JPH0441932B2 - - Google Patents
Info
- Publication number
- JPH0441932B2 JPH0441932B2 JP60178522A JP17852285A JPH0441932B2 JP H0441932 B2 JPH0441932 B2 JP H0441932B2 JP 60178522 A JP60178522 A JP 60178522A JP 17852285 A JP17852285 A JP 17852285A JP H0441932 B2 JPH0441932 B2 JP H0441932B2
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- temperature
- holding member
- membrane
- air flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 6
- 230000017525 heat dissipation Effects 0.000 claims description 2
- 239000012528 membrane Substances 0.000 description 20
- 230000001419 dependent effect Effects 0.000 description 17
- 238000002485 combustion reaction Methods 0.000 description 7
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は膜式抵抗を有する直熱形流量センサ、
たとえば内燃機関の吸入空気量を検出するための
空気流量センサに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a direct heating type flow sensor having a membrane resistor,
For example, the present invention relates to an air flow sensor for detecting the intake air amount of an internal combustion engine.
一般に、電子制御式内燃機関においては、基本
燃料噴射量、基本点火時期等の制御のために機関
の吸入空気量は重要な運転状態パラメータの１つ
である。従来、このような吸入空気量を検出する
ための空気流量センサ（エアフローメータとも言
う）はベーン式のものが主流であつたが、最近、
小型、応答性が良い等の利点を有する温度依存抵
抗を用いた熱式のものが実用化されている。
Generally, in an electronically controlled internal combustion engine, the intake air amount of the engine is one of the important operating state parameters for controlling the basic fuel injection amount, basic ignition timing, and the like. Conventionally, vane-type air flow sensors (also called air flow meters) have been the mainstream for detecting the amount of intake air, but recently,
A thermal type using a temperature-dependent resistor has been put into practical use, and has advantages such as small size and good response.
さらに、温度依存抵抗を有する空気流量センサ
としては、傍熱型と直熱型とがある。たとえば、
傍熱型の空気流量センサは、機関の吸気通路に設
けられた発熱抵抗、およびその上流、下流側に設
けられた２つの温度依存抵抗を備えている。この
場合、上流側の温度依存抵抗は発熱抵抗による加
熱前の空気流の温度を検出するものであり、つま
り、外気温度補償用であり、また、下流側の温度
依存抵抗は加熱抵抗によつて加熱された空気流の
温度を検出する。これにより、下流側の温度依存
抵抗と上流側の温度依存抵抗との温度差が一定に
なるように発熱抵抗の電流値をフイードバツク制
御し、発熱抵抗に印加される電圧により空気流量
（質量）を検出するものである。なお、上流側の
外気温度補償用温度依存抵抗を削除し、下流側の
温度依存抵抗の温度が一定になるように発熱抵抗
を制御すると、体積容量としての空気流量が検出
できる（参照：特公昭54−9662号公報）。他方、
傍熱型に比べて応答速度が早い直熱型の空気流量
センサは、機関の吸気通路に設けられた温度検出
兼用の発熱抵抗、およびその上流側に設けられた
温度依存抵抗を備えている。この場合、傍熱型と
同様に、上流側の温度依存抵抗は発熱抵抗による
加熱前の空気流の温度を検出するものであり、つ
まり、外気温度補償用である。これにより、発熱
抵抗とその上流側の温度依存抵抗との温度差が一
定になるように発熱抵抗の電流値をフイードバツ
ク制御し、発熱抵抗に印刷される電圧により空気
流量（質量）を検出するものである。なお、この
場合にも、外気温度補償用温度依存抵抗を削除
し、発熱抵抗の温度が一定になるように発熱抵抗
を制御すると、体積容量としての空気流量が検出
できる。 Furthermore, there are two types of air flow rate sensors having temperature-dependent resistance: indirect heating type and direct heating type. for example,
The indirectly heated air flow sensor includes a heat generating resistor provided in the intake passage of the engine, and two temperature dependent resistors provided upstream and downstream thereof. In this case, the temperature-dependent resistance on the upstream side detects the temperature of the air flow before heating by the heating resistor, that is, it is for outdoor temperature compensation, and the temperature-dependent resistance on the downstream side detects the temperature of the air flow before heating by the heating resistor. Detects the temperature of the heated air stream. As a result, the current value of the heating resistor is feedback-controlled so that the temperature difference between the temperature-dependent resistance on the downstream side and the temperature-dependent resistance on the upstream side is constant, and the air flow rate (mass) is controlled by the voltage applied to the heating resistor. It is something to detect. Note that if you delete the temperature-dependent resistance for outdoor temperature compensation on the upstream side and control the heating resistor so that the temperature of the temperature-dependent resistance on the downstream side remains constant, the air flow rate as a volumetric capacity can be detected (reference: 54-9662). On the other hand,
A directly heated air flow sensor, which has a faster response speed than an indirectly heated type, includes a heat generating resistor that is provided in the intake passage of the engine and also serves as temperature detection, and a temperature dependent resistor that is provided upstream of the heat generating resistor. In this case, similarly to the indirect heating type, the upstream temperature-dependent resistance detects the temperature of the air flow before being heated by the heating resistor, that is, it is used to compensate for the outside air temperature. This allows feedback control of the current value of the heating resistor so that the temperature difference between the heating resistor and the temperature-dependent resistor upstream thereof is constant, and the air flow rate (mass) is detected by the voltage printed on the heating resistor. It is. In this case as well, if the temperature-dependent resistance for compensating the outside air temperature is deleted and the heating resistor is controlled so that the temperature of the heating resistor is constant, the air flow rate as a volumetric capacity can be detected.
