JPS6259902A - Manufacturing method of polychromatic optical filter - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a polychromatic optical filter that is used in a solid-state image sensor or the like to enable color imaging.

[Conventional technology]

Figure 2 (al ~ (hl is, for example,
A conventional manufacturing method for forming filters having different optical characteristics on the same plane as disclosed in Publication No. 9 is shown,
In the figure, 12 is a transparent glass substrate, 13, 14° 15.
16 are black, blue, green, and red cotton-like filter elements, 17 is a dyeable resin, 18 is a photosensitive resin layer, 19
is the dry plate that serves as the original pattern.

Next, the manufacturing flow will be explained.

fa) Chromium 13 is vacuum deposited on the glass substrate 12.

('b) Form a pattern by etching chromium 13.

(C) Paintable resin 17 is applied.

(dl) A photosensitive resin 18 is applied thereon. Next, a dry plate (original pattern) 19 is brought into close contact with the photosensitive resin, exposed to light, and then developed.

In this way, only the portion of the photosensitive resin 18 corresponding to, for example, the red filter is removed on the colorable resin rf117, and the other portions are coated.

(f) Color this and dry it. The colored area is 1
It is 4.

(g) Peel off the remaining photosensitive resin layer.

fh) Perform the same operation for the blue filter and green filter.

By manufacturing as described above, it is possible to form an optical filter having multicolored patterns on the same plane.

[Problem that the invention seeks to solve]

Since the conventional method for manufacturing a polychromatic optical filter is configured as described above, the lower limit of the size of the filter pattern depends on the lower limit of patterning of the photosensitive resin layer. Therefore, there was a problem in that it was difficult to control the size in microns.

This invention was made to solve the above-mentioned problems, and an object thereof is to provide a method for manufacturing a polychromatic optical filter that can form a finer filter pattern and simplify the process. .

[Means for solving problems]

The method for manufacturing a polychromatic optical filter according to the present invention involves laminating a Langmuir-Blodgett film (LB film) composed of molecules having unsaturated bonds on a dyeable resin body, and applying ionizing radiation to the LB film. Polymerize by irradiating the specified area,
A color filter is formed by eluting unreacted monomer molecules to form an anti-dyeing mask pattern, and using this mask pattern as an anti-dyeing film to dye a dyeable resin body.

[Effect]

In this invention, since the LB film is used in place of the conventional resist material, its resolution is excellent. In addition, since the LB film is thinner than conventional resist,
It can be easily removed by dry etching, such as plasma etching, reactive ion etching, ion beam etching, etc.

〔Example〕

FIG. 1 (al~(hl) is a sectional view showing a method of manufacturing a polychromatic optical filter according to an embodiment of the present invention. In the figure, 1 and 2 are exactly the same as the conventional device, and 2 is an image sensor. 1 is a part of the photodetector. 3
4 is a dyeable resin body, and 4 is a Langmuir-Blodgett film (LB film) composed of molecules having unsaturated bonds, such as a free acid LB film of ω-tricosenic acid. 5 is the dyed part after dyeing. 7 is the same protective film as the conventional one.

Next, the manufacturing method of this example will be explained.

FIG. 1('b) shows a structure in which a photodetector 2 is embedded on an image sensor substrate 2 (FIG. 1(a)) and a dyeable resin body 3 is laminated thereon. Furthermore, the LB film 4 laminated on top of this is shown in the same figure (C1), and this is used as an electron beam resist.When exposed to electron beam, the exposed part polymerizes, and when ethanol is used as a developer, The unreacted portion is eluted. The photodetector 1 is exposed in this way, as shown in FIG. Then, the dyed portion 5 is formed ((e) in the same figure).The LB film 4 is then peeled off ((f) in the same figure), and the protective film 7 is laminated ((g) in the same figure). This allows a filter of a certain color to be formed. When making a multicolor color filter, repeating the steps fa) to (f) makes it possible to form a multicolor color filter as shown in FIG. 2(h).

In the manufacturing method of this embodiment, LBH* is layered on top of the dyeable resin body, and only a predetermined portion of the LBH* is polymerized and the rest is eluted to create a dye resist mask and dye it.
It becomes possible to form a finer filter pattern in micron units, and the manufacturing process can be simplified compared to the conventional method.

In the above embodiment, an example was shown in which a filter was formed directly on a substrate such as silicon on which an image sensor was formed, but it is also possible to use means to prevent charge amplifiers during electron beam exposure, such as transparent electrodes such as ITO or conductive transparent polymers. If a method such as treating the substrate surface with a thin film is used in combination, a color filter can be formed on a glass substrate in the same manner as described above.
It is also possible to use it as a color filter for bonding.

〔Effect of the invention〕

As described above, according to the method for manufacturing a multicolor optical filter according to the present invention, since the LB film is used for the resist dyeing mask pattern, a finer dyeing pattern can be obtained than before, and the process is simpler. Therefore, the effect of facilitating peeling can be obtained.

[Brief explanation of drawings]

FIGS. 1fa) to (h) are manufacturing flow diagrams of a manufacturing method according to an embodiment of the present invention, and FIGS. 2(a) to (h) are manufacturing flow diagrams of a conventional manufacturing method. In the figure, 1 is a photodetector, 2 is an image sensor substrate, 3 is a dyeable resin body, 4 is an LB film, 5 and 8 are parts to be dyed, 7 is a protective film, 12 is a glass substrate, 13 and 14
．． 15 and 16 are black, blue, red, and green filters, 17 is a dyeable resin, 18 is a photosensitive resin layer, and 19 is a pattern original (dry Fi). Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (2)

[Claims] (1) The process of laminating a Langmuir-Blodgett film composed of molecules with unsaturated bonds on top of the dyeable resin body, and irradiating the film with ionizing radiation to predetermined areas to polymerize it and leave it unsaturated. A multi-purpose dyeing method characterized by comprising the steps of eluting reaction monomer molecules to form a resist dye mask pattern, dyeing using the resist dye mask pattern, and peeling off the resist dye mask pattern. A method of manufacturing a color optical filter. (2) The method for manufacturing a multicolor optical filter according to claim 1, characterized in that the resist mask pattern is removed by dry etching.