JPS6252927U - - Google Patents
Info
- Publication number
- JPS6252927U JPS6252927U JP14461485U JP14461485U JPS6252927U JP S6252927 U JPS6252927 U JP S6252927U JP 14461485 U JP14461485 U JP 14461485U JP 14461485 U JP14461485 U JP 14461485U JP S6252927 U JPS6252927 U JP S6252927U
- Authority
- JP
- Japan
- Prior art keywords
- infrared lamp
- tube
- reaction tube
- susceptor
- conductive mesh
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14461485U JPH058671Y2 ( ) | 1985-09-20 | 1985-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14461485U JPH058671Y2 ( ) | 1985-09-20 | 1985-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6252927U true JPS6252927U ( ) | 1987-04-02 |
| JPH058671Y2 JPH058671Y2 ( ) | 1993-03-04 |
Family
ID=31055379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14461485U Expired - Lifetime JPH058671Y2 ( ) | 1985-09-20 | 1985-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058671Y2 ( ) |
-
1985
- 1985-09-20 JP JP14461485U patent/JPH058671Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058671Y2 ( ) | 1993-03-04 |