通常、発熱抵抗（膜式抵抗）の発熱温度と吸入
空気温度との差を一定値にするあるいは膜式抵抗
の発熱温度を一定にする空気流量センサの応答
性、ダイナミツクレンジは膜式抵抗を含む発熱部
兼温度検知部の熱容量（ヒートマス）と断熱効果
の程度で決定される。すなわち、最も応答性がよ
く、且つダイナミツクレンジを最も大きくするた
めには、膜式抵抗を含む発熱部兼温度検知部の質
量をできる限り小さくし、また、その部分を理想
的には完全に空気流中に浮かんだ状態にすること
である。 Normally, the responsiveness of an air flow sensor that keeps the difference between the heat generation temperature of a heat generation resistor (film type resistor) and the intake air temperature constant, or the heat generation temperature of a membrane type resistor, and the dynamic range uses a membrane type resistor. It is determined by the heat capacity (heat mass) of the heat generating part/temperature sensing part and the degree of insulation effect. In other words, in order to achieve the best response and the largest dynamic range, the mass of the heat generating part and temperature sensing part including the film resistor should be made as small as possible, and ideally that part should be completely removed. The idea is to make it float in the airflow.
このため、本願出願人は、膜式抵抗が形成され
た基板を断熱部材を介して保持部材に支持すると
共に、基板と保持部材（正確にはその配線）との
電気的接続をボンデイングワイヤにより行うこと
を既に提案している（参照：特願昭60−25232
号）。 For this reason, the applicant of this application supports the substrate on which the film resistor is formed on a holding member via a heat insulating member, and electrically connects the substrate and the holding member (more precisely, its wiring) with a bonding wire. (Reference: Japanese patent application No. 60-25232)
issue).
しかしながら、ワイヤボンデイング方法による
電気的接続は、流体の流れ、振動、あるいは内燃
機関であればバツクフアイヤ等の苛酷な環境条件
下で、断熱し易く、この結果、信頼性が低下する
という問題点がある。
However, electrical connections made using wire bonding methods tend to be insulated under harsh environmental conditions such as fluid flow, vibration, or backup fire in the case of internal combustion engines, resulting in reduced reliability. .
〔問題点を解決するための手段〕
本発明の目的は信頼線の高い流量センサを提供
することにあり、その手段は、断熱部材に導電層
を形成して基板と保持部材（もしくはその配線）
とを電気的に接続するようにしたことである。[Means for Solving the Problems] An object of the present invention is to provide a flow rate sensor with a high reliability line, and its means include forming a conductive layer on a heat insulating member and connecting the substrate and the holding member (or its wiring).
This is to electrically connect the two.
上述の手段によれば、基板からの電気取出し構
造が強固であるので、流体の流れ、振動、バツク
フアイヤ等による断線は起こりにくい。
According to the above-mentioned means, since the structure for extracting electricity from the board is strong, disconnection due to fluid flow, vibration, backup fire, etc. is unlikely to occur.
