JPS6273533U - - Google Patents
Info
- Publication number
- JPS6273533U JPS6273533U JP16295885U JP16295885U JPS6273533U JP S6273533 U JPS6273533 U JP S6273533U JP 16295885 U JP16295885 U JP 16295885U JP 16295885 U JP16295885 U JP 16295885U JP S6273533 U JPS6273533 U JP S6273533U
- Authority
- JP
- Japan
- Prior art keywords
- processing object
- recrystallization
- substrate
- main body
- heating means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001953 recrystallisation Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
Description
第１図は本考案の被処理体再結晶化装置の一部
破断して示す要部斜視図、第２図は上記被処理体
再結晶化装置の被処理体移動方向と垂直な面を断
面とする断面図、第３図は上記被処理体再結晶化
装置の被処理体移動方向を含む面を断面とする断
面図、第４図は上記被処理体再結晶化装置の模式
平面図、第５図は上記被処理体再結晶化装置の全
体を示す平面図、第６図は従来の被処理体再結晶
化装置の斜視図である。
１……装置本体、２……ボード、３……基板、
４……移動体、５……ロツド（移動手段）、６…
…上部ヒーター（加熱手段）、７……下部ヒータ
ー（加熱手段）。
FIG. 1 is a partially cutaway perspective view of the main parts of the object recrystallization apparatus of the present invention, and FIG. 2 is a cross-sectional view of the object recrystallization apparatus perpendicular to the direction of movement of the object to be processed. FIG. 3 is a cross-sectional view of the object recrystallization device taken along a plane including the direction of movement of the object to be processed; FIG. 4 is a schematic plan view of the object recrystallization device; FIG. 5 is a plan view showing the entire apparatus for recrystallizing an object to be processed, and FIG. 6 is a perspective view of a conventional apparatus for recrystallizing an object to be processed. 1...Device body, 2...Board, 3...Substrate,
4... Mobile object, 5... Rod (transportation means), 6...
... Upper heater (heating means), 7... Lower heater (heating means).
Claims (1)
溶融して再結晶化させる被処理再結晶化装置にお
いて、 ボード上に移動台を介して載置した上記被処理
体を有する基板を移動手段により装置本体に対し
て移動させ、該装置本体に対して固定された加熱
手段によつて上記被処理体を加熱する被処理体再
結晶化装置。[Claims for Utility Model Registration] In a processing object recrystallization device that recrystallizes a processing object formed on a substrate by heating and melting it using heating means, the processing object is placed on the board via a moving table. A processing object recrystallization apparatus in which a substrate having a processing object is moved relative to an apparatus main body by a moving means, and the processing object is heated by a heating means fixed to the apparatus main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16295885U JPS6273533U (en) | 1985-10-25 | 1985-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16295885U JPS6273533U (en) | 1985-10-25 | 1985-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6273533U true JPS6273533U (en) | 1987-05-11 |
Family
ID=31090712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16295885U Pending JPS6273533U (en) | 1985-10-25 | 1985-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273533U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58140114A (en) * | 1982-02-16 | 1983-08-19 | Nippon Telegr & Teleph Corp <Ntt> | Device of crystallization |
-
1985
- 1985-10-25 JP JP16295885U patent/JPS6273533U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58140114A (en) * | 1982-02-16 | 1983-08-19 | Nippon Telegr & Teleph Corp <Ntt> | Device of crystallization |