JPS6283622A - Thermal air flow meter and heat sensitive resistor - Google Patents
Thermal air flow meter and heat sensitive resistorInfo
- Publication number
- JPS6283622A JPS6283622A JP60223580A JP22358085A JPS6283622A JP S6283622 A JPS6283622 A JP S6283622A JP 60223580 A JP60223580 A JP 60223580A JP 22358085 A JP22358085 A JP 22358085A JP S6283622 A JPS6283622 A JP S6283622A
- Authority
- JP
- Japan
- Prior art keywords
- air flow
- flow meter
- heat
- resistor
- heating resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Aviation & Aerospace Engineering (AREA)
- Ceramic Engineering (AREA)
- Electromagnetism (AREA)
- Measuring Volume Flow (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、感熱式空気流量計に関し、特に内燃機関の吸
入空気社を検出する感熱式空気流量計に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a thermal air flow meter, and more particularly to a thermal air flow meter for detecting intake air of an internal combustion engine.
従来のボビン式の感熱式空気流量計は、特開昭５！］−
３１４１２号記載のように、発熱抵抗体である白金ワイ
ヤをセラミック等のボビンに巻回して構成していたため
、ボビン自体を加熱する熱およびボビンを伝わって支持
体に伝わる熱量が無視できず、特に空気流量の変動に対
し過渡応答が遅れるため、自動車の急加速、減速時にサ
ージングが発生するといった欠点があった。The conventional bobbin type heat-sensitive air flow meter was published in 1977! ]−
As described in No. 31412, a platinum wire serving as a heating resistor was wound around a bobbin made of ceramic or the like, so the heat that heats the bobbin itself and the amount of heat that is transmitted to the support through the bobbin cannot be ignored. Since the transient response to fluctuations in air flow rate is delayed, there is a drawback that surging occurs when a car suddenly accelerates or decelerates.
一方、特開昭５５−５７１１号公報に記さ才りるように
、金属ワイヤ単線を空気通路中にはりめぐらせる方法も
あるが、耐脈動性、耐パックファイヤ性に優れるバイパ
ス式を採用する場合、ワイヤの長さが短かいため抵抗値
が小さく、特性ばらつきが大きくなる欠点があった。On the other hand, as described in Japanese Unexamined Patent Publication No. 55-5711, there is a method in which a single metal wire is wound around the air passage, but when adopting the bypass type, which has excellent pulsation resistance and pack fire resistance, Since the length of the wire is short, the resistance value is low and the characteristics have a large variation.
本発明の目的は空気流敏変化時の応答性を向にＬ７た感
熱式空気流量計を提供することにある６〔発明の概要〕
本発明は発熱抵抗体の金属ワイヤをコイル状に巻回し、
その表面がガラスコーティングして機械的強度および耐
食性を増すようにしたもので、金属ワイヤに発生したジ
ュール熱を空気に熱伝達させ、支持体に逃げる熱伝導量
を極めて小さくするようにしたものである。An object of the present invention is to provide a heat-sensitive air flow meter that improves responsiveness when the air flow sensitivity changes. ,
Its surface is coated with glass to increase mechanical strength and corrosion resistance, and the Joule heat generated in the metal wire is transferred to the air, minimizing the amount of heat conduction that escapes to the support. be.
［発明の実施例〕
以■く図示する実施例に基づき本発明の詳細な説明する
。[Embodiments of the Invention] The present invention will now be described in detail based on the illustrated embodiments.
第１図は発熱抵抗体の構造図である。吸入空気敗を検出
する発熱抵抗体１は白金線２を巻回し、長さ５１程度で
その両端を支持部材３に溶接する。FIG. 1 is a structural diagram of a heating resistor. A heating resistor 1 for detecting intake air failure is wound with a platinum wire 2 and has a length of about 51 mm, and both ends of the wire are welded to a support member 3.
この時、白金線２の表面ば耐食性および機械的強度の点
からガラス材４をコーティングし、かつ、該発熱抵抗体
１の両端は溶接性を考慮して重ね巻きを施している。At this time, the surface of the platinum wire 2 is coated with a glass material 4 from the viewpoint of corrosion resistance and mechanical strength, and both ends of the heating resistor 1 are wrapped in layers in consideration of weldability.