以下、図面により本発明の実施例を説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第４図は本発明に係る膜式抵抗を有する直熱型
流量センサが適用された内燃機関を示す全体概要
図、第５図、第６図は第４図のセンサ部分の拡大
縦断図および横断図である。第４図〜第６図にお
いて、内燃機関１の吸気通路２にはエアクリーナ
３および整流格子４を介して空気が吸入される。
この吸気通路２内に計測管（ダクト）５が設けら
れ、その内部に空気流量を計測するための発熱ヒ
ータ兼用温度依存抵抗（膜式抵抗）６が設けられ
ている。膜式抵抗６はその両端を放熱性の優れた
保持部材７によつてダクト５に保持される。ま
た、膜式抵抗６は電気的にリード線１０ａ，１０
ｂに接続され、ステイ８の外側に設けられた外気
温度補償を行う温度依存抵抗９と共に、ハイブリ
ツド基板に形成されたセンサ回路１１に接続され
ている。 FIG. 4 is an overall schematic diagram showing an internal combustion engine to which a directly heated flow rate sensor having a membrane resistor according to the present invention is applied, and FIGS. 5 and 6 are enlarged longitudinal and cross-sectional views of the sensor portion of FIG. 4. It is a diagram. 4 to 6, air is taken into an intake passage 2 of an internal combustion engine 1 via an air cleaner 3 and a rectifying grid 4. In FIGS.
A measurement pipe (duct) 5 is provided within the intake passage 2, and a temperature dependent resistor (film type resistor) 6 which also functions as a heat generating heater is provided inside the measurement pipe (duct) 5 for measuring the air flow rate. The membrane resistor 6 is held at both ends in the duct 5 by holding members 7 having excellent heat dissipation properties. Further, the membrane resistor 6 is electrically connected to the lead wires 10a, 10.
b, and is connected to a sensor circuit 11 formed on a hybrid board together with a temperature-dependent resistor 9 provided outside the stay 8 for compensating for outside air temperature.
センサ回路１１は外気温度に対して膜式抵抗６
の温度が一定になるように該抵抗６の発熱量をフ
イードバツク制御し、そのセンサ出力VQを制御
回路１２に供給する。制御回路１２はたとえばマ
イクロコンピユータによつて構成され、燃料噴射
弁１３の制御等を行うものである。 The sensor circuit 11 has a membrane resistor 6 with respect to the outside temperature.
The amount of heat generated by the resistor 6 is feedback-controlled so that the temperature of the resistor 6 is constant, and the sensor output VQ is supplied to the control circuit 12. The control circuit 12 is composed of, for example, a microcomputer, and controls the fuel injection valve 13 and the like.
膜式抵抗６は、第７図に示すように、たとえば
シリコン単結晶基板６１上に絶縁層（SiO2，Si3
N4等、図示せず）を形成し、次いで、蒸着（も
しくはスパツタリング）されおよびエツチングに
よりパターニングされた白金（Pt）パターン層
６２を形成してある。そのうち、点線枠内で示す
部分６２ａが発熱手段として作用する。そして、
その上にパツシベーシヨン膜（SiO2，Si3N4等、
図示せず）を形成し、電極取出し口P1，P2用の
コンタクト部を形成してある。 As shown in FIG. 7, the film resistor 6 includes, for example, an insulating layer (SiO 2 , Si 3
A platinum (Pt) patterned layer 62 is formed by depositing (or sputtering) and patterning by etching. Of these, a portion 62a shown within the dotted line frame acts as a heat generating means. and,
A passivation film (SiO 2 , Si 3 N 4 , etc.,
(not shown), and contact portions for electrode outlet ports P 1 and P 2 are formed.
センサ回路１１は、第８図に示すごとく、膜式
抵抗６、温度依存抵抗９とブリツジ回路を構成す
る抵抗１１１，１１２、比較器１１３、比較器１
１３の出力によつて制御されるトランジスタ１１
４、電圧バツフア１１５により構成される。つま
り、空気流量が増加して膜式抵抗６（この場合、
サーミスタ）の温度が低下し、この結果、膜式抵
抗６の抵抗値が下降してV1≦VRとなると、比較
器１１３の出力によつてトランジスタ１１４の導
電率が増加する。従つて、膜式抵抗６の発熱量が
増加し、同時に、トランジスタ１１４のコレクタ
電位すなわち電圧バツフア１１５の出力電圧VQ
は上昇する。逆に空気流量が減少して膜式抵抗６
の温度が上昇すると、膜式抵抗６の抵抗値が増加
してV1＞VRとなり、比較器１１３の出力によつ
てトランジスタ１１４の導電率が減少する。従つ
て、膜式抵抗６の発熱量が減少し、同時に、電圧
バツフア１１５の出力電圧VQは低下する。この
ようにして膜式抵抗６の温度は外気温度によつて
定まる値になるようにフイードバツク制御され、
出力電圧VQは空気流量を示すことになる。 As shown in FIG. 8, the sensor circuit 11 includes a membrane resistor 6, a temperature-dependent resistor 9, resistors 111 and 112 forming a bridge circuit, a comparator 113, and a comparator 1.
