JPS6310058U - - Google Patents
Info
- Publication number
- JPS6310058U JPS6310058U JP1986103928U JP10392886U JPS6310058U JP S6310058 U JPS6310058 U JP S6310058U JP 1986103928 U JP1986103928 U JP 1986103928U JP 10392886 U JP10392886 U JP 10392886U JP S6310058 U JPS6310058 U JP S6310058U
- Authority
- JP
- Japan
- Prior art keywords
- friction
- coefficient
- replacement pad
- workpiece
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 3
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986103928U JPS6310058U (2) | 1986-07-07 | 1986-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986103928U JPS6310058U (2) | 1986-07-07 | 1986-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6310058U true JPS6310058U (2) | 1988-01-22 |
Family
ID=30976942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986103928U Pending JPS6310058U (2) | 1986-07-07 | 1986-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310058U (2) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5959347A (ja) * | 1982-09-23 | 1984-04-05 | ウイリアム・デイ−・ブデインガ− | 研磨操作のための工作物ホルダ |
-
1986
- 1986-07-07 JP JP1986103928U patent/JPS6310058U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5959347A (ja) * | 1982-09-23 | 1984-04-05 | ウイリアム・デイ−・ブデインガ− | 研磨操作のための工作物ホルダ |
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