JPS6284949A - Fine rotating device - Google Patents

Abstract

PURPOSE:To improve precision of fine rotation in a rotational positioning device by engaging an engaging portion provided in the periphery of a rotary member and an engaging pin attached to a fine adjustment lever with each other and linking the extreme end of the fine adjustment lever to a reciprocating driven mechanism. CONSTITUTION:Actuation of the drive motor 31 caused travel of a slider 35 of a reciprocating drive mechanism 3 in the direction shown by an arrow and then resilient deformation of a thin portion 23 of a fine adjustment lever 2 through a transmission pin 36, and fine rotation of the fine adjustment lever 2 causes a pin 24 of a moving portion 13 to apply fine rotating force to a table rotary member 13. Therefore, the table rotary member 13 effects fine rotation, with each of thin resilient pieces 12 resiliently deformed by rotating input of the lever 2. When the slider 35 is retracted, the thin portion 22 returns along with the lever 2, and the thin resilient pieces 12 recovers as the table rotary member 13 returns. On the other hand, when the slider 35 is moved in the opposite direction, the table rotary member 13 effects fine rotation in the opposite direction in the similar way. Thus, fine rotation can be performed precisely and stably.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a fine rotation device that is applied to, for example, LSI inspection equipment, manufacturing equipment, measuring equipment, machine tools, and other precision rotational positioning equipment.

<Summary of the Invention> The present invention provides a rotating part of a fine movement rotary table in which a fixed part is provided at the center of the table and a rotating part is connected to the outer periphery of the fixed part through thin-walled elastic pieces that protrude radially. Attach the fixed part of the fine-movement lever with the movable part connected to it via the movable part, arrange an engaging part around the rotating part, and an engagement pin on the fine-movement lever so that they engage with each other, and the tip of the fine-movement lever. The present invention is connected to a reciprocating drive mechanism, thereby omitting the rotation guide mechanism of the fine-movement rotary table and improving the smoothness and accuracy of the fine-movement rotation.

<Background of the Invention> Conventionally, as this type of fine rotation device, the mechanism shown in FIG.
There is a figure 1) on page 6.

The fine rotation rotating device has several locations on the outer periphery of a rotary table 4 supported by a freely rotatable guide wheel 5, and a reciprocating mechanism 6 is disposed tangentially to the rotary table 4 to achieve reciprocating motion. In the mechanism 6, a slider 62 screwed onto the feed shaft 61
A push rod 63 is provided, the tip of which touches the table 4, and a tension spring 65 is interposed between the table 4 and a fixed part 64 such as a motor frame, close to and parallel to the push rod 63. ing. In this device, when a slider 62 on a feed shaft 61 moves forward or backward due to the operation of a pulse motor 66, a push rod 63 or a tension spring 65 exerts a push/pull force on the table 4 from the tangential direction, and the It rotates slightly in the opposite direction. However, in such a structure, in order to improve the rotational resolution of the table 4,
It is necessary to make the thread pitch of the feed shaft 61 small, or to use a pulse motor 66 with a small step angle.In the former case, the processing becomes difficult, and in the latter case, the weight and shape of the motor are large. This causes inconvenience in miniaturizing the device. Moreover, since the fine movement rotary table 4 is supported by the guide wheel 5 at several points on the outer periphery, play occurs between the table 4 and the inner groove 5, which adversely affects the rotational accuracy. There were many problems such as the hair ring of No. 5 being worn out, which also caused a decrease in rotation accuracy and deterioration of fine rotation characteristics.

<Object of the Invention> The present invention solves the above-mentioned conventional problems by slightly rotating the table using elastic deformation of the material, and achieves high precision and
The purpose is to provide a new fine rotation device that achieves high resolution and high stability.

<Structure and Effects of the Invention> In order to achieve the above object, the present invention provides a rotating fine-movement rotary table in which a fixed part is provided at the center of the table and a rotating part is connected to the outer periphery of the fixed part through thin elastic pieces that protrude radially. The fixed part of the fine movement lever, in which the movable part is connected to the fixed part through a thin wall part, is attached to the moving part, and the engaging part is arranged around the rotating part, and the retaining pin is arranged on the fine movement lever, so that they can be connected to each other. The fine movement lever is engaged and the tip of the fine movement lever is linked to a reciprocating drive mechanism.

According to the above configuration, in the present invention, the rotary table is rotated by slight movement by deformation of the plurality of thin elastic pieces, thus eliminating the need for a guide wheel supporting the outer periphery and improving the smoothness and performance of the fine movement. Moreover, since the fine movement lever exerts a fine force on the table by deforming the thin part, the distance between the thin part, which forms the rotation center of the fine movement lever, and the rotation input part at the tip of the lever, and the connection between the thin part and the table. Due to the proportional relationship between the distance between the output unit and the output unit, the movement of the table rotation unit is reduced to a fraction of the movement of the reciprocating drive mechanism, which simplifies the configuration and assembly work, and provides high precision and high resolution. It has practical effects that can realize the following.

<Explanation of Examples> FIG. 1 shows a fine rotation device according to the present invention.

The fine movement rotation device includes a fine movement rotary table 1 having a fixed part 11 in the center of the table and a rotating part 13 integrally connected to the fixed part 11 on the outer periphery of the fixed part 11 through a plurality of thin elastic pieces 12 protruding radially, and the rotating part 13. Fixed part 21 attached to! , : A fine movement lever that has a movable part 23 protruding from the outer periphery of the table I via a thin part 22, and has an engaging part 14 and a pin 24 that are engaged with each other between the movable part 23 and the rotating part 13. 2 is connected to the tip of the lever 2, and the lever 2 is connected to the thin part 22.
It consists of a reciprocating drive mechanism 3 that slightly rotates around the center.