transistor 11 controlled by the output of 13;
4. It is composed of a voltage buffer 115. In other words, the air flow rate increases and the membrane resistor 6 (in this case,
When the temperature of the thermistor (thermistor) decreases, and as a result, the resistance value of the film resistor 6 decreases such that V 1 ≦ VR , the conductivity of the transistor 114 increases due to the output of the comparator 113. Therefore, the amount of heat generated by the film resistor 6 increases, and at the same time, the collector potential of the transistor 114, that is, the output voltage V Q of the voltage buffer 115 increases.
will rise. Conversely, the air flow rate decreases and the membrane resistance6
As the temperature increases, the resistance value of the film resistor 6 increases so that V 1 >V R , and the conductivity of the transistor 114 decreases according to the output of the comparator 113 . Therefore, the amount of heat generated by the film resistor 6 decreases, and at the same time, the output voltage VQ of the voltage buffer 115 decreases. In this way, the temperature of the membrane resistor 6 is feedback-controlled to a value determined by the outside air temperature.
The output voltage V Q will indicate the air flow rate.
第１Ａ図は第４図の膜式抵抗近傍の拡大正面
図、第１Ｂ図は第１Ａ図のＢ−Ｂ線拡大断面図で
ある。第１Ａ図、第１Ｂ図において、保持部材７
上には、絶縁層１４ａ，１４ｂを介して配線層１
５ａ，１５ｂが設けられている。膜式抵抗６と保
持部材７とはムライト等の低熱伝導率の断熱部材
１６ａ，１６ｂを介して固定されているが、その
際、各断熱部材１６ａ，１６ｂの全面には導電層
１７ａ，１７ｂが形成されており、しかも、膜式
抵抗６と保持部材７との接着は共晶もしくはハン
ダ等の導電性接着剤１８によつて行われる。従つ
て、膜式抵抗６（正確には第７図の電極取出し部
P1，P2）は保持部材７上の各配線層１５ａ，１
５ｂに電気的に接続される。また、導電層１７
ａ，１７ｂはたとえばAu，Pt，Ni等よりなり無
電解メツキ等の方法で形成する。なお、各配線層
１５ａ，１５ｂは第６図のリード線１０ａ，１０
ｂに接続されるものとする。 1A is an enlarged front view of the vicinity of the membrane resistor shown in FIG. 4, and FIG. 1B is an enlarged sectional view taken along the line B--B of FIG. 1A. In FIGS. 1A and 1B, the holding member 7
A wiring layer 1 is formed above via insulating layers 14a and 14b.
5a and 15b are provided. The membrane resistor 6 and the holding member 7 are fixed via heat insulating members 16a and 16b having low thermal conductivity such as mullite. Furthermore, the film resistor 6 and the holding member 7 are bonded together using a conductive adhesive 18 such as eutectic or solder. Therefore, the membrane resistor 6 (more precisely, the electrode extraction part in Fig. 7)
P 1 , P 2 ) are the wiring layers 15a, 1 on the holding member 7
5b. In addition, the conductive layer 17
The elements a and 17b are made of, for example, Au, Pt, Ni, etc., and are formed by a method such as electroless plating. Note that each wiring layer 15a, 15b is connected to the lead wires 10a, 10 in FIG.
b.
このように、膜式抵抗６と保持部材７の配線層
１５ａ，１５ｂとは断熱部材１６ａ，１６ｂの表
面に設けられた導電層１７ａ、１７ｂを介して電
気的に接続される。 In this way, the film resistor 6 and the wiring layers 15a, 15b of the holding member 7 are electrically connected via the conductive layers 17a, 17b provided on the surfaces of the heat insulating members 16a, 16b.
