JPS6292638U - - Google Patents
Info
- Publication number
- JPS6292638U JPS6292638U JP17849986U JP17849986U JPS6292638U JP S6292638 U JPS6292638 U JP S6292638U JP 17849986 U JP17849986 U JP 17849986U JP 17849986 U JP17849986 U JP 17849986U JP S6292638 U JPS6292638 U JP S6292638U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- jig
- elevating means
- treatment jig
- automatic loading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000003028 elevating effect Effects 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17849986U JPS6292638U (fr) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17849986U JPS6292638U (fr) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6292638U true JPS6292638U (fr) | 1987-06-13 |
Family
ID=31120686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17849986U Pending JPS6292638U (fr) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6292638U (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52154342A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Diffusion furnace |
-
1986
- 1986-11-20 JP JP17849986U patent/JPS6292638U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52154342A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Diffusion furnace |
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