JPS626261A - Automatic exposing device for printed wiring board - Google Patents

Automatic exposing device for printed wiring board

Info

Publication number
JPS626261A
JPS626261A JP60145264A JP14526485A JPS626261A JP S626261 A JPS626261 A JP S626261A JP 60145264 A JP60145264 A JP 60145264A JP 14526485 A JP14526485 A JP 14526485A JP S626261 A JPS626261 A JP S626261A
Authority
JP
Japan
Prior art keywords
substrate
printed wiring
exposure
machine
glass plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60145264A
Other languages
Japanese (ja)
Inventor
Masahiro Hoshino
星野 昌弘
Yoshitoshi Ishizaki
石崎 義俊
Koichi Kondo
公一 近藤
Osamu Hattori
修 服部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60145264A priority Critical patent/JPS626261A/en
Publication of JPS626261A publication Critical patent/JPS626261A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To obtain a small-sized, efficient device by using one mechanism to convey a substrate onto an exposing machine by a conveying machine and press and fixing the substrate as it is, and then to expose and convey the substrate. CONSTITUTION:The carrier 5 of the conveying machine 30 moves onto the substrate 2 which is maintained by a throwing-in machine 1 at specific height and the substrate is lifted by a sucker 6 for conveyance and moved as shown by an arrow E onto the glass plate 10 of an exposure part, thereby placing the substrate on the glass plate 10 at a specific position. When vacuum suction is carried out through a suction hole 80 by a vacuum device provided to the exposure part, a soft film 40 deforms along the substrate 2, sucker 6 for conveyance, and packing 70 to contact the substrate 2, which is fixed. Then, light from a light source 12 reaches the substrate 2 through the glass plate 10 of the exposure part and the substrate is exposed to a circuit pattern drawn on the glass plate 10. The vacuum suction is carried on even after the exposure to lift the substrate 2 by the sucker 6 for conveyance and the carrier 5 is moved right onto a receiving machine 13 and the suction of the sucker 6 for conveyance is released to place the substrate 2 on the receiving machine 13, thus completing the exposure.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は印刷配線基板の外側に設けられた銅箔に、必
要な回路ぷターンを露光する自動露光機に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an automatic exposure machine that exposes a necessary circuit pattern onto a copper foil provided on the outside of a printed wiring board.

〔従来の技術〕[Conventional technology]

印刷配線基板は、外側に銅箔を一体に成形後。 After the printed wiring board is integrally molded with copper foil on the outside.

必要な回路パターンを露光し、不要部を剥離後残った部
分にメッキ等の表面処理を行ない完成する。第5図は従
来の例による印刷配線基板に必要な回路パターンを、露
光する自動露光機を示す断面図である。
The necessary circuit pattern is exposed, unnecessary parts are peeled off, and the remaining parts are subjected to surface treatment such as plating to complete the process. FIG. 5 is a sectional view showing a conventional automatic exposure machine for exposing a circuit pattern necessary for a printed wiring board.

図において、:1)は印刷配線基板(2)を乗せ、順に
搬送機(3)に送る投入機で、投入機駆動部(4)によ
り常に一定の位置に基板12)を保持している。また(
5)は基板(2)を1枚ずつ吸上げ搬送する搬送用吸盤
(6)を備えたキャリヤで、矢印Aの左右方向にガイド
(7)に沿って移動部(8)により移動する。(9)は
搬送機(3)により運ばれ、露光部ガラス板a・の上に
置かれた基板(2)を押える基板押えで、矢印B方向に
上下し、真空吸盤部aDにて基板(2)を固定する。@
は固定後の基板(2)に露光部ガラス板aQを経由して
露光する光源である。峙は露光後、搬送機(3)にて運
ばれた基板(2)を受取る受取り機である。
In the figure, reference numeral 1) is a loading machine on which a printed wiring board (2) is placed and sequentially conveyed to a conveyor (3), and the board 12) is always held at a fixed position by a loading machine drive unit (4). Also(
5) is a carrier equipped with a conveying suction cup (6) for sucking up and conveying substrates (2) one by one, and is moved by a moving part (8) along a guide (7) in the left-right direction of arrow A. (9) is carried by the carrier (3) and moves up and down in the direction of arrow B with a substrate holder that presses down the substrate (2) placed on the exposure section glass plate a. 2) Fix. @
is a light source that exposes the fixed substrate (2) via the exposure glass plate aQ. At the opposite end is a receiving machine that receives the substrate (2) carried by the carrier machine (3) after exposure.

