satisfies the conditions of
d) The liquid composition for forming the [a] layer and the [b] layer is dispersed in water or other solvent as a component. An antireflection film characterized in that it is provided by a colloidal dispersion of antimony oxide fine particles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60187723A JPS6247601A (en) | 1985-08-27 | 1985-08-27 | Antireflection film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60187723A JPS6247601A (en) | 1985-08-27 | 1985-08-27 | Antireflection film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6247601A true JPS6247601A (en) | 1987-03-02 |
Family
ID=16211047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60187723A Pending JPS6247601A (en) | 1985-08-27 | 1985-08-27 | Antireflection film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6247601A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6480904A (en) * | 1987-09-22 | 1989-03-27 | Nippon Sheet Glass Co Ltd | Transparent plate stuck with conductive antireflection film |
| US6476969B2 (en) * | 1993-12-02 | 2002-11-05 | Dai Nippon Printing Co., Ltd. | Transparent functional membrane containing functional ultrafine particles, transparent functional film, and process for producing the same |
| KR100942625B1 (en) * | 2002-03-22 | 2010-02-17 | 라이브니츠-인스티투트 퓌어 노이에 마테리알리엔 게마인누찌게 게엠베하 | Plastic film with a multilayered interference coating |
| CN108885281A (en) * | 2016-09-27 | 2018-11-23 | 株式会社Lg化学 | Anti-reflection film and its preparation method |
-
1985
- 1985-08-27 JP JP60187723A patent/JPS6247601A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6480904A (en) * | 1987-09-22 | 1989-03-27 | Nippon Sheet Glass Co Ltd | Transparent plate stuck with conductive antireflection film |
| US6476969B2 (en) * | 1993-12-02 | 2002-11-05 | Dai Nippon Printing Co., Ltd. | Transparent functional membrane containing functional ultrafine particles, transparent functional film, and process for producing the same |
| KR100942625B1 (en) * | 2002-03-22 | 2010-02-17 | 라이브니츠-인스티투트 퓌어 노이에 마테리알리엔 게마인누찌게 게엠베하 | Plastic film with a multilayered interference coating |
| CN108885281A (en) * | 2016-09-27 | 2018-11-23 | 株式会社Lg化学 | Anti-reflection film and its preparation method |
| US10823883B2 (en) | 2016-09-27 | 2020-11-03 | Lg Chem, Ltd. | Antireflection film |
| US10908323B2 (en) | 2016-09-27 | 2021-02-02 | Lg Chem, Ltd. | Antireflection film and method for preparing same |
| US10962686B2 (en) | 2016-09-27 | 2021-03-30 | Lg Chem, Ltd. | Antireflection film |
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