JPS6294630U - - Google Patents
Info
- Publication number
- JPS6294630U JPS6294630U JP18749985U JP18749985U JPS6294630U JP S6294630 U JPS6294630 U JP S6294630U JP 18749985 U JP18749985 U JP 18749985U JP 18749985 U JP18749985 U JP 18749985U JP S6294630 U JPS6294630 U JP S6294630U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- air passage
- carrier
- outer periphery
- semiconductor material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18749985U JPS6294630U (2) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18749985U JPS6294630U (2) | 1985-12-04 | 1985-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6294630U true JPS6294630U (2) | 1987-06-17 |
Family
ID=31138022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18749985U Pending JPS6294630U (2) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294630U (2) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295166A (en) * | 1976-02-06 | 1977-08-10 | Hitachi Ltd | Wafer dryer |
-
1985
- 1985-12-04 JP JP18749985U patent/JPS6294630U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295166A (en) * | 1976-02-06 | 1977-08-10 | Hitachi Ltd | Wafer dryer |
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