次に該発熱抵抗体１の製造方法の一例を第２図に基づき
説明する。Next, an example of a method for manufacturing the heating resistor 1 will be explained based on FIG. 2.
第２図（ａ）は、白金ワイヤを巻回する際のφ０．５の
ＭＯ芯線】８である。（ｂ）は前記Ｍ−。FIG. 2(a) shows an MO core wire of φ0.5 when winding a platinum wire. (b) is the above M-.
芯線１８に巻線機によりφ２０μｍの白金線２を複数個
連続に巻いた状態を示す９ （Ｃ）はそれを切断した状
態を示す。（ｄ）は更にガラス材４をオーバコートし焼
成した状態を示す。（ｅ）は更に硝酸、硫酸の混酸によ
りＭｏ芯線１８を除去した状態を示す。9 (C) shows a state in which a plurality of platinum wires 2 having a diameter of 20 μm are continuously wound around the core wire 18 using a winding machine, and shows a state in which they are cut. (d) shows a state in which a glass material 4 is further overcoated and fired. (e) shows a state in which the Mo core wire 18 has been further removed with a mixed acid of nitric acid and sulfuric acid.
この様な構造の発熱抵抗体】−および空気温度Ｈ１’１
定抵抗体５は第３図に示するように吸入空気の大部分を
通るメイン通路１０】および吸入空気の一部が分流する
バイパス通路１０２＆有してなるボディ１０３のバイパ
ス通路１０２中に配設される。Heat generating resistor with such structure】- and air temperature H1'1
As shown in FIG. 3, the constant resistance element 5 is disposed in a bypass passage 102 of a body 103 comprising a main passage 10 through which most of the intake air passes and a bypass passage 102 through which a portion of the intake air is divided. be done.
第４図は感熱時流量計の駆動回路１８を示すが。FIG. 4 shows the drive circuit 18 of the thermal flow meter.
上記した発熱抵抗体１、空気温度測定抵抗体５、オペア
ンプ６．７．パワートランジスタ８、コンデンサ９、抵
抗１０〜１４で構成されておりパワートランジスタ８の
コレクタ端子１５にはバッテリー（＋）極が、抵抗１０
のアース端子】６にはバッテリーの（−）極が、抵抗１
ｏと発熱抵抗体１の接続点１７には、本感熱式空気流量
計の出力４３号を使ってエンジン制御を行うマイクロコ
ンピュータの入力端子を接続される。The above-described heating resistor 1, air temperature measuring resistor 5, operational amplifier 6.7. It consists of a power transistor 8, a capacitor 9, and resistors 10 to 14. The battery (+) pole is connected to the collector terminal 15 of the power transistor 8, and the resistor 10
6 is the (-) terminal of the battery, and resistor 1 is the (-) terminal of the battery.
The connection point 17 between o and the heating resistor 1 is connected to the input terminal of a microcomputer that controls the engine using output No. 43 of the thermal air flowmeter.
この様な構成においてパワートランジスタ８によって発
熱抵抗体１にｉ！流を供給して加熱し、空気温度測定抵
抗体５より常に一定温度だけ高くなるように制御する。In such a configuration, i! is applied to the heating resistor 1 by the power transistor 8. A flow is supplied to heat the air, and the air temperature is controlled so that the temperature is always higher than the air temperature measuring resistor 5 by a certain amount.
この時、空気温度１１１１１定抵抗体は発熱が無視でき
る程度の微小電流しか流さず、吸入空気温度を検出する
様にして吸入空気の温度補正用として使用している。こ
こで空気流が発熱抵抗体１に当ると、前記駆動回路の動
作によって重連のごとく発熱抵抗体】と空気温度測定抵
抗体５の温度差が常に一定になるように制御されるがこ
のｅＪ＋作は、発熱抵抗体１の両端の電圧差を抵抗１１
．１２で分割した電圧と、発熱程抗体１を流れた電流に
よって生じる抵抗１０の電圧降下をオペアンプ７で増［
１１シた電圧とが常に等しくなるように帰還をかけてい
る。従って、空気流量が変化すると発熱抵抗体ｌを流れ
る電流が変化し、そのｉｔ流に応じた抵、抗１０の電圧
降下で空気流量が測定可能となる。At this time, the air temperature constant resistor 11111 allows only a very small current to flow through which heat generation is negligible, and is used to correct the temperature of the intake air by detecting the intake air temperature. When the air flow hits the heat generating resistor 1, the drive circuit operates to control the temperature difference between the heat generating resistor and the air temperature measuring resistor 5 to always be constant, as if in a series of chains, but this eJ+ In this work, the voltage difference between both ends of the heating resistor 1 is connected to the resistor 11.