従来の例による印刷配線基板の自動露光装置は以上の様
に構成され2次の様に露光される0露光前の基板(2)
は投入機(!)により順に一定の位置に保持され、搬送
機(3)にある搬送用吸盤(6)にて吸い上げられ、キ
ャリヤ(5)に固定される。次にキャリヤ(5)はガイ
ド(7)に沿って矢印A方向に露光部ガラス板α呻の上
に移動し、搬送用吸盤(6)による吸上げは解除されて
基板(2)は露光部ガラス板α〔の上に乗せられ、キャ
リヤ(5)は投入機(1)の上に戻る。
The conventional automatic exposure apparatus for printed wiring boards is configured as described above, and the board (2) before 0 exposure is exposed in the secondary manner.
are sequentially held in a fixed position by a feeding machine (!), sucked up by a conveying suction cup (6) on a conveying machine (3), and fixed to a carrier (5). Next, the carrier (5) is moved in the direction of arrow A along the guide (7) onto the glass plate α in the exposure area, the suction by the transport suction cup (6) is released, and the substrate (2) is moved in the exposure area. The carrier (5) is placed on the glass plate α and returns to the top of the loading machine (1).

その後基板押え(9)が矢印Bの方向に移動し、基板(
2)を所定の位置に置き、真空吸盤部aυにて基板(2
)を露光部ガラス板α1に密着固定後、光源azよりの
光により基板(2)の銅箔部に所定の回路パターンを露
光する。露光完了後基板押え(9)は矢印Bの上方に移
動し、投入機(1)の上に戻っていたギヤリヤ(5)が
露光完了した基板(2)の上に移動し、搬送用吸盤(6
)にて基板(2)を吸上げ受取り機@3に移動し、受取
り機構に基板(2)は置かれ9次の工程に備える。
Thereafter, the substrate holder (9) moves in the direction of arrow B, and the substrate (
2) in the specified position, and use the vacuum suction cup aυ to hold the board (2).
) is closely fixed to the exposure glass plate α1, and then a predetermined circuit pattern is exposed on the copper foil portion of the substrate (2) using light from a light source az. After the exposure is completed, the substrate holder (9) moves above the arrow B, and the gear rear (5), which had been returned to the top of the loading machine (1), moves to the top of the exposed substrate (2), and the transfer suction cup ( 6
), the substrate (2) is sucked up and moved to the receiving machine @3, and the substrate (2) is placed on the receiving mechanism in preparation for the ninth step.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来の例による印刷配線基板の自動露光装置は以上のよ
うに基板は搬送機により露光部ガラス板の上まで搬送さ
れ基板が露光部ガラス板に乗せられた後1次に基板押え
が上から降りて基板を所定の位置に固定し、真空吸盤部
により露光部ガラス板に密着、固定される装置となって
いる。従って搬送機と基板押えの2つの装置によ6基板
が搬送される構造であるため、はこり等が基板及び露光
部ガラス板へはこばれて乗りやすく、はこりにより異常
な回転パターンが露光されてしまうという問題点があっ
た。
In the conventional automatic exposure apparatus for printed wiring boards, as described above, the board is transported by the transporter to the top of the glass plate in the exposure area, and after the board is placed on the glass plate in the exposure area, the substrate holder is first lowered from above. The substrate is fixed in a predetermined position using a vacuum suction cup, and the device is tightly attached and fixed to the exposure glass plate using a vacuum suction cup. Therefore, since the structure is such that six substrates are transported by two devices, a transporter and a substrate holder, chips and the like easily get stuck on the substrates and the glass plate in the exposure area, and the chips cause abnormal rotation patterns to be exposed. There was a problem that it could be done.

また搬送機と基板押えの2つの機構により基板を搬送し
、固定しているため、設備が大型になりやすく、占有面
積、コスト等が大きくなるという問題点があった。
In addition, since the substrate is transported and fixed by two mechanisms, a transporter and a substrate holder, there is a problem that the equipment tends to be large-sized, and the occupied area and cost become large.

この発明による印刷配線基板の自動露光装置は上記の問
題点を解決するためになされたもので。
The automatic exposure apparatus for printed wiring boards according to the present invention has been made in order to solve the above-mentioned problems.

