JPS6256367A - silicon carbide sintered body - Google Patents

silicon carbide sintered body

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Publication number
JPS6256367A
JPS6256367A JP60193769A JP19376985A JPS6256367A JP S6256367 A JPS6256367 A JP S6256367A JP 60193769 A JP60193769 A JP 60193769A JP 19376985 A JP19376985 A JP 19376985A JP S6256367 A JPS6256367 A JP S6256367A
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JP
Japan
Prior art keywords
sintered body
silicon carbide
sintering
strength
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60193769A
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Japanese (ja)
Inventor
明弘 後藤
忠彦 三吉
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Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60193769A priority Critical patent/JPS6256367A/en
Publication of JPS6256367A publication Critical patent/JPS6256367A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 発明の!f、#lな説明 〔発明の利用分野〕 不発明は炭化硅素焼結体、特に耐熱構造部材として利用
するに適した強靭なる炭化硅素焼結体に関する。
[Detailed description of the invention] Invention! Description [Field of Application of the Invention] The present invention relates to a silicon carbide sintered body, particularly a tough silicon carbide sintered body suitable for use as a heat-resistant structural member.

〔発明の背景〕[Background of the invention]

炭化硅素焼結体は耐酸化性、化学的安定性、硬度、強度
か大きくすぐれた材質である。しかしながら、これらの
性質も焼結助剤によりことなる。
Sintered silicon carbide is a material with excellent oxidation resistance, chemical stability, hardness, and strength. However, these properties also vary depending on the sintering aid.

例えば硼素系の焼結助剤では、焼結体中に遊離炭嬌がの
こったり、粒成長が大きい等の問題で常温強度が一般に
小きい。一方、アルミ系では炭化硅素粉末表面と反応し
て組織中にktzo3がのこるために高温強度が低下す
る。
For example, boron-based sintering aids generally have low room temperature strength due to problems such as free carbon remaining in the sintered body and large grain growth. On the other hand, in aluminum-based materials, ktzo3 reacts with the surface of silicon carbide powder and remains in the structure, resulting in a decrease in high-temperature strength.

また。■、族の酸化物中、特にY2O3をZOwt%添
カロして1800t:’で焼結する特許もみられる。(
特開48−32110)。さらにY2O3を25〜4Q
wtチ添加してSiCを1850c〜1900Cのと比
較的低温度で焼結する炭化硅素焼結体を得る方法も提案
されている(特開51−568151゜ しかし、両者共に焼結温度が一般のSiCの焼結温度に
比べて低いために充分な強度が期待できないこと、前者
ではY2O3量が少なすぎて均一な緻密焼結が困難なこ
と、逆に、後者ではY2O3が多量に存在するためにS
iC本来の性質がそこなわれること等の欠点があった。
Also. There is also a patent in which Y2O3, especially among group oxides, is added in an amount of ZOwt% and sintered at 1800t:'. (
JP 48-32110). Further Y2O3 for 25~4Q
A method of obtaining a silicon carbide sintered body by adding wt and sintering SiC at a relatively low temperature of 1850C to 1900C has also been proposed (JP 51-568151°) However, in both cases, the sintering temperature is Sufficient strength cannot be expected because the sintering temperature is lower than that of SiC, the former has too little Y2O3 and it is difficult to achieve uniform, dense sintering, and the latter has a large amount of Y2O3, so S
There were drawbacks such as the loss of the original properties of iC.

なお、SiCは焼結方法により焼結時の粒成長のし易さ
がことなり、無加圧焼結法では一般に粒成長し易く、焼
結体の結晶粒度が大きくなるために充分な強度が得られ
にくい。
In addition, the ease with which SiC grains grow during sintering varies depending on the sintering method. In general, grains grow easily in the non-pressure sintering method, and the crystal grain size of the sintered body increases, making it difficult to obtain sufficient strength. Hard to obtain.

〔発明の目的〕[Purpose of the invention]

本発明の目的は室温から高温まで高強度で、かつ、破壊
靭性値の特に大きい炭化硅素焼結体を提供するにある。
An object of the present invention is to provide a silicon carbide sintered body that has high strength from room temperature to high temperature and particularly high fracture toughness.

