JPS6252906A - Insulation coating method for amorphous magnetic material - Google Patents

Insulation coating method for amorphous magnetic material

Info

Publication number
JPS6252906A
JPS6252906A JP19208385A JP19208385A JPS6252906A JP S6252906 A JPS6252906 A JP S6252906A JP 19208385 A JP19208385 A JP 19208385A JP 19208385 A JP19208385 A JP 19208385A JP S6252906 A JPS6252906 A JP S6252906A
Authority
JP
Japan
Prior art keywords
amorphous magnetic
magnetic material
discharge
gas
reaction cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19208385A
Other languages
Japanese (ja)
Inventor
Hiromasa Fukagawa
深川 裕正
Masahiko Sato
正彦 佐藤
Tadahiro Hozumi
直裕 穂積
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Research Institute of Electric Power Industry
Original Assignee
Central Research Institute of Electric Power Industry
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Research Institute of Electric Power Industry filed Critical Central Research Institute of Electric Power Industry
Priority to JP19208385A priority Critical patent/JPS6252906A/en
Publication of JPS6252906A publication Critical patent/JPS6252906A/en
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Soft Magnetic Materials (AREA)

Abstract

PURPOSE:To enable reducing eddy-current loss without increasing magnetic reluctance or hysteresis loss and to contrive improving the efficiency of electric power and miniaturizing an equipment by coating a very thin insulating film on a plate of an amorphous magnetic material using the discharge in a vapor phase. CONSTITUTION:A belt type amorphous magnetic material 2 introduced in a reaction cell 1 is exposed in a discharge, e.g., a glow discharge generated in a gas 4 filled in the reaction cell. A gas which easily forms a polymer and is excellent in insulating property and thermal resistance such as ethylene, ethylene fluoride, silane series, etc. is selected for the gas 4. The discharge also requires to continue in a stable state and, e.g., is carried out between an electrode 3 and an amorphous magnetic material leaf 2 which is ground electric potential. The continuous introduction from the atmosphere to the vacuum reaction cell 1 and the taking out of the amorphous magnetic material leaf 2 require through a low vacuum chamber provided between the atmosphere and for this, a differential exhaust is used. In this way, an insulating material thin film is continuously formed on the amorphous magnetic material leaf.

Description

【発明の詳細な説明】 (発明の属する技術分野) 本発明は変圧器などの電力用機器の鉄心に用いられるア
モルファス磁性体の薄板に超薄膜の絶縁物を形成する方
法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field to which the Invention Pertains) The present invention relates to a method for forming an ultra-thin film insulator on a thin plate of amorphous magnetic material used in the iron core of power equipment such as a transformer.

(従来の技術) 非晶質(アモルファス)磁性体は電気抵抗率が高くヒス
テリシス損失が小さいため、変圧器などの電力用機器の
鉄心として用いたときの電力損失を著しく小さくするこ
とができるという特長がある。磁性体中に生じる損失に
はヒステリシス損失と渦電流損失がある。このうち渦電
流損失を低減するには磁性体を薄い板状にし、その表面
に絶縁物をコーティングしてから重ね合わせることが効
果的である。従来のケイ素鋼板を用いた鉄心にはこの方
法が用いられている。この方法は無機あるいは有機の材
料の被膜をケイ素鋼板に塗装形成させるものであるが、
従来の方法ではその厚さが数ミクロン(μm)以上であ
った。従来のケイ素鋼板のように板目体の厚さが数10
0μm程度であれば被膜の厚さはほとんど問題でなかっ
たが、アモルファス磁性体では製法上それ自体の厚さが
数10μm程度の非常に薄い板というより箔状になるた
め、従来と同じコーティングを施した場合には鉄心とし
て重ね合わせたときの磁性体の体積分率が著しく低下す
るから、鉄心の磁気抵抗やヒステリシス損失の増大を招
くという欠点が残されていた3(発明の具体的な目的) 本発明は上記の欠点を解消することを目的として開発し
たもので、気相中で絶縁性の超薄膜をアモルファス磁性
体の板上にコーティングする方法であるが、これにより
得られた板を積重ねて鉄心として用いたときの磁気抵抗
およびヒステリシス損失を従来より増大させることなく
、渦電流損失による電力損失を低減できる画期的な製造
方法である。
(Prior technology) Amorphous magnetic materials have high electrical resistivity and low hysteresis loss, so they have the advantage of significantly reducing power loss when used as the iron core of power equipment such as transformers. There is. Losses occurring in magnetic materials include hysteresis loss and eddy current loss. Among these, in order to reduce eddy current loss, it is effective to form the magnetic material into a thin plate, coat the surface with an insulator, and then stack the plates. This method is used for iron cores using conventional silicon steel plates. This method involves coating a silicon steel plate with a coating of inorganic or organic material.
In conventional methods, the thickness was several microns (μm) or more. Like conventional silicon steel sheets, the thickness of the grain body is several tens
The thickness of the coating was hardly a problem if it was about 0 μm, but due to the manufacturing method of amorphous magnetic materials, the thickness of the material itself is about several tens of μm, making it more like a foil than a very thin plate, so it is difficult to apply the same coating as before. However, the volume fraction of the magnetic material when stacked as an iron core is significantly reduced, resulting in an increase in the magnetic resistance and hysteresis loss of the iron core.3 (Specific purpose of the invention) ) The present invention was developed with the aim of eliminating the above-mentioned drawbacks, and is a method of coating an amorphous magnetic plate with an insulating ultra-thin film in a gas phase. This is an innovative manufacturing method that can reduce power loss due to eddy current loss without increasing magnetic resistance and hysteresis loss when stacked and used as an iron core.

