JPS627010U - - Google Patents

Info

Publication number
JPS627010U
JPS627010U JP9855785U JP9855785U JPS627010U JP S627010 U JPS627010 U JP S627010U JP 9855785 U JP9855785 U JP 9855785U JP 9855785 U JP9855785 U JP 9855785U JP S627010 U JPS627010 U JP S627010U
Authority
JP
Japan
Prior art keywords
flatness
measured
sensor
measuring device
optical head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9855785U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9855785U priority Critical patent/JPS627010U/ja
Publication of JPS627010U publication Critical patent/JPS627010U/ja
Pending legal-status Critical Current

Links

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  • Length Measuring Devices By Optical Means (AREA)

Description

【図面の簡単な説明】
第１図は、本考案の光ヘツドを用いた非接触平
面度測定装置の一実施例を説明する図、第２図は
従来の非接触平面度測定装置の一例を説明する図
である。 図において、１と１′は円板、２と２′はリン
グ、３と３′は移動台、４と４′は基台、７と７
′はポテンシヨメータ、９と９′はアーム、１０
は静電容量型センサー、１１は測定器、１２と１
２′はＸＹレコーダ、２１は光ヘツド、２２は駆
動回路、２３はフオーカスエラー回路、２４はフ
オーカスサーボ回路、２５は検出器である。

Claims (1)

    【実用新案登録請求の範囲】
  1. センサーを垂直に固定し、被測定物を水平面内
    に配置した状態で、該被測定物を回転又は往復運
    動を行わせて平面度を非接触測定すると共に平面
    度曲線を記録する装置において、該センサーとし
    て光ヘツドを用いることを特徴とする平面度測定
    装置。
JP9855785U 1985-06-28 1985-06-28 Pending JPS627010U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9855785U JPS627010U (ja) 1985-06-28 1985-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9855785U JPS627010U (ja) 1985-06-28 1985-06-28

Publications (1)

Publication Number Publication Date
JPS627010U true JPS627010U (ja) 1987-01-16

Family

ID=30966600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9855785U Pending JPS627010U (ja) 1985-06-28 1985-06-28

Country Status (1)

Country Link
JP (1) JPS627010U (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5596406A (en) * 1979-01-19 1980-07-22 Hitachi Ltd Device for determining roughness of surface
JPS5744807A (en) * 1980-08-29 1982-03-13 Hitachi Ltd Flatness measuring apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5596406A (en) * 1979-01-19 1980-07-22 Hitachi Ltd Device for determining roughness of surface
JPS5744807A (en) * 1980-08-29 1982-03-13 Hitachi Ltd Flatness measuring apparatus

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