搬送機で基板を露光機上に搬送後、そのまま固定し基板
を押えた後、露光し受取り機まで引き続いて搬送する作
業を1つの機構で行なわせ、小型で効率の良い装置を得
ることを目的とする。
The purpose is to create a compact and efficient device by having a single mechanism perform the work of transporting the board onto the exposure machine using a transport machine, fixing it as it is, pressing the board, exposing it, and then transporting it to the receiving machine. shall be.

〔問題点を解決するための手段〕[Means for solving problems]

この発明による印刷配線基板の自動露光装置は。 An automatic exposure apparatus for printed wiring boards according to the present invention is provided.

印刷配線基板の投入機と、軟質フィルムが支持板に設け
られ、印刷配線基板を吸着して露光機へ搬送する搬送用
吸盤を有し、露光部ガラス盤の上に搬送後、露光部に設
けられた吸引口から真空引きして軟質フィルムにより基
板を固定し、露光の後真空引きを解除した基板を受取り
機まで搬送する一連の作業を行なう搬送機を有する自動
露光装置である。
A feeding machine for the printed wiring board and a flexible film are provided on the support plate, and a suction cup for suctioning the printed wiring board and transporting it to the exposure machine is provided. This automatic exposure apparatus has a conveyor that performs a series of operations such as evacuating the substrate through a suction port, fixing the substrate with a soft film, and conveying the evacuated substrate after exposure to a receiving machine.

〔作 用〕[For production]

この発明による印刷配線基板の自動露光装置は。 An automatic exposure apparatus for printed wiring boards according to the present invention is provided.

搬送機により基板t″露光機まで搬送し、露光機に設け
られた真空引き装置と合わせて基板を固定し露光する。
The substrate t'' is transported by a transport machine to an exposure machine, and the substrate is fixed together with a vacuum device provided in the exposure machine and exposed.

露光後真空引きを解除して基板を搬送機により受取り機
まで続けて搬送し、l!先光時独立した基板押え機構を
不要にする。
After exposure, the vacuum is released, the substrate is continuously transported to the receiving machine by the transport machine, and then the substrate is transported to the receiving machine. To eliminate the need for an independent substrate holding mechanism during pre-light.

〔実施例〕〔Example〕

第1〜第4図はこの発明の一実施例による印刷用配線基
板の自動露光装置を示し、第1図はこの装置の正面図、
第2図は第1図の矢印Cの方向から見た側面図である。
1 to 4 show an automatic exposure device for printed wiring boards according to an embodiment of the present invention, and FIG. 1 is a front view of this device;
FIG. 2 is a side view seen from the direction of arrow C in FIG.

第3図、第4図は第2図のD −D断面図で第3図は基
板t−露光機に搬送した状態を示し、第4図は基板が固
定された状態を示す図であル。図にオイテIx+ 、 
(21、(4) 〜(81、al 、αa。
Figures 3 and 4 are cross-sectional views taken along the line D-D in Figure 2, Figure 3 shows the state in which the substrate has been transported to the exposure machine, and Figure 4 shows the state in which the substrate is fixed. . In the figure, Oite Ix+,
(21, (4) ~ (81, al, αa.

復尋は従来の例と同一または相崩品である。(至)は合
成樹脂またはゴム等の軟質フィルム(40) ’iキャ
リヤ(5)の搬送用吸盤(6)の支持板(50)に設け
、基板(2)を搬送する搬送機である。(60)は露光
部にあり、露光部ガラス板lleが固定された支持部で
、露光部ガラス仮置が乗る面には、ゴムまたは合成樹脂
等のパツキン(70)が露光部ガラス仮置を囲んで設け
られている。
The return is either the same as the previous example or a different product. (to) is a conveyor for conveying the substrate (2), which is provided on the support plate (50) of the conveyance suction cup (6) of the i-carrier (5) with a soft film (40) made of synthetic resin or rubber. (60) is a support part located in the exposure area and to which the exposure area glass plate lle is fixed, and on the surface on which the exposure area glass temporary holder rests, a gasket (70) made of rubber or synthetic resin is used to hold the exposure area glass temporary holder. It is surrounded by

(80)は露光部の支持部(60)に設けられた吸引孔
で、露光部に設けられた真空装置(図示していない)に
直結している。
Reference numeral (80) denotes a suction hole provided in the support portion (60) of the exposure section, which is directly connected to a vacuum device (not shown) provided in the exposure section.

