JPS6252929U - - Google Patents
Info
- Publication number
- JPS6252929U JPS6252929U JP1985144695U JP14469585U JPS6252929U JP S6252929 U JPS6252929 U JP S6252929U JP 1985144695 U JP1985144695 U JP 1985144695U JP 14469585 U JP14469585 U JP 14469585U JP S6252929 U JPS6252929 U JP S6252929U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- wafers
- wafer
- shape memory
- memory alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985144695U JPS6252929U (es) | 1985-09-21 | 1985-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985144695U JPS6252929U (es) | 1985-09-21 | 1985-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6252929U true JPS6252929U (es) | 1987-04-02 |
Family
ID=31055537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985144695U Pending JPS6252929U (es) | 1985-09-21 | 1985-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6252929U (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247029U (es) * | 1988-09-28 | 1990-03-30 | ||
| JPH0350324U (es) * | 1989-09-21 | 1991-05-16 |
-
1985
- 1985-09-21 JP JP1985144695U patent/JPS6252929U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247029U (es) * | 1988-09-28 | 1990-03-30 | ||
| JPH0350324U (es) * | 1989-09-21 | 1991-05-16 |