JPS6281005U - - Google Patents
Info
- Publication number
- JPS6281005U JPS6281005U JP17208885U JP17208885U JPS6281005U JP S6281005 U JPS6281005 U JP S6281005U JP 17208885 U JP17208885 U JP 17208885U JP 17208885 U JP17208885 U JP 17208885U JP S6281005 U JPS6281005 U JP S6281005U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- inclination
- moving table
- interferometer
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
図面は本考案の一実施例を示すもので、第１図
は概略的平面図、第２図は同じく概略的側面図、
第３図は説明図である。
１……移動テーブル（ステージ）、６……被載
置体（描画基板）、１０……位置測定装置、１１
……位置検出系、１３……レーザ発振器、１４…
…位置検出用レーザミラー、１８ａ，１８ｂ……
干渉計、１９ａ，１９ｂ……レーザレシーバ、ａ
……電子ビーム、ｂ０〜ｂ２……レーザビーム。
The drawings show one embodiment of the present invention, in which FIG. 1 is a schematic plan view, FIG. 2 is a schematic side view,
FIG. 3 is an explanatory diagram. DESCRIPTION OF SYMBOLS 1...Moving table (stage), 6... Mounting object (drawing board), 10... Position measuring device, 11
...Position detection system, 13...Laser oscillator, 14...
...Laser mirror for position detection, 18a, 18b...
Interferometer, 19a, 19b...Laser receiver, a
...Electron beam, b 0 -b 2 ...Laser beam.
Claims (1)
なるレーザミラーを取付けるとともに、このレー
ザミラーに干渉計を通過したレーザを導いて反射
させて、その反射レーザを上記干渉計を介してレ
ーザレシーバに導き、レーザ干渉により移動テー
ブルの位置測定を行なうようにした移動テーブル
の位置測定装置であつて、上記干渉計を２台上記
移動テーブルのテーブル面と垂直な方向にずらし
た状態でかつ上記テーブル面より低い位置に配置
して移動テーブルの傾きΘを測定し、この移動テ
ーブルの傾きΘおよび上記被載置体上の被加工面
と一方のレーザ光軸との距離Ｈによりテーブルの
傾きによる加工誤差を補正可能な構成としたこと
を特徴とする移動テーブルの位置測定装置。 A reference laser mirror is attached to the moving table on which the object to be placed is set, and the laser that has passed through the interferometer is guided and reflected by this laser mirror, and the reflected laser is sent to the laser receiver via the interferometer. A movable table position measuring device configured to measure the position of a movable table by guiding and laser interference, the two interferometers being shifted in a direction perpendicular to the table surface of the movable table; The inclination Θ of the moving table is measured by placing it at a lower position, and the machining error due to the inclination of the table is determined by the inclination Θ of the moving table and the distance H between the surface to be processed on the above-mentioned object and one laser optical axis. A position measuring device for a moving table, characterized in that it has a configuration capable of correcting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17208885U JPS6281005U (en) | 1985-11-08 | 1985-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17208885U JPS6281005U (en) | 1985-11-08 | 1985-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6281005U true JPS6281005U (en) | 1987-05-23 |
Family
ID=31108313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17208885U Pending JPS6281005U (en) | 1985-11-08 | 1985-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6281005U (en) |
-
1985
- 1985-11-08 JP JP17208885U patent/JPS6281005U/ja active Pending
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