第２Ａ図は第１Ａ図の変形例を示し、第２Ｂ図
は第２Ａ図のＢ−Ｂ断面図である。第２Ａ図、第
２Ｂ図においては、第１Ａ図、第１Ｂ図の絶縁層
１４ａ，１４ｂ、配線層１５ａ，１５ｂを設けず
に、膜式抵抗６を導電材料で構成された保持部材
７ａ，７ｂに電気的に接続するものである。な
お、導電層１７ａ，１７ｂおよび接着剤１８は図
示省略してある。 FIG. 2A shows a modification of FIG. 1A, and FIG. 2B is a sectional view taken along line BB in FIG. 2A. In FIGS. 2A and 2B, the insulating layers 14a, 14b and wiring layers 15a, 15b of FIGS. 1A and 1B are not provided, and the film resistor 6 is held by holding members 7a, 7b made of a conductive material. It is electrically connected to the Note that the conductive layers 17a, 17b and adhesive 18 are not shown.
１９は樹脂、セラミツク等の絶縁材であつて、
保持部材７ａ，７ｂの短絡を防止すると共に、こ
れらの位置合せに用いるものである。 19 is an insulating material such as resin or ceramic;
It is used to prevent short circuit between the holding members 7a and 7b and to align them.
このように、膜式抵抗６と保持部材７ａ，７ｂ
とは断熱部材１６ａ，１６ｂの表面に設けられた
導電層１７ａ，１７ｂを介して電気的に接続され
る。 In this way, the membrane resistor 6 and the holding members 7a, 7b
and are electrically connected via conductive layers 17a and 17b provided on the surfaces of the heat insulating members 16a and 16b.
第３図は第１Ｂ図の断熱部材１６ａの配線層の
変更例を示す。すなわち、第３図においては、断
熱部材１６ａ，１６ｂの上下の面に導電層（板）
２０ａ，２０ｂを設け、これら断熱部材１６ａ，
１６ｂの中心孔を通る導電層（棒）２０ｃによつ
て接続してある。 FIG. 3 shows an example of a modification of the wiring layer of the heat insulating member 16a of FIG. 1B. That is, in FIG. 3, conductive layers (plates) are provided on the upper and lower surfaces of the heat insulating members 16a and 16b.
20a, 20b are provided, and these insulation members 16a,
The connection is made by a conductive layer (rod) 20c passing through the central hole of 16b.
このような第３図に示す導電層２０ａ，２０
ｂ，２０ｃは第１Ｂ図の導電層１７ａ，１７ｂと
同様の作用をなす。 Such conductive layers 20a and 20 shown in FIG.
b, 20c have the same function as the conductive layers 17a, 17b in FIG. 1B.
以上説明したように本発明によれば、ボンデイ
ングワイヤを用いることなく断熱部材に導電層を
形成して基板と保持部材（もしくはその配線）と
を電気的に接続しているので、機会的に強固とな
り、流量センサの信頼性を向上できる。
As explained above, according to the present invention, the conductive layer is formed on the heat insulating member to electrically connect the substrate and the holding member (or its wiring) without using bonding wires, so that the substrate and the holding member (or its wiring) are electrically connected. Therefore, the reliability of the flow sensor can be improved.
第１Ａ図は本発明に係る直熱型流量センサの膜
式抵抗を示す正面図、第１Ｂ図は第１Ａ図のＢ−
Ｂ線断面図、第２Ａ図は本発明に係る直熱型流量
センサの膜式抵抗を示す正面図、第２Ｂ図は第２
Ａ図のＢ−Ｂ線断面図、第３図は第１Ｂ図の断熱
部材の導電層の変更例を示す斜視図、第４図は本
発明に係る膜式抵抗を有する直熱型空気流量セン
サが適用された内燃機関を示す全体概要図、第５
図、第６図はそれぞれ第４図のセンサ部分の拡大
縦断面図、横断面図、第７図は第４図の膜式抵抗
の拡大図、第８図は第４図のセンサ回路の回路図
である。
１……内燃機関、５……ダクト、６……膜式抵
抗、７，７ａ，７ｂ……保持部材、９……外気温
度補償用温度依存抵抗、１１……センサ回路、１
４ａ，１４ｂ……絶縁層、１５ａ，１５ｂ……配
線層、１６ａ，１６ｂ……断熱部材、１７ａ，１
７ｂ，２０ａ，２０ｂ，２０ｃ……導電層、１８
……接着剤、１９……絶縁材。
FIG. 1A is a front view showing a membrane resistor of a directly heated flow rate sensor according to the present invention, and FIG. 1B is a B--FIG.
2A is a front view showing a membrane resistor of a directly heated flow rate sensor according to the present invention, and FIG. 2B is a sectional view taken along line B.
