JPS6282732U - - Google Patents
Info
- Publication number
- JPS6282732U JPS6282732U JP1985174471U JP17447185U JPS6282732U JP S6282732 U JPS6282732 U JP S6282732U JP 1985174471 U JP1985174471 U JP 1985174471U JP 17447185 U JP17447185 U JP 17447185U JP S6282732 U JPS6282732 U JP S6282732U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrode body
- sub
- main electrode
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985174471U JPS6282732U (cs) | 1985-11-13 | 1985-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985174471U JPS6282732U (cs) | 1985-11-13 | 1985-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6282732U true JPS6282732U (cs) | 1987-05-27 |
Family
ID=31112880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985174471U Pending JPS6282732U (cs) | 1985-11-13 | 1985-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6282732U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59101836A (ja) * | 1982-12-03 | 1984-06-12 | Hitachi Ltd | 容量結合器 |
-
1985
- 1985-11-13 JP JP1985174471U patent/JPS6282732U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59101836A (ja) * | 1982-12-03 | 1984-06-12 | Hitachi Ltd | 容量結合器 |