The fine movement rotary table 1 has a central fixing part 11 fixed with screws to key points of semiconductor manufacturing equipment, etc., and has a right-angled notch 15 on the outer periphery with one side aligned with the diameter line passing through the thin elastic piece 12. Attach one side of the L-shaped member 16 to the L-shaped member 16.
An engaging portion 14 is formed by the upright wall and the notch wall, and a pin 24 on the lever 2 is engaged between the engaging portions 14.

The fine movement lever 2 has its fixed part 21 screwed to a substantially intermediate part between the engaging part 14 and the thin elastic piece 12, so that the thin part 22 is aligned on the diameter line, and the movable part 23 has a fixed part 21 attached to the engaging part I4. Corresponding pins 24 are implanted and engage with each other. A thin elastic piece 12 and a thin part 2 are provided at the tip of the movable part 23.
Corresponding to the diameter line passing through 2, there is a pin 25 on one side, and L on the other side.
The shape material 26 is arranged vertically, and an engaging portion 27 is provided between the pin 25 and the rising wall of the shape material 26, and the reciprocating drive mechanism 3 is linked to this.

In the reciprocating drive mechanism 3, a feed shaft 32 having one end connected to a drive motor 31 and having a thread groove formed on the shaft body is provided with a bearing perpendicular to the tip of the fine movement lever 2. As shown in the figure, a slider 35 whose rotation is prevented by a guide 33 and a guide pin 34 is screwed together, and a transmission pin 36 is protruded from the slider 35, and the transmission pin 36 is engaged with the engagement portion 27 at the tip of the fine movement lever 2. And they are connected.

However, in FIG. 3, when the slider 35 moves in the direction of the arrow due to the operation of the drive motor 31 and the transmission pin 36 transmits the tip of the fine movement lever 2, the thin part 23 of the transmission lever 2 resists the elasticity. It deforms and rotates slightly around the core. As a result, the pin 24 of the movable part 23 applies a slight rotational force to the table rotation part 13. Therefore,
In the table rotating portion 13, each thin elastic piece 12 is deformed by the rotation input of the lever 2 against its elasticity, and the table rotating portion 13 is slightly rotated. When the slider 35 retreats, the thin wall portion 22 returns to its original state in response to the return of the lever 2, and the thin elastic piece returns to its original state due to the elasticity of the material in response to the return of the table rotating portion 13. When the slider 35 moves in the opposite direction, the fine movement lever 2 moves slightly in the opposite direction to the previous direction, and the table rotating part 13 is slightly moved in the opposite direction.

As described above, the present invention has a fixed part 11 in the center of the table and a rotating part 13 connected to the rotating part 13 via thin elastic pieces 12 protruding radially on the outer periphery of the fixed part 11. The fixed part 21 of the fine movement lever 2, in which the movable part 23 is connected to the thin part 22, is attached to the rotating part 13.
Since the engaging portion 14 and the engaging pin 24 are disposed around the fine movement lever 2 and engage with each other, and the tip of the fine movement lever 2 is connected to the reciprocating drive mechanism 3, the present invention is particularly advantageous for the fine movement rotary table. The rotation is realized by elastic deformation of a plurality of thin elastic pieces 12, so compared to the conventional device using a guide wheel, the structure is more open, and there are problems such as rattling between the guide wheel and table and wear of bearings. This eliminates all problems at once, achieving highly accurate and stable fine rotation.

Moreover, since the fine movement lever 2 makes a fine movement with respect to the table 1 by deformation of the thin wall part 22, the table rotation part 13
The operation of the drive mechanism 3 is reduced to a fraction of the operation of the drive mechanism 3, thereby achieving high accuracy and high resolution in table operation, etc.
It has the effect of achieving the purpose of the invention.

[Brief explanation of drawings]

Fig. 1 is a plan view showing an example of a fine rotation device according to the present invention, Fig. 2 is a sectional view taken along the line ■-■ in Fig. 1, Fig. 3 is a diagram explaining the operating situation, and Fig. 4 is a conventional FIG. 2 is a plan view of the device. 1...Fine rotation table 11...Fixed part 12
...Elastic piece 13...Rotating part 14.
...Engagement part 2...Fine movement lever 21.
...Fixed part 22...Thin wall part 23...
... Movable part 24 ... Pin 3 ... Reciprocating drive mechanism 35 ... Slider 36 ... Transmission pin patent Applicant Tateishi Electric Co., Ltd.; 7t'Z >
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Claims (2)

[Claims] (1) A fine-movement rotary table in which a rotating part is connected to a fixed part in the center of the table via a thin elastic piece that protrudes radially on the outer periphery of the fixed part, and a fixed part attached to the rotating part is connected to the outer periphery of the table via a thin-walled part. A fine movement lever having a movable part protruding from the movable part, an engagement part engaged with each other between the movable part and the rotating part, and a pin, and a fine movement lever connected to the tip of the lever to control the lever. A fine rotation rotation device comprising a reciprocating drive mechanism that rotates finely around the thin wall portion. (2) In the reciprocating drive mechanism, a slider having a transmission pin is screwed to a feed shaft disposed perpendicular to the fine movement lever,
The fine rotation device according to claim 1, wherein the transmission pin is linked to a fine movement lever.