JPS63100914A - Adsorption method for pressure swing - Google Patents
Adsorption method for pressure swingInfo
- Publication number
- JPS63100914A JPS63100914A JP61248179A JP24817986A JPS63100914A JP S63100914 A JPS63100914 A JP S63100914A JP 61248179 A JP61248179 A JP 61248179A JP 24817986 A JP24817986 A JP 24817986A JP S63100914 A JPS63100914 A JP S63100914A
- Authority
- JP
- Japan
- Prior art keywords
- adsorption tower
- gas
- adsorption
- desorption
- finished
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 title claims abstract description 75
- 238000000034 method Methods 0.000 title claims abstract description 52
- 238000003795 desorption Methods 0.000 claims abstract description 29
- 238000005406 washing Methods 0.000 claims abstract description 7
- 238000000746 purification Methods 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 2
- 238000011084 recovery Methods 0.000 abstract description 15
- 239000002699 waste material Substances 0.000 abstract description 4
- 238000004891 communication Methods 0.000 abstract description 3
- 239000002994 raw material Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 62
- 238000004140 cleaning Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 9
- 239000003463 adsorbent Substances 0.000 description 6
- 229910021536 Zeolite Inorganic materials 0.000 description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 2
- 239000010457 zeolite Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は高純度ガスの分離製造に利用される圧力スイン
グ吸着方法に関し、特に脱着回収されるべき製品ガス中
の不純成分を極力排除し、高純度製品ガスとして回収す
るための圧力スイング吸着方法に関するものである。以
下にはその代表例として02及びN2の混合ガスからN
、を高純度に回収する方法について説明するが本発明方
法の適用対象はこれによって限定解釈されてはならない
。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a pressure swing adsorption method used for the separation and production of high-purity gases, and in particular a method for eliminating impurity components in product gases to be desorbed and recovered as much as possible. The present invention relates to a pressure swing adsorption method for recovering high-purity product gas. The following is a representative example of N2 from a mixed gas of 02 and N2.
, will be described below, but the scope of application of the method of the present invention should not be construed as limited by this.
[従来の技術]
加圧空気を圧力スイング吸着装置(以下単にPSA装置
という)に導入してN2ガスを濃縮回収する方法を大別
すると、02ガスを吸着剤に吸着させて除去する方法と
、N2ガスを吸着剤に吸着させた後脱着回収する方法の
2つに分類される。このうち後者はゼオライト系の吸着
剤を使用し、N2ガスの吸着後の吸着塔を真空ポンプ等
によって減圧することにより高純度N2ガスを脱着回収
する方法であり、以下この方法について説明する。[Prior Art] Methods for concentrating and recovering N2 gas by introducing pressurized air into a pressure swing adsorption device (hereinafter simply referred to as a PSA device) can be roughly divided into two methods: a method in which 02 gas is adsorbed on an adsorbent and removed; There are two types of methods: methods in which N2 gas is adsorbed onto an adsorbent and then desorbed and recovered. The latter method uses a zeolite-based adsorbent and depressurizes the adsorption tower after adsorbing N2 gas using a vacuum pump or the like to desorb and recover high-purity N2 gas, and this method will be described below.
第2図は3塔式のPSA装置を示す概略説明図であって
、図示しない前処理装置の出口側に接続される原料ガス
(加圧空気)供給管1には自動開閉弁(以下単に弁とい
う)Vt〜■、を介して吸l塔3a、3 b、3 cが
接続され、各塔の底部には弁■4〜■6を介して排ガス
廃棄管4が連結される。また排ガス廃棄管4の途中(弁
V4〜V6介設点より上流側)からは脱着用管5a、5
b。FIG. 2 is a schematic explanatory diagram showing a three-column type PSA device, and an automatic opening/closing valve (hereinafter simply a valve ) Vt to Vt, and 3c are connected thereto, and an exhaust gas waste pipe 4 is connected to the bottom of each tower via valves 4 to 6. In addition, from the middle of the exhaust gas waste pipe 4 (upstream of the valves V4 to V6 intervening points), the desorption pipes 5a and 5
b.