．． The operational amplifier 7 increases the voltage drop across the resistor 10 caused by the voltage divided by 12 and the current flowing through the antibody 1 during heating.
Feedback is applied so that the 11 voltages are always equal. Therefore, when the air flow rate changes, the current flowing through the heating resistor l changes, and the air flow rate can be measured by the voltage drop across the resistor 10 in accordance with the current.
以上の構成により１発熱抵抗体１の白金線２に発生する
熱は支持部材３を伝わって逃げる量は少なく、はとんど
が空気に奪われるため、従来のボビン式のようにボビン
を加熱したりまたボビンを伝わって逃げる熱量が大巾に
軽減できるため、例えば空気流量が急変した場合の過渡
応答が大巾に向［−される。Due to the above configuration, the amount of heat generated in the platinum wire 2 of the heating resistor 1 is transmitted through the support member 3 and is absorbed by the air, so that the bobbin is heated as in the conventional bobbin type. Also, since the amount of heat escaping through the bobbin can be greatly reduced, the transient response when the air flow rate suddenly changes, for example, is greatly reduced.
第５図は本感熱式空気流量計の応答特性を示す。Figure 5 shows the response characteristics of this thermal air flow meter.
試験方法はリニツクテストスタンドを用い、空気流量を
例えば低流量約２０ｋｇ／ｈから高流量約２００ｋｇ／
ｈに切換えた時の感熱式空気流量計の出力電圧を流量に
換算したもので、従来のボビンタイプに比べ最終値到達
時間が大巾に向上されていることがわかる。The test method uses a Rinnik test stand and changes the air flow rate from a low flow rate of about 20 kg/h to a high flow rate of about 200 kg/h.
The output voltage of the thermal air flow meter when switched to h is converted into a flow rate, and it can be seen that the time to reach the final value is greatly improved compared to the conventional bobbin type.
このため自８！ｌＩ＊の急加速、減光時においても、真
の空気量変化に追従して熱線式流量計が信号を出せるた
め、適切なインジェクタの噴射量を決定でき、サージン
グ等の問題は解消できる。Because of this, I am 8! Even during rapid acceleration or dimming of lI*, the hot-wire flowmeter outputs a signal following the true change in air volume, so an appropriate injection amount can be determined and problems such as surging can be resolved.
また、発熱抵抗体の構造がｍ純なため生産性も向−Ｌで
き安価な感熱式流量計を提供できる。Further, since the structure of the heating resistor is pure, productivity can be improved and an inexpensive thermal flow meter can be provided.
また、白金線の端部を重ね巻きし、かつ表面をガラスコ
ートしているため１食性９機械的強度も優れた感熱式流
量計を提供できる。尚１本実施例では金属ワイヤとして
白金線について説明したが例えばタングステン線でも同
様の効果が期待できる。Furthermore, since the ends of the platinum wire are wrapped in layers and the surface is coated with glass, it is possible to provide a heat-sensitive flowmeter that is monolithic and has excellent mechanical strength. In this embodiment, a platinum wire was used as the metal wire, but a similar effect can be expected with a tungsten wire, for example.
本発明によれば、応答性の向上を図れる。 According to the present invention, responsiveness can be improved.
第１図は本発明の−・実施例の発熱抵抗体の構造図、第
２図は発熱抵抗体の製造工程図、第３図は感熱式空気流
量計の断面図、第４図は駆動回路、第５図は応答性図で
ある。
■・・発熱抵抗体、１８・・駆動回路、２ ・金属ワイ
ヤ、４・・ガラス、３・・・支持部材。Fig. 1 is a structural diagram of a heating resistor according to an embodiment of the present invention, Fig. 2 is a manufacturing process diagram of the heating resistor, Fig. 3 is a sectional view of a thermal air flowmeter, and Fig. 4 is a drive circuit. , FIG. 5 is a responsiveness diagram. ■... Heat generating resistor, 18... Drive circuit, 2 - Metal wire, 4... Glass, 3... Support member.
