JPS6288751U - - Google Patents
Info
- Publication number
- JPS6288751U JPS6288751U JP1985179912U JP17991285U JPS6288751U JP S6288751 U JPS6288751 U JP S6288751U JP 1985179912 U JP1985179912 U JP 1985179912U JP 17991285 U JP17991285 U JP 17991285U JP S6288751 U JPS6288751 U JP S6288751U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processed
- processing apparatus
- vacuum processing
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985179912U JPS6288751U (fr) | 1985-11-25 | 1985-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985179912U JPS6288751U (fr) | 1985-11-25 | 1985-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6288751U true JPS6288751U (fr) | 1987-06-06 |
Family
ID=31123393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985179912U Pending JPS6288751U (fr) | 1985-11-25 | 1985-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6288751U (fr) |
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1985
- 1985-11-25 JP JP1985179912U patent/JPS6288751U/ja active Pending