〔発明の概要〕[Summary of the invention]

本発明の焼結体は炭化硅素を主体として、Y2O3又は
La5hsをswt% 〜20wt%を有t、、 微細
な結晶粒であることを特徴としている。この焼結体はホ
ントプレス法によシ容易に製造することができる。さら
に、好ましくはこの焼結体中にSiC以外の金属炭化物
を分散させることにより。
The sintered body of the present invention is characterized by having fine crystal grains mainly composed of silicon carbide and containing swt% to 20wt% of Y2O3 or La5hs. This sintered body can be easily manufactured by the real press method. Furthermore, preferably by dispersing a metal carbide other than SiC in this sintered body.

特に強じんな焼結体を得ることを特徴としている。It is characterized by a particularly strong sintered body.

本発明者らが徨々検討した結果、ホットプレス法を用い
ることにより、Y2O3又はLat、s  の含有量が
5wt%〜2Qwt%のものでは充分に緻密で平均粒径
が2μm以下の組織を持った炭化硅素焼結体が得られる
ということが判った。この焼結体は強靭なだけでなく、
高慕でも強度の低下が少ない。
As a result of extensive studies by the present inventors, we found that by using the hot press method, a material with a Y2O3 or Lat,s content of 5 wt% to 2 Qwt% has a sufficiently dense structure with an average grain size of 2 μm or less. It has been found that a silicon carbide sintered body can be obtained. This sintered body is not only strong but also
There is little decrease in strength even in Gaomu.

後者の理由としては、焼結体中の焼結助剤として存在し
ているY203やLa2O3自体がSiCの粒成長を押
える効果と焼結助剤としての効果を兼備すること、およ
び、高融点で、高温まで機械的特性がすぐれていること
によるものと考えられる。
The latter reason is that Y203 and La2O3 themselves, which are present as sintering aids in the sintered body, have the effect of suppressing the grain growth of SiC and the effect as a sintering aid; This is thought to be due to its excellent mechanical properties even at high temperatures.

%に組織中のYzOs を形成させるために添加した、
Y元素の添加形態がY金属又はYf4x(Xは整数)の
場合、及びLazOa’&形成させるだめにl、a金属
又はLaHr(Xは整数)で添加する場合、高温での強
度低下傾向はさらに少ないものとなっている。これはY
、  YHx 、  L a、 L aHxの形で添加
し焼結した場合、YやL aは焼結体の組織中にY2O
3やLavas  の単体として存在するが、Y2O。
% was added to form YzOs in the tissue.
When the addition form of Y element is Y metal or Yf4x (X is an integer), and when it is added as L, a metal or LaHr (X is an integer) to form LazOa'&, the strength decreases even more at high temperatures. There are fewer of them. This is Y
, YHx, L a , and L a Hx when sintered, Y and L a will form Y2O in the structure of the sintered body.
It exists as a simple substance of 3 and Lavas, but Y2O.

やLa20M  のように酸化物の形で添加するとYz
Os・5iOzなどの7リケートが生じ、これが高温特
性の劣化をひきおこすものと考えられる。
When added in the form of oxides such as La20M and
7 licates such as Os.5iOz are generated, which is thought to cause deterioration of high-temperature properties.

一方、前者の強靭な理由とし、では、焼結体中のY2O
3やLazOs  の1oooC以下ニオける熱膨張率
がSiCに比較して大きな値であるため、5SiC組城
中に焼結後の冷却過程で歪応力かのこシ、これによシ破
壊の進行エネルギーを増加させ。
On the other hand, considering the reason for the former's strong
Since the coefficient of thermal expansion of 5SiC and LazOs below 1oooC is larger than that of SiC, strain stress is generated during the cooling process after sintering during assembly of 5SiC, which increases the energy for the progression of fracture. .

強靭化をはだしたものと考えられる。It is thought that it has become tougher.

このようにY2O3やLa2O3の存在がとぐにSiC
の強靭化及び高温時の強度低下防止に有効である。
In this way, the presence of Y2O3 and La2O3 immediately
It is effective in strengthening the steel and preventing strength loss at high temperatures.