(発明の構成と作用) 図面は本発明方法を実施した気相中でアモルファス磁性
体に薄膜をコーティングさせる表面処理装置の構成例図
である。この図において1は反応槽(反応室)、2はア
モルファス磁性体の箔、3は4極、4はモノマー、5は
放電用電源、6は排気口、7と8はそれぞれアモルファ
ス磁性体の箔2の巻取ドラム、9は差動排気のための低
真空室である。
(Structure and operation of the invention) The drawings are diagrams illustrating a configuration example of a surface treatment apparatus for coating an amorphous magnetic material with a thin film in a gas phase in which the method of the invention is carried out. In this figure, 1 is a reaction tank (reaction chamber), 2 is an amorphous magnetic foil, 3 is a 4-pole, 4 is a monomer, 5 is a discharge power source, 6 is an exhaust port, 7 and 8 are amorphous magnetic foils, respectively. 2 is a winding drum, and 9 is a low vacuum chamber for differential pumping.

さて反応槽1に導入された帯状のアモルファス磁性体2
は、反応槽中に満たされた気体中で発生した放電、たと
えばグロー放電にさらされる。反応槽を満たす気体4と
してはエチレン、フッ化エチレン、シラン系など重合体
を生成し易く、その重合物の絶縁性、耐熱性が優れたも
のを選択して用いる。また放電の発生方法には種々なも
のが知られているが安定な放電が続けばよく、図の例で
は電極3と接地電位にあるアモルファス磁性体箔20間
に行われる。アモルファス磁性体箔2を大気中から真空
の反応槽1に連続して導入したり引出すには、大気との
間に設けた低い真空室9を介して行うことが必要で、こ
れを差動排気を利用するということも知られている。こ
のようにしてアモルファス磁性体箔には連続して絶縁体
薄膜の生成処理を行うことができる。
Now, the strip-shaped amorphous magnetic material 2 introduced into the reaction tank 1
is exposed to an electrical discharge, such as a glow discharge, generated in the gas filled in the reaction vessel. The gas 4 filling the reaction tank is selected from gases such as ethylene, fluorinated ethylene, and silane, which easily produce polymers and whose polymers have excellent insulation and heat resistance. Various methods are known for generating electric discharge, but it is sufficient that stable electric discharge continues, and in the example shown in the figure, electric discharge is generated between electrode 3 and amorphous magnetic foil 20 at ground potential. In order to continuously introduce or withdraw the amorphous magnetic foil 2 from the atmosphere into the vacuum reaction tank 1, it is necessary to do so through a low vacuum chamber 9 provided between the atmosphere and the atmosphere, and this is done by differential pumping. It is also known to use In this way, the amorphous magnetic foil can be continuously subjected to the process of forming an insulating thin film.