3 is a perspective view showing a modified example of the conductive layer of the heat insulating member in FIG. 1B, and FIG. 4 is a directly heated air flow sensor having a membrane resistor according to the present invention. Overall schematic diagram showing an internal combustion engine to which
Figure 6 is an enlarged vertical cross-sectional view and cross-sectional view of the sensor part in Figure 4, Figure 7 is an enlarged view of the membrane resistor in Figure 4, and Figure 8 is the circuit of the sensor circuit in Figure 4. It is a diagram. DESCRIPTION OF SYMBOLS 1...Internal combustion engine, 5...Duct, 6...Membrane type resistor, 7, 7a, 7b...Holding member, 9...Temperature dependent resistance for outside temperature compensation, 11...Sensor circuit, 1
4a, 14b... Insulating layer, 15a, 15b... Wiring layer, 16a, 16b... Heat insulating member, 17a, 1
7b, 20a, 20b, 20c... conductive layer, 18
...Adhesive, 19...Insulating material.
Claims (1)
て放熱特性が優れた保持部材に支持すると共に、
前記断熱部材に導電層を配設した直熱型流量セン
サ。 ２ 前記保持部材上の配線と前記膜式抵抗とを前
記導電層により電気的に接続した特許請求の範囲
第１項に記載の直熱型流量センサ。 ３ 前記保持部材と前記膜式抵抗とを前記導電層
により電気的に直接接続した特許請求の範囲第１
項に記載の直熱型流量センサ。[Claims] 1. A substrate on which a film resistor is formed is supported by a holding member with excellent heat dissipation properties via a heat insulating member, and
A directly heated flow rate sensor in which a conductive layer is provided on the heat insulating member. 2. The direct heating type flow sensor according to claim 1, wherein the wiring on the holding member and the film resistor are electrically connected by the conductive layer. 3. Claim 1, wherein the holding member and the film resistor are directly electrically connected by the conductive layer.
The direct heating type flow sensor described in section.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60178522A JPS6239720A (en) | 1985-08-15 | 1985-08-15 | Direct heating type flow sensor |
| US06/894,895 US4756190A (en) | 1985-08-09 | 1986-08-08 | Direct-heated flow measuring apparatus having uniform characteristics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60178522A JPS6239720A (en) | 1985-08-15 | 1985-08-15 | Direct heating type flow sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6239720A JPS6239720A (en) | 1987-02-20 |
| JPH0441932B2 true JPH0441932B2 (en) | 1992-07-09 |
Family
ID=16049943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60178522A Granted JPS6239720A (en) | 1985-08-09 | 1985-08-15 | Direct heating type flow sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6239720A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH066929U (en) * | 1992-06-26 | 1994-01-28 | 川崎重工業株式会社 | Slag blockage prevention device by plasma torch |
| JP6217119B2 (en) * | 2013-04-12 | 2017-10-25 | 株式会社島津製作所 | Hot wire flow sensor and infrared gas analyzer |
-
1985
- 1985-08-15 JP JP60178522A patent/JPS6239720A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6239720A (en) | 1987-02-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4870860A (en) | Direct-heated flow measuring apparatus having improved response characteristics | |
| US4783996A (en) | Direct-heated flow measuring apparatus | |
| JP3718198B2 (en) | Flow sensor | |
| US4833912A (en) | Flow measuring apparatus | |
| US4785662A (en) | Direct-heated gas-flow measuring apparatus | |
| US4843882A (en) | Direct-heated flow measuring apparatus having improved sensitivity response speed | |
| JPS59104513A (en) | thermal flow meter | |
| JPS60151517A (en) | Semiconductor type flow rate detector | |
| US4735099A (en) | Direct-heated gas-flow measuring apparatus | |
| US4399698A (en) | Gas flow measuring apparatus | |
| JP3331814B2 (en) | Thermal flow detector | |
| JPS6140924B2 (en) | ||
| JPS61194317A (en) | Direct-heating type flow-rate sensor | |
| US4761995A (en) | Direct-heated flow measuring apparatus having improved sensitivity and response speed | |
| JPH0441932B2 (en) | ||
| US4756190A (en) | Direct-heated flow measuring apparatus having uniform characteristics | |
| JPH11118566A (en) | Flow sensor | |
| JP2842485B2 (en) | Thermal flow sensor | |
| JPH0441930B2 (en) | ||
| JPH0441933B2 (en) | ||
| JPH0441931B2 (en) | ||
| JPS62147319A (en) | Direct heating type flow sensor | |
| JPH04122818A (en) | Heat-type flow sensor | |
| JPH0476413B2 (en) | ||
| JPH0384423A (en) | Air flow rate sensor element and its manufacture |