しかしY2O3やLa2O3のsi量が5 Iv t 
S 未+’fiテは焼結が不充分となり易く、充分に高
強度な焼結体は得られない。一方1組織中のY2O3や
Latosが20wtチをこえると、強度の低下はほと
んどみられないが、靭性値が大巾に低下してしまいSi
Cの特徴とうしなう。これはSiC粒子のまわシをY2
O3やLa2O3がとりかこむようになるためにY2O
3やLazOs の性質の影響でかたくもろいものとな
ったものと考えられる。なお、焼結体の平均粒径は2μ
m以下であることが必要である。
However, the si amount of Y2O3 and La2O3 is 5 Iv t
If S is not +'fite, sintering tends to be insufficient, and a sintered body with sufficiently high strength cannot be obtained. On the other hand, when Y2O3 or Latos in one structure exceeds 20wt, there is almost no decrease in strength, but the toughness value decreases significantly and Si
What are the characteristics of C? This means that the rotation of SiC particles is Y2
In order for O3 and La2O3 to become surrounding, Y2O
It is thought that the properties of 3 and LazOs made it hard and brittle. Note that the average grain size of the sintered body is 2μ
It is necessary that it is less than m.

粒径がこれをこえると強度が低下するばかりでなく、靭
性も低下して焼結体が充分高信頼性のものとはならない
If the particle size exceeds this range, not only the strength will decrease, but also the toughness will decrease, and the sintered body will not have sufficiently high reliability.

vcK、本炭化@索焼結体に、焼結過程で炭化物となる
金属の単体もしくは水素化物粉末を添加して焼結し、S
iC以外の金属炭化物粒子をY2O3で接着したような
金属炭化物の粒子集合体を組織中に分散したり、炭化物
をそのまま添加して組織これは、これら炭化物粒子もし
くは炭化物粒子集合体がクランクの進行に際してクラン
クの枝分れ等をおこさせ破壊靭性値を向上させたものと
考えられる。これら金属炭化物の存在量としては6〜3
0wtチの範囲がのぞましく、これより少ないと破壊靭
性値の向上には充分な効果がない。また多いと焼結性が
悪くなり5強度や耐酸化性を低下させる。
vcK, this carbonized @ cable sintered body is sintered by adding metal element or hydride powder that becomes carbide in the sintering process, and S
Metal carbide particle aggregates such as metal carbide particles other than iC bonded with Y2O3 may be dispersed in the structure, or carbide may be directly added to the structure. It is thought that the fracture toughness value was improved by causing branching of the crank. The abundance of these metal carbides is 6 to 3
A range of 0 wt is desirable, and if it is less than this, there will be no sufficient effect in improving the fracture toughness value. In addition, if the amount is too large, sinterability deteriorates and strength and oxidation resistance decrease.

なお、分散する金属炭化物としてはSiC中で安定なT
’ pvt ”*  Z r t N b、などの炭化
物であることがのぞましい。
Note that the metal carbide to be dispersed is T, which is stable in SiC.
A carbide such as ``pvt''*Z r t N b is preferable.

〔発明の実施例〕[Embodiments of the invention]

以下、実施例を説明する。 Examples will be described below.

実施例1゜ 粒径0.7μmのSiC粉末を主体として、これに焼結
助剤として粒径1〜10μmのY H2粉末をY2O3
に換算して2..5〜zswtl秤量配合した。これに
バインダとしてシリコーン15Vo1%加え、らいかい
機を用いた混合後、167ツゾユのふるいを用いて整粒
した。次にこれを金型に入れて成形圧500Kf/iで
60φxiotの円板状に成形し、成形体を黒鉛製の型
に入れてホットプレス焼結した。この際、加圧力は30
04/iとし、昇温速度20〜40C/分で2050C
〜2200[まで昇温し、焼結体の結晶粒粗大化を防止
するために、所定温度到達後焼結温度に保持することな
く直ちに同じ速度で冷却する温度ブaフィルを用いた。
Example 1 Mainly SiC powder with a particle size of 0.7 μm, and Y2O3 containing YH2 powder with a particle size of 1 to 10 μm as a sintering agent.
Converting to 2. .. 5 to zswtl was weighed and blended. To this was added silicone 15Vo1% as a binder, and after mixing using a sieve machine, the mixture was sieved using a 167 mm sieve. Next, this was placed in a mold and molded into a disk shape of 60φxiot at a molding pressure of 500 Kf/i, and the molded body was placed in a graphite mold and hot press sintered. At this time, the pressure is 30
04/i and 2050C at a heating rate of 20 to 40C/min.
In order to prevent the crystal grains of the sintered body from coarsening when the temperature was raised to ~2200℃, a temperature filter was used that cooled the sintered body immediately at the same speed without holding it at the sintering temperature after reaching a predetermined temperature.

得られた焼結体の平均結晶粒径は0.8〜2.Oltm
と微細なものであった。一方。
The average crystal grain size of the obtained sintered body was 0.8 to 2. Oltm
It was a minute thing. on the other hand.

