JPS6283651A - Inspection head - Google Patents

Abstract

PURPOSE:To make it possible to reduce the positional movement of an ultrasonic incident point even if a plate is inclined around the ultrasonic incident point, by supporting the circumference close to the plate of an ultrasonic probe holder with a hard elastic body while supporting the circumference separated from the plate thereof with a soft elastic body. CONSTITUTION:A holder 3 having an ultrasonic probe 2 is mounted to a housing 11 by interposing a hard elastic body 9 and a soft elastic body 10 and, when a shoe 4 comes into contact with a plate 1 at a high speed, the elastic bodies 9, 10 alleviate the shock of the probe 2 and, at the same time, alleviate the shock of an inspection head contacting and separating mechanism present above the housing 11. The elastic body 9 support the circumferential cylindrical surface of the holder 3 having the probe 2 mounted thereto in the state close to the plate 1 and the probe 2 performs oscillating operation around the elastic body 9 while the elastic body 10 receives the oscillating operation to be deformed. Therefore, the positional movement of an ultrasonic incident point can be reduced.

Description

[Detailed Description of the Invention] [Field of Industrial Application] This invention relates to an inspection head that detects defects by contacting two different materials to be inspected. In addition, the present invention relates to making the ultrasonic probe move around the vicinity of the specimen to reduce the movement of the position of the ultrasonic incident point. For convenience of explanation, an inspection head that comes into contact with the surface of a board to inspect the board for defects will be described.

[Conventional technology]

FIG. 3 is a perspective view showing a conventional inspection head, FIG. 4 is a sectional view thereof, and FIG. 5 is a sectional view for explaining the operation.
(1) is a plate that is the material to be tested, (2) is a cylindrical ultrasonic probe facing the plate (1) at a certain distance, (
3) is a holder that holds this ultrasound probe (2), (
4) is a shoe attached to this holder and in contact with plate +11. Also, (5) is the first gimbal frame, t
6pid This first gimbal frame +5+ K is attached to the first pin 1 (
The force is attached to the second gimbal frame (8), and the second bin (8) is attached to this second gimbal frame (7) and rotatably supports the first gimbal frame (5).

It constitutes a gimbal mechanism.

A conventional inspection head is constructed as described above and includes a plate (1), for example.
11 is transported, the second gimbal frame (7
) by the operation of an inspection head contact/separation mechanism (not shown) that supports the second bin (8) in a horizontal and perpendicular direction.
Shoe (4) contacts plate +11 at high speed.

If board +11 has irregularities such as bends, remove shoe (4)
The first bottle (6) and holder (3) are for the irregularity of the plate il+.

The rotational movement of the second bin (8) and the first gimbal frame (5; It is designed to match the line direction.

[Problem that the invention seeks to solve]

In the conventional inspection head as described above, the holder + 31° first bin (61, it's gimbal frame + 51° second
Since the bottle (8) and the second gimbal frame (7) are rigidly connected, a strong impact is generated when the shoe (4) contacts the plate (1) at high speed due to the operation of the inspection head contact/separation material mechanism. On the other hand, when inspecting by setting the ultrasonic incidence point A at a distance L from the left end of plate +11, place plate (1) on plate (5) as shown in Figure 4.
) is in a horizontal state, the rotation center B of the second bin (8)
The ultrasonic incident point A is both located at a distance L from the left end of the plate, and a predetermined inspection can be carried out. However, as shown in Fig. 5, if the plate (1) If it tilts upward to the left.

The center of rotation B of the second bottle (8) is L from the left end of the plate (1)
However, since the second bin (8) cannot be configured close to the plate (1), the ultrasonic incident point A rotates around its rotation center B, so it is located at the upper left C. .

There was a problem in that the object would be moved significantly to the left by Δ in terms of horizontal distance. Here, the rotation center B of the second bin (8) has been described.

A similar problem existed regarding the rotation of the first pin/(6).

This invention was made to solve this problem, and it alleviates the impact when the shoe contacts the board, and
An object of the present invention is to obtain an inspection head capable of reducing the movement of an ultrasonic wave incident point even when a plate is tilted around the ultrasonic wave incident point.

[Means for solving problems]

In the inspection head according to the present invention, a housing supported by an inspection head contacting/separating member mechanism is held by interposing a holder hard elastic body and a soft elastic body to which an ultrasonic probe is attached.