5cが分岐され、それらは弁V、〜■、を介してそれよ
り下流側で合流される。そして合流された脱着用管5に
は真空ポンプ6が設けられて製品ガスホルダ9に連結さ
れる。製品ガスホルダ9には製品ガス回収管2が設けら
れると共に、製品ガスの一部を洗浄用として抜き出す洗
浄用管8が配設され、該洗浄用管8は分岐された後弁V
13〜V15を介して吸着塔3a、3b、3cの各頂部
に連結される。尚各吸着塔3a、3b、3cを直列結合
する連結配管10a、10b、10cが弁■1o〜V1
2を介して夫々設けられる。5c are branched, and they are joined downstream via valves V, ~■,. A vacuum pump 6 is provided in the merged desorption tube 5 and connected to a product gas holder 9. The product gas holder 9 is provided with a product gas recovery pipe 2 and a cleaning pipe 8 for extracting a part of the product gas for cleaning.
13 to V15 to the tops of adsorption towers 3a, 3b, and 3c. In addition, the connecting pipes 10a, 10b, 10c that connect the adsorption towers 3a, 3b, 3c in series are connected to valves ■1o to V1.
2, respectively.
第3図は、吸着塔3a、3b、3cのうち成る1塔の作
動工程を示すタイムスケジュールであり、吸着工程開始
時から次回の吸着工程開始時までに行なわれる全作動を
1サイクルとしたとき、1サイクルは吸着工程、回収工
程、洗浄工程及び脱着工程より構成される。まず吸着工
程では脱着された吸着塔内を加圧すると共に、原料ガス
を供給管1から加圧供給し、回収目的成分のN2ガスを
吸着剤に吸着させ不純成分ガス(主に02ガス)を排ガ
ス廃棄管4から放出する。又脱着工程では吸着塔と製品
ガスホルダ9を真空ポンプ6及び脱着用管5を介して連
通し、吸着塔内を減圧して吸着剤に吸着されていたN2
を脱着して製品ガスホルダ9に貯留する。Fig. 3 is a time schedule showing the operation process of one of the adsorption towers 3a, 3b, and 3c, and the entire operation from the start of the adsorption process to the start of the next adsorption process is considered to be one cycle. , one cycle consists of an adsorption step, a recovery step, a washing step, and a desorption step. First, in the adsorption process, the interior of the desorbed adsorption tower is pressurized, and the raw material gas is supplied under pressure from the supply pipe 1. N2 gas, the target component to be recovered, is adsorbed onto the adsorbent, and impure component gas (mainly 02 gas) is removed from the exhaust gas. Discharge from waste pipe 4. In the desorption process, the adsorption tower and the product gas holder 9 are communicated via the vacuum pump 6 and the desorption tube 5, and the pressure inside the adsorption tower is reduced to remove the N2 adsorbed by the adsorbent.
is removed and stored in the product gas holder 9.
また回収工程及び洗浄工程は、吸着塔3aの場合を例に
挙げて説明すると第4図(a)及び(b)によって示さ
れる。即ち第4図(a)の状態においては、製品ガスホ
ルダ9から供給される高純度N2ガスは洗浄用管8を通
って吸着塔3C内の残留02を追放し、吸着工程の終了
した吸着塔3aへ連結配管10cを介して送り込まれる
。Further, the recovery step and the washing step are illustrated in FIGS. 4(a) and 4(b), taking the case of the adsorption tower 3a as an example. That is, in the state shown in FIG. 4(a), the high-purity N2 gas supplied from the product gas holder 9 passes through the cleaning pipe 8 to expel the residual 02 in the adsorption tower 3C, and the adsorption tower 3a has completed the adsorption process. It is sent to via the connecting pipe 10c.
その結果吸着塔3aでは回収工程が行なわれ、吸着塔3
Cは洗浄工程が行なわれる。次いで第4図(b)の状態
では、吸着塔3aは洗浄工程を行ない、吸着塔3bは回
収工程を行なう。As a result, a recovery process is performed in the adsorption tower 3a, and the adsorption tower 3a
C, a cleaning process is performed. Next, in the state shown in FIG. 4(b), the adsorption tower 3a performs a cleaning process, and the adsorption tower 3b performs a recovery process.