比較例としY203を3w t%添加して無加圧法で焼
結した焼結体の結晶粒径は3〜5μmと粗大なものであ
った。
As a comparative example, the crystal grain size of a sintered body added with 3 wt % of Y203 and sintered by a pressureless method was as large as 3 to 5 μm.

ホントプレス法で得られた#J結結像ら4wX3HX 
45 tmの角柱状試料2作製し、常温時および所定温
度での4点曲げ強き、σbi  (Kf/w21および
角柱状試料の表面にビッカース硬度計を用いて圧痕を設
け、圧痕の面fR3と圧痕付き試料の曲げ強度σから式
(I)を用いて破壊靭性値Kh(MN/m丁)5r:求
めた。
#J image formation et al.4wX3HX obtained by Hontopress method
A prismatic sample 2 of 45 tm was prepared, and the four-point bending strength at room temperature and at a specified temperature was determined. Fracture toughness value Kh (MN/m) 5r: was determined from the bending strength σ of the sample with the laminate using the formula (I).

土− K 1 @ 〜1.2×σXS4          
  ・・・・・・(1)次に%Y2O3およびbazo
s 含有量がlQwtチと15wt%を用いて各温度で
のσb4を求めて、高温した場合の特性変化を検討した
。なお。
Soil - K 1 @ ~1.2×σXS4
......(1) Next, %Y2O3 and bazo
Using s content of 1Qwt and 15wt%, σb4 was determined at each temperature, and changes in characteristics at high temperatures were studied. In addition.

この場合の比較例としてはAtNを助剤として焼結した
SiC焼結体の結果を示す。
As a comparative example in this case, the results of a SiC sintered body sintered using AtN as an auxiliary agent are shown.

第1図はY2O3およびLa2Q3含有量に対するσb
4とに+、  との関係、第2図はσb4の温度変化を
示している。
Figure 1 shows σb for Y2O3 and La2Q3 contents.
Figure 2 shows the temperature change of σb4.

第1図からYzOs の含有量5wtチ未満ではσb4
1 Ki *  とも小さな値となり、20wtチをこ
えるとに1゜だけが急激に低下する。この傾向はLag
’sも同じである。これらの結果からY2O5およびL
ag’sの含有量範囲5〜20wt% の時、す土 ぐれた特性の焼結体が得られ、K1.が8 MN/m”
以上に達する。
From Figure 1, if the YzOs content is less than 5wt, σb4
1 Ki * both become small values, and when the weight exceeds 20 wt, only 1 degree decreases rapidly. This tendency is Lag
's is the same. From these results, Y2O5 and L
When the ag's content ranges from 5 to 20 wt%, a sintered body with excellent properties is obtained, and K1. is 8 MN/m”
reach more than that.

第2図からY2O3又はLag’s添加S i C焼結
体、AtNに比較し、高温度まで強度低下をおこさない
ことがわかる。なお、無加圧焼結法で得られたY2O3
8wt%の#j結結像平均粒径3〜5 ttm )の土 KImは2.0〜2..5MN/m’ であった。
From FIG. 2, it can be seen that the S i C sintered body containing Y2O3 or Lag's does not deteriorate in strength even at high temperatures, compared to AtN. In addition, Y2O3 obtained by pressureless sintering method
The soil KIm of 8 wt% #j average particle diameter (3-5 ttm) is 2.0-2. .. It was 5MN/m'.

実施例2 実施例1と同じ粒径のS i C粉末にS I C焼結
体中のY2O3又はL azU3の含有量が15wt%
一定となるようにY Hsを秤盪添加するとともに、さ
らにVもしくは′1゛iの添加量を変化させて添加焼結
し7、組収中に′ri又はVの炭化物粒子果合体を分散
させた焼結体を得、これらのσh4.kQeを求めた。
Example 2 The content of Y2O3 or L azU3 in the SIC sintered body was 15 wt% in S i C powder with the same particle size as in Example 1.
Y Hs was added by weighing so as to be constant, and the amount of V or '1'i was added and sintered7, and the carbide particle aggregate of 'ri' or V was dispersed during the assembly. A sintered body was obtained, and these σh4. kQe was calculated.