Claims (3)
抗体と、発熱抵抗体の電流を制御するとともに、該発熱
抵抗体の出力電圧を空気流量に対応した信号として取出
す駆動回路部とを有してなる感熱式空気流量計において
、前記発熱抵抗体をコイル状に巻回した金属ワイヤによ
り構成したことを特徴とする感熱式空気流量計。1. It has a heat generating resistor installed in the air passage for measuring the air flow rate, and a drive circuit unit that controls the current of the heat generating resistor and takes out the output voltage of the heat generating resistor as a signal corresponding to the air flow rate. 1. A thermal air flow meter comprising: a heat-sensitive air flow meter, characterized in that the heating resistor is constructed from a metal wire wound into a coil shape.
いて、前記発熱抵抗体を形成するコイル状の金属ワイヤ
の表面を無機質のガラス等でコーテイングしたことを特
徴とする感熱式空気流量計。2. The heat-sensitive air flow meter according to claim 1, wherein the surface of the coiled metal wire forming the heating resistor is coated with inorganic glass or the like.
いて、前記発熱抵抗体のコイル状の金属ワイヤの端部を
重ね巻きとし、該重ね巻き部を支持部材に溶接したこと
を特徴とする感熱式空気流量計。3. The heat-sensitive air flow meter according to claim 2, characterized in that the end portion of the coiled metal wire of the heating resistor is wound in an overlapping manner, and the overlapping portion is welded to a support member. type air flow meter.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60223580A JPH0680408B2 (en) | 1985-10-09 | 1985-10-09 | Heat-sensitive air flow meter and heat-sensitive resistor |
| US06/913,379 US4790182A (en) | 1985-10-09 | 1986-09-30 | Hot wire air flow meter |
| KR1019860008344A KR910000360B1 (en) | 1985-10-09 | 1986-10-06 | Thermal air flow meter |
| DE8686113872T DE3668695D1 (en) | 1985-10-09 | 1986-10-07 | HEATED WIRE ANEMOMETER FOR AIR FLOWS. |
| EP86113872A EP0218232B1 (en) | 1985-10-09 | 1986-10-07 | Hot wire air flow meter |
| CA000520139A CA1291883C (en) | 1985-10-09 | 1986-10-08 | Hot wire air flow meter |
| CN86107072A CN1012754B (en) | 1985-10-09 | 1986-10-08 | Hot Wire Air Flow Meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60223580A JPH0680408B2 (en) | 1985-10-09 | 1985-10-09 | Heat-sensitive air flow meter and heat-sensitive resistor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6283622A true JPS6283622A (en) | 1987-04-17 |
| JPH0680408B2 JPH0680408B2 (en) | 1994-10-12 |
Family
ID=16800392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60223580A Expired - Lifetime JPH0680408B2 (en) | 1985-10-09 | 1985-10-09 | Heat-sensitive air flow meter and heat-sensitive resistor |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4790182A (en) |
| EP (1) | EP0218232B1 (en) |
| JP (1) | JPH0680408B2 (en) |
| KR (1) | KR910000360B1 (en) |
| CN (1) | CN1012754B (en) |
| CA (1) | CA1291883C (en) |
| DE (1) | DE3668695D1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114126A (en) * | 1988-10-25 | 1990-04-26 | Hitachi Ltd | Hot-wire protection of hot-wire air flowmeter and heating resistor therefor |
| US5020214A (en) * | 1987-09-30 | 1991-06-04 | Hitachi, Ltd. | Method of manufacturing a hot wire air flow meter |
| JP2008107146A (en) * | 2006-10-24 | 2008-05-08 | Horiba Stec Co Ltd | Thermal mass flow sensor and mass flow controller |
| US20110035959A1 (en) * | 2009-08-13 | 2011-02-17 | Maguire Products, Inc. | Gas flow rate determination method and apparatus and granular material dryer and method for control thereof |
| US10539366B2 (en) | 2014-04-30 | 2020-01-21 | Stephen B. Maguire | Method and apparatus for vacuum drying granular resin material |
| US11203133B2 (en) | 2018-04-04 | 2021-12-21 | Novatec, Inc. | Method and apparatus for polymer drying using inert gas |