アモルファス磁性体箔に生成された薄膜は均一で非常に
薄く、放電パラメータや処理時間を変えることばより膜
厚は容易に制御できる。
The thin film formed on the amorphous magnetic foil is uniform and very thin, and the film thickness can be easily controlled by changing the discharge parameters and processing time.

また放電中で生成するため膜の内部が高度に架橋してい
て耐熱温度が高いので、この薄膜付アモルファス磁性体
を機器の鉄心として用いたときの使用温度を従来の材料
使用のものより高くとることができる。
In addition, since it is generated during electrical discharge, the inside of the film is highly cross-linked and has a high heat resistance, so when this amorphous magnetic material with thin film is used as the iron core of equipment, the operating temperature can be higher than that of conventional materials. be able to.

(発明の効果) 本発明による薄膜付アモルファス磁性体箔による鉄心を
用いた機器では、鉄心の磁気抵抗やヒステリシス損失を
増大させることなく渦電流損失を低減でき、電力効率の
向上と機器の小形化に著しい効果が期待できる。
(Effects of the Invention) In a device using an iron core made of amorphous magnetic foil with a thin film according to the present invention, eddy current loss can be reduced without increasing magnetic resistance or hysteresis loss of the iron core, improving power efficiency and downsizing of the device. A significant effect can be expected.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明を実施したアモルファス磁性体に絶縁薄膜
をコーティングする表面処理装置の構成例図である。 1・・・反応槽、  2・・・アモルファス磁性体の箔
、3・・・電極、 4・・・モノマー、  5・・・電
源、 6・・・排気口、  7.訃・・巻取りドラム、
  9・・・低真空室。
The drawing is a configuration example of a surface treatment apparatus for coating an amorphous magnetic material with an insulating thin film according to the present invention. 1... Reaction tank, 2... Amorphous magnetic foil, 3... Electrode, 4... Monomer, 5... Power source, 6... Exhaust port, 7. Death... winding drum,
9...Low vacuum chamber.

Claims (1)

【特許請求の範囲】[Claims] 排気された反応室内に送り込まれたエチレン、シラン系
などの重合合成を起こし易い気体中に起させた放電を利
用して、該反応室内を通過するアモルファス磁性体の薄
い箔状の帯の面上にごく薄い絶縁体の膜を連続して形成
することを特徴とするアモルファス磁性体の絶縁コーテ
ィング方法。
Utilizing an electric discharge generated in a gas that easily undergoes polymerization synthesis, such as ethylene or silane, which is sent into an evacuated reaction chamber, the surface of a thin foil-like strip of amorphous magnetic material passing through the reaction chamber is An insulating coating method for an amorphous magnetic material that is characterized by continuously forming a very thin insulating film.
JP19208385A 1985-09-02 1985-09-02 Insulation coating method for amorphous magnetic material Pending JPS6252906A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19208385A JPS6252906A (en) 1985-09-02 1985-09-02 Insulation coating method for amorphous magnetic material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19208385A JPS6252906A (en) 1985-09-02 1985-09-02 Insulation coating method for amorphous magnetic material

Publications (1)

Publication Number Publication Date
JPS6252906A true JPS6252906A (en) 1987-03-07

Family

ID=16285359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19208385A Pending JPS6252906A (en) 1985-09-02 1985-09-02 Insulation coating method for amorphous magnetic material

Country Status (1)

Country Link
JP (1) JPS6252906A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6931713B2 (en) * 2001-03-15 2005-08-23 Waseem A. Roshen Methods of making low loss, high frequency composite magnetic material
JP2008071982A (en) * 2006-09-15 2008-03-27 Hitachi Industrial Equipment Systems Co Ltd Transformer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57204104A (en) * 1981-06-11 1982-12-14 Sanyo Electric Co Ltd Forming method of insulating film for amorphous magnetic substance

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57204104A (en) * 1981-06-11 1982-12-14 Sanyo Electric Co Ltd Forming method of insulating film for amorphous magnetic substance

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6931713B2 (en) * 2001-03-15 2005-08-23 Waseem A. Roshen Methods of making low loss, high frequency composite magnetic material
JP2008071982A (en) * 2006-09-15 2008-03-27 Hitachi Industrial Equipment Systems Co Ltd Transformer
US8198973B2 (en) 2006-09-15 2012-06-12 Hitachi Industrial Equipment Systems Co., Ltd. Transformer

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