JPS6258061U - - Google Patents

Info

Publication number
JPS6258061U
JPS6258061U JP1985149284U JP14928485U JPS6258061U JP S6258061 U JPS6258061 U JP S6258061U JP 1985149284 U JP1985149284 U JP 1985149284U JP 14928485 U JP14928485 U JP 14928485U JP S6258061 U JPS6258061 U JP S6258061U
Authority
JP
Japan
Prior art keywords
internal electrode
internal
piezoelectric actuator
electrode
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985149284U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985149284U priority Critical patent/JPS6258061U/ja
Publication of JPS6258061U publication Critical patent/JPS6258061U/ja
Pending legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【図面の簡単な説明】
第１図は本考案による圧電アクチユエータにお
ける内部電極の配線構造の一実施例を示す針視図
、第２図は本考案の他の実施例を示す斜視図、第
３図はその従来例を示す斜視図である。 １……セラミツク板、２……内部電極、５……
内部電極の露出部、６，７……外部電極配線、８
……感光性ドライフイルム、９……開口部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 絶縁体と内部電極とを交互に複数層積層形成し
    、前記内部電極の露出部に外部電極配線を形成す
    る圧電アクチユエータにおける内部電極の配線構
    造において、前記絶縁体と内部電極との複数層積
    層方向に感光性被膜を形成し、前記内部電極と対
    応する部位に光露光、現像処理による開口部を設
    け、該開口部内に露出した内部電極の露出部上の
    複数にわたつて導電性部材を塗布して外部電極配
    線を形成したことを特徴とする圧電アクチユエー
    タにおける内部電極の配線構造。
JP1985149284U 1985-09-30 1985-09-30 Pending JPS6258061U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985149284U JPS6258061U (ja) 1985-09-30 1985-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985149284U JPS6258061U (ja) 1985-09-30 1985-09-30

Publications (1)

Publication Number Publication Date
JPS6258061U true JPS6258061U (ja) 1987-04-10

Family

ID=31064345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985149284U Pending JPS6258061U (ja) 1985-09-30 1985-09-30

Country Status (1)

Country Link
JP (1) JPS6258061U (ja)

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