| US11364657B2 (en) | 2018-04-04 | 2022-06-21 | Novatec, Inc. | Reducing moisture in granular resin material using inert gas |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| JPH0682056B2 (en) * | 1987-07-13 | 1994-10-19 | 株式会社日立製作所 | Resistance element for flow meter |
| JPS6488218A (en) * | 1987-09-30 | 1989-04-03 | Hitachi Ltd | Heat ray type air flowmeter |
| DE4004552C2 (en) * | 1989-02-14 | 1994-07-07 | Mitsubishi Electric Corp | Signal processing method for a thermal flow sensor |
| US5181008A (en) * | 1990-10-15 | 1993-01-19 | Martin Kevin B | Diamond encapsulated resistance temperature detector |
| JP2846518B2 (en) * | 1992-03-18 | 1999-01-13 | 株式会社日立製作所 | Air flow detector and engine control device using the same |
| US5544079A (en) * | 1994-07-15 | 1996-08-06 | Hitachi America, Ltd. | Smart mass gas flow sensor |
| US6062077A (en) * | 1997-10-17 | 2000-05-16 | Azima; Faramarz | Techniques for making and using a sensing assembly for a mass flow controller |
| DE102005001809A1 (en) * | 2005-01-13 | 2006-07-27 | Endress + Hauser Flowtec Ag | Method for controlling a thermal or calorimetric flowmeter |
| WO2018047385A1 (en) * | 2016-09-08 | 2018-03-15 | 株式会社村田製作所 | Wind-speed measurement device and wind-volume measurement device |
| IT201700112681A1 (en) * | 2017-10-06 | 2019-04-06 | Eltek Spa | HYDRAULIC CONTROL DEVICE FOR LIQUID CONDUCTOR EQUIPMENT AND SYSTEMS |
| CN111765935A (en) * | 2020-08-17 | 2020-10-13 | 山东普为电子科技有限公司 | Small Thermal Gas Mass Flow Meter |
| CN113390604B (en) * | 2021-07-16 | 2023-03-03 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | One-dimensional hot wire probe suitable for high-speed flow field measurement |
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- 1986-09-30 US US06/913,379 patent/US4790182A/en not_active Expired - Lifetime
- 1986-10-06 KR KR1019860008344A patent/KR910000360B1/en not_active Expired
- 1986-10-07 DE DE8686113872T patent/DE3668695D1/en not_active Expired - Lifetime
- 1986-10-07 EP EP86113872A patent/EP0218232B1/en not_active Expired - Lifetime
- 1986-10-08 CN CN86107072A patent/CN1012754B/en not_active Expired
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5020214A (en) * | 1987-09-30 | 1991-06-04 | Hitachi, Ltd. | Method of manufacturing a hot wire air flow meter |
| JPH02114126A (en) * | 1988-10-25 | 1990-04-26 | Hitachi Ltd | Hot-wire protection of hot-wire air flowmeter and heating resistor therefor |
| JP2008107146A (en) * | 2006-10-24 | 2008-05-08 | Horiba Stec Co Ltd | Thermal mass flow sensor and mass flow controller |
| US20110035959A1 (en) * | 2009-08-13 | 2011-02-17 | Maguire Products, Inc. | Gas flow rate determination method and apparatus and granular material dryer and method for control thereof |
| US8141270B2 (en) * | 2009-08-13 | 2012-03-27 | Maguire Products, Inc. | Gas flow rate determination method and apparatus and granular material dryer and method for control thereof |
| US10539366B2 (en) | 2014-04-30 | 2020-01-21 | Stephen B. Maguire | Method and apparatus for vacuum drying granular resin material |
| US11203133B2 (en) | 2018-04-04 | 2021-12-21 | Novatec, Inc. | Method and apparatus for polymer drying using inert gas |
| US11364657B2 (en) | 2018-04-04 | 2022-06-21 | Novatec, Inc. | Reducing moisture in granular resin material using inert gas |
Also Published As
| Publication number | Publication date |
|---|---|
| KR870004309A (en) | 1987-05-08 |
| CN1012754B (en) | 1991-06-05 |
| JPH0680408B2 (en) | 1994-10-12 |
| EP0218232A1 (en) | 1987-04-15 |
| US4790182A (en) | 1988-12-13 |
| DE3668695D1 (en) | 1990-03-08 |
| EP0218232B1 (en) | 1990-01-31 |
| KR910000360B1 (en) | 1991-01-24 |
| CA1291883C (en) | 1991-11-12 |
| CN86107072A (en) | 1987-04-29 |
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