一実施例による印刷配線基板の自動露光装置は以上のよ
うに構成され、基板は次の様に露光される。まず投入機
(1)により所定の高さに維持されている基板(2)の
上に搬送機(至)のキャリヤ(5)が移動し。
The automatic exposure apparatus for a printed wiring board according to one embodiment is constructed as described above, and the board is exposed as follows. First, the carrier (5) of the conveying machine (to) is moved onto the substrate (2) which is maintained at a predetermined height by the loading machine (1).

搬送用吸盤(6)にて基板(2)を持ち上げ、矢印Eの
方向に移動し、露光部ガラス板α呻の上に到り、第3図
に示す様に露光部ガラス装置の所定の位置に基板(2)
t−置く。
Lift the substrate (2) with the transport suction cup (6), move it in the direction of arrow E, reach above the exposure section glass plate α, and place it at a predetermined position on the exposure section glass device as shown in Fig. 3. board (2)
t- put.

ここで露光部に設けられた真空装置(図示していない)
により第4図の矢印Fの方向に吸引孔(80)から真空
引きを行なうと、軟質フィルム(40) 。
A vacuum device (not shown) installed in the exposure section
When vacuum is drawn from the suction hole (80) in the direction of arrow F in FIG. 4, the soft film (40) is removed.

支持部(60) 、パツキン(70)で構成される空間
の空気が吸引され、大気圧により軟質フィルム(40)
は第4図に示すように基板(2)や搬送用吸盤((i)
 、 パツキン(70)に沿って変形し、基板(2)に
密着し、基板(2)を固定する。次に光源Q3からの光
が露光部ガラス板αIt通過して基板(2)に到り、露
光部ガラス板α呻に書かれた回路パターンで露光される
。露光後真空装置(図示していない)による真空引きを
解除し、搬送用吸盤(6)で基板(2)を持ち上げ、キ
ャリヤ(5)を右に移動し、受取り機0上に搬送し、搬
送用吸盤(6)の吸上げを解除し、基板(2)は受取り
機Q3に置かれ、露光は完了する。
The air in the space consisting of the support part (60) and the packing (70) is sucked, and the soft film (40) is
As shown in Figure 4, the board (2) and the suction cup for transportation ((i)
, deforms along the packing (70), comes into close contact with the substrate (2), and fixes the substrate (2). Next, the light from the light source Q3 passes through the exposure glass plate αIt and reaches the substrate (2), where it is exposed with the circuit pattern written on the exposure glass plate α. After exposure, release the vacuum by the vacuum device (not shown), lift the substrate (2) with the transport suction cup (6), move the carrier (5) to the right, transport it onto the receiver 0, and transport it. The suction of the suction cup (6) is released, the substrate (2) is placed on the receiver Q3, and the exposure is completed.

〔発明の効果〕〔Effect of the invention〕

以上の様に、この発明による印刷配線基板の自動露光装
置は印刷配線基板を自動的に投入する投入機と、投入後
の印刷配線基板を吸着し搬送する吸盤により、吸盤を支
持する支持板に設けられた軟質フィルムを伴って横方向
に露光機へ搬送し。
As described above, the automatic exposure apparatus for printed wiring boards according to the present invention has a feeding device that automatically feeds printed wiring boards, and a suction cup that sucks and conveys the printed wiring boards after feeding, and a support plate that supports the suction cups. It is transported laterally to the exposure machine along with the provided soft film.

上下方向に移動し所定の位置に基板を設置後、露光機に
設けられた真空装置により真空引きし、軟質フィルムを
密着させ、露光し、真空引きを解除してそのまま吸盤に
て基板を持ち上げ受取り機へ搬送する搬送機と、搬送後
の基板を受取る受取り機で構成されているので、露光時
に基板を別途押える押え機構を不要にする効果がある。
After moving the substrate up and down and setting it in a predetermined position, it is evacuated by the vacuum device installed in the exposure machine, the soft film is brought into close contact with the substrate, exposed, the vacuum is released, and the substrate is lifted with a suction cup and received. Since it is comprised of a transport machine that transports the substrate to the machine and a receiver that receives the board after it has been transported, it has the effect of eliminating the need for a separate holding mechanism that holds the board during exposure.

またキャリヤの支持板に軟質フィルムを設け。A soft film is also provided on the support plate of the carrier.