(第3図)さらにriCの体積率を15.0vo11一
定とした場合の高温時におけるに1 g変化をもとめる
とともに、AtN2wt1で焼結した’f: i C1
5、Qvo1%SiC焼結体も比較して示した。
(Figure 3) Furthermore, when the volume fraction of riC is kept constant at 15.0vo11, the change in 1 g at high temperature is determined, and 'f: i C1 sintered with AtN2wt1.
5. Qvo 1% SiC sintered body is also shown for comparison.

第3図から金属炭化物の体積率範囲は6〜30volチ
である場合にすぐれた特性の焼結体が得られることがわ
かシ第4図からY2O3と′riC含有焼結体の14i
温特性がすぐ六でいることがわかる。
Figure 3 shows that a sintered body with excellent properties can be obtained when the volume fraction of the metal carbide ranges from 6 to 30 vol.
It can be seen that the temperature characteristics are immediately 6.

実施例1 実施例2と同じ粒径のSiC粉末を主体として、実施例
2とほぼ同様な方法で焼結体を作製した。
Example 1 A sintered body was produced in substantially the same manner as in Example 2, mainly using SiC powder having the same particle size as in Example 2.

本実施例では、金属炭化物となる添加金属の種類を2種
類(Tj、V)として、その添加量は2つの金属の合計
で15vo1%一定となるようにし。
In this example, there are two types of additive metals (Tj, V) that form the metal carbide, and the amount of the added metals is constant at 15vo1% in total of the two metals.

この一定体積率の範囲でs ’17 rとVの比率をか
えて検討した。第5図は、+f iとVの比率に対する
常温時のに1.を示したものである。■の量が+rHと
Vの合計蓋の50〜9Qvolチの範囲で特に大きなに
1.が得られる。これは、’ri、:Vが共存するため
焼結過程でfiとVの複炭化物が形成されるが、この組
成によって均、が変化したものと考えられる。
A study was conducted by changing the ratio of s'17 r and V within this constant volume ratio range. FIG. 5 shows the ratio of +f i to V at room temperature of 1. This is what is shown. 1. The amount of (2) is especially large in the range of 50 to 9 Qvol of the total lid of +rH and V. is obtained. This is thought to be due to the coexistence of 'ri, :V, which forms a double carbide of fi and V during the sintering process, and the uniformity changes depending on this composition.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、破壊靭性値や強度が、常温ばかシでな
く高温まで大きい炭化硅素焼結体が得られ、この焼結体
は信頼性の高い耐熱構造部材として適用しうる。
According to the present invention, it is possible to obtain a silicon carbide sintered body whose fracture toughness and strength are not only strong at room temperature but also high even at high temperatures, and this sintered body can be used as a highly reliable heat-resistant structural member.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第5図は、本発明の実施例の効果を示す曲扇図
である1゜
1 to 5 are curved fan diagrams showing the effects of the embodiment of the present invention.

Claims (1)

【特許請求の範囲】 1、イットリウム又はランタンの酸化物を5wt%〜2
0wt%含み、焼結体の組織が平均粒径で2μm以下で
あることを特徴とする炭化硅素焼結体。 2、特許請求の範囲第1項において、イットリウム又は
ランタンの原料として金属単体又は金属水素化物を用い
たことを特徴とする炭化硅素焼結体。 3、特許請求の範囲第1項または第2項の焼結体中に炭
化硅素以外の金属炭化物を分散させたことを特徴とする
炭化硅素焼結体。
[Claims] 1. Yttrium or lanthanum oxide from 5 wt% to 2
A silicon carbide sintered body containing 0 wt% and having a structure of the sintered body having an average grain size of 2 μm or less. 2. A silicon carbide sintered body according to claim 1, characterized in that an elemental metal or a metal hydride is used as a raw material for yttrium or lanthanum. 3. A silicon carbide sintered body, characterized in that a metal carbide other than silicon carbide is dispersed in the sintered body according to claim 1 or 2.
JP60193769A 1985-09-04 1985-09-04 silicon carbide sintered body Pending JPS6256367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60193769A JPS6256367A (en) 1985-09-04 1985-09-04 silicon carbide sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60193769A JPS6256367A (en) 1985-09-04 1985-09-04 silicon carbide sintered body

Publications (1)

Publication Number Publication Date
JPS6256367A true JPS6256367A (en) 1987-03-12

Family

ID=16313500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60193769A Pending JPS6256367A (en) 1985-09-04 1985-09-04 silicon carbide sintered body

Country Status (1)

Country Link
JP (1) JPS6256367A (en)

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