[Effect]

In this invention, the holder to which the ultrasonic probe is attached is supported on the cylindrical surface by a hard elastic body around the vicinity of the plate, and supported around the circumference by a soft elastic body away from the plate, so that it can be attached to the holder. The hard elastic body and the soft elastic body cushion the impact when the shoe contacts the plate, and the soft elastic body easily deforms and swings using the hard elastic body close to the plate as a fulcrum. For example, even if the position of the ultrasonic wave is tilted around the ultrasonic wave incident point, the movement of the position of the ultrasonic wave incident point can be reduced.

〔Example〕

FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG. 2 is a sectional view for explaining the operation, in which (1) is a plate, (2)
-(4) are exactly the same as the conventional inspection head described above. (9) is a hard elastic body that supports the cylindrical surface of the ultrasonic probe near the plate (1), and αG is a hard elastic body that is further away from the plate (1) and supports the periphery of the ultrasonic probe (2). The soft elastic body αυ is a housing that holds the hard elastic body (9) and the soft elastic body 00.

In the inspection head configured as described above.

Since the holder (3) to which the ultrasonic probe (2) is attached is attached to the housing a9 with the hard elastic body (9) and the soft elastic body OG interposed, the shoe is removed by the operation of the inspection head contact/separation material mechanism. Even if (4) contacts the plate fil at high speed, the hard elastic body (9) and the soft elastic body OI.

At the same time, it reduces the impact acting on the ultrasonic probe (2).

This also alleviates the impact acting on the inspection head contact/separation material mechanism located above the housing αυ.

In addition, since the hard elastic body (9) supports the cylindrical surface of the holder (3) to which the ultrasonic probe 7''+2) is attached in close proximity to the plate il+, the ultrasonic probe (2) A swinging motion is performed using the body (9) as a fulcrum.On the other hand, the soft elastic body αq is deformed by the movement caused by the swinging motion.Therefore, the ultrasonic incident point is located at a point B from the left end of the plate +11. When determining and inspecting A, when the plate fi+ is in a horizontal state as shown in FIG. 1, it is the same as the conventional inspection head, but as shown in
) is tilted upward to the left around the ultrasonic incidence point A by the same amount as the conventional inspection head, the ultrasonic probe (2)
rotates around the virtual rotation center of the hard elastic body (9), so the ultrasonic incident point A moves to the upper left E, but in terms of horizontal distance, it is 6M, which is smaller than the conventional inspection head ΔL. However, the amount of movement of the position of the ultrasound incident point can be reduced.

By the way, in the above description, the present invention is applied to an inspection head for inspecting defects in plate thickness, but it goes without saying that the inspection head can be used to inspect defects in other shapes of materials to be inspected.

〔Effect of the invention〕

As explained above, the present invention includes a hard elastic body that supports the cylindrical surface of the holder to which the ultrasonic probe is attached near the specimen material, and a hard elastic body that supports the holder around the holder away from the specimen specimen. By configuring the inspection head with a housing that holds a soft elastic body, the impact during contact with the material is alleviated, and the ultrasonic probe is oscillated around a virtual center of rotation close to the material to be inspected to generate ultrasonic waves. This has the effect of reducing the movement of the position of the incident point.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 2 is a sectional view for explaining the operation, FIG. 3 is a perspective view showing a conventional inspection head, and FIG. 4 is a sectional view thereof. FIG. 5 is a sectional view for explaining the operation. In the figure, (1) is the plate to be tested, (2J is the ultrasonic probe, (3) is the holder, (4) is the shoe, (9) is the hard elastic body, housing 1 is the soft elastic body, and Uυ is the Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

[Claims] A cylindrical ultrasonic probe facing the test material at a certain distance, a holder to which the ultrasonic probe is attached, a shoe attached to the holder and in contact with the test material, and a shoe attached to the test material of the holder. a hard elastic body that supports the periphery of the holder with a cylindrical surface; a soft elastic body that is spaced apart from the test material from the hard elastic body and supports the periphery of the holder; and a housing that holds the hard elastic body and the soft elastic body. An inspection characterized in that the impact when the shoe comes into contact with the material to be inspected is reduced, and the movement of the position of the ultrasonic incident point of the ultrasonic probe with respect to the material to be inspected is reduced. head.