この支持板に支持されている吸盤により基板を吸上げ、
露光部ガラス板の上に乗せ、露光部に設けられた真空装
置により真空引きすると吸盤の形状に係わりなく軟質フ
ィルムが基板に密着するため。
The board is sucked up by the suction cup supported by this support plate,
When placed on a glass plate in the exposure area and evacuated using a vacuum device installed in the exposure area, the soft film adheres to the substrate regardless of the shape of the suction cup.

基板と露光部ガラス板が確実に密着し、精度良く露光さ
れる効果がある。
This has the effect of ensuring that the substrate and the glass plate of the exposure section are in close contact with each other, allowing for accurate exposure.

あるいは搬送機と基板押え機構により基板を移しかえて
露光することがないので、露光部ガラス板へのほこりの
介入する頻度が少なくなり、異常な回路パターンが露光
されることが防止される効果がある。
In addition, since the substrate is not transferred and exposed using a conveyor and a substrate holding mechanism, the frequency of dust entering the exposure area glass plate is reduced, which has the effect of preventing abnormal circuit patterns from being exposed. be.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例による印刷配線基板の自動
露光装置を示す正面図、第2図は第1図の側面板、第3
図、第4図は第2図のD−D断面図である。第5図は従
来の例による印刷配線基板の自動露光装置を示す図であ
る。 図において(1)は投入機、(2)は印刷配線基板、(
6)は搬送用吸盤、 IIIは露光部ガラス板、(1:
Iは受取り機、 (40)は軟質フィルム、 (50)
は叉持台、 (80)は吸引口である。 各図中同一符号は同一または相当部分を示す。
FIG. 1 is a front view showing an automatic exposure apparatus for printed wiring boards according to an embodiment of the present invention, and FIG. 2 shows the side plate of FIG.
4 are sectional views taken along line DD in FIG. 2. FIG. 5 is a diagram showing a conventional automatic exposure apparatus for printed wiring boards. In the figure, (1) is the loading machine, (2) is the printed wiring board, (
6) is a suction cup for transportation, III is the exposure glass plate, (1:
I is the receiver, (40) is the soft film, (50)
The holder is a forklift stand, and (80) is a suction port. The same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims]  印刷配線基板を自動的に投入する投入機と、この投入
された印刷配線基板を吸着し搬送する搬送用吸盤を有し
、横方向および上下方向に移動する搬送機と、この搬送
機により搬送され、露光部ガラス板上で位置合わせされ
た印刷配線基板を露光する露光機と、露光後搬送機によ
り搬送された印刷配線基板を受取る受取機とからなる印
刷配線基板の自動露光装置において、搬送用吸盤を支持
している支持板に軟質フィルムを取付け、印刷配線基板
の露光時露光部ガラス板の支持部に設けられた吸引口か
ら真空引きして、この軟質フィルムを印刷配線用基板に
密着固定するとともに、露光後は真空引きを解除して印
刷配線基板を搬出することを特徴とする印刷配線基板の
自動露光装置。
A loading machine that automatically inputs printed wiring boards, a transporting machine that moves horizontally and vertically, and a transporting suction cup that attracts and transports the loaded printed wiring boards, and a transporter that moves horizontally and vertically. , an automatic exposure device for printed wiring boards consisting of an exposure unit that exposes printed wiring boards aligned on a glass plate, and a receiver that receives the printed wiring boards transported by a transport machine after exposure. A soft film is attached to the support plate that supports the suction cup, and when the printed wiring board is exposed, a vacuum is drawn from the suction port provided in the support of the exposed glass plate, and this soft film is tightly fixed to the printed wiring board. An automatic exposure apparatus for a printed wiring board, characterized in that, after exposure, the vacuum is released and the printed wiring board is taken out.
JP60145264A 1985-07-02 1985-07-02 Automatic exposing device for printed wiring board Pending JPS626261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60145264A JPS626261A (en) 1985-07-02 1985-07-02 Automatic exposing device for printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60145264A JPS626261A (en) 1985-07-02 1985-07-02 Automatic exposing device for printed wiring board

Publications (1)

Publication Number Publication Date
JPS626261A true JPS626261A (en) 1987-01-13

Family

ID=15381107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60145264A Pending JPS626261A (en) 1985-07-02 1985-07-02 Automatic exposing device for printed wiring board

Country Status (1)

Country Link
JP (1) JPS626261A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5122347A (en) * 1990-12-31 1992-06-16 Ag Communication Systems Corporation Vertical ultraviolet exposure unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5122347A (en) * 1990-12-31 1992-06-16 Ag Communication Systems Corporation Vertical ultraviolet exposure unit

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