そして第4図(b)に示した洗浄工程の終了しり後、吸
着塔3aは次に脱着工程が行なわれることになる。After the cleaning step shown in FIG. 4(b) is completed, the adsorption tower 3a is then subjected to a desorption step.
[発明が解決しようとする問題点コ
しかしながらN2ガスの脱着回収に当たって吸着塔3a
、3b、3cのいずれかを真空ポンプ6によって減圧す
る場合の状況を更に詳しく観察してみると、脱着工程が
行なわれる吸着塔中のガスはもとより、当該吸着塔に連
接される管内(ただし弁によりて遮断される位置まで)
に残存するガスも一緒に真空ポンプ6側に引込んでしま
う(例えば吸着塔3aの場合を考えたときには第2図に
おいて破線で囲む配管中の残存ガスが問題となる)。従
って上記管内に低純度のN2ガスが残存する場合には、
製品ガスホルダ9中に取り出される製品N2ガスの純度
が低下してしまうという不具合を生じる。特に回収工程
時において使用される連結配管に残存する低純度N2ガ
スは、量も多いため、製品N2ガスの純度を低下させる
大きな要因となっている。[Problems to be solved by the invention] However, when desorbing and recovering N2 gas, the adsorption tower 3a
, 3b, and 3c are depressurized by the vacuum pump 6, we find that not only the gas in the adsorption tower where the desorption process is performed, but also the gas inside the pipe connected to the adsorption tower (however, the (up to the position where it is blocked by)
The remaining gas is also drawn into the vacuum pump 6 side (for example, when considering the adsorption tower 3a, the remaining gas in the piping surrounded by the broken line in FIG. 2 becomes a problem). Therefore, if low-purity N2 gas remains in the pipe,
This causes a problem in that the purity of the product N2 gas taken out into the product gas holder 9 decreases. In particular, the amount of low-purity N2 gas remaining in the connecting pipes used during the recovery process is large, and is therefore a major factor in reducing the purity of the product N2 gas.
そこで本発明者は、次に脱着工程を実施する予定となっ
ている吸着塔周辺から予め不純成分ガスを排除しておき
、脱着に際しては、高純度製品ガスのみが脱着される脱
着準備システムを開発することを目的に種々研究を重ね
た結果、本発明方法を開発することに成功した。Therefore, the present inventor developed a desorption preparation system in which impure component gases are removed in advance from around the adsorption tower where the next desorption process is scheduled, and only high-purity product gas is desorbed during desorption. As a result of various research aimed at this purpose, we succeeded in developing the method of the present invention.
[問題点を解決するための手段]
上記目的を達成し得た本発明方法は、洗浄工程が終って
脱着工程に移る前に、当該洗浄の実施された吸着塔に連
通されている配管を既に脱着工程の終了した後の吸着塔
に連通せしめ、前記連通されている配管中に残存するガ
スを圧力差により、前記脱着工程の終了した後の吸着塔
へ導入する点を要旨とするものである。[Means for Solving the Problems] The method of the present invention, which has achieved the above object, is that, after the cleaning step and before proceeding to the desorption step, the piping connected to the adsorption tower where the cleaning has been performed is already connected. The gist is to communicate with the adsorption tower after the desorption process is completed, and to introduce the gas remaining in the connected piping into the adsorption tower after the desorption process is completed using a pressure difference. .
[作用]
本発明では、洗浄工程が終了し次に脱着工程を行なう予
定となっている吸着塔に連接される配管を、既に脱着工
程が終了して塔内圧力が減圧状態にある他の吸着塔に接
続し、前記配管中のガスを前記他の吸着塔へ圧力差を利
用して13功させることとした。この結果該脱着予定で
あった吸着塔に連通される配管内の不純成分含有ガスが
除去され、脱着の実施によって取出される製品ガス中の
不純成分濃度を大幅に低下させることが可能となった。[Function] In the present invention, the piping connected to the adsorption tower in which the cleaning process has been completed and the desorption process is to be performed next is connected to another adsorption tower in which the desorption process has already been completed and the internal pressure of the tower is in a reduced pressure state. The adsorption tower was connected to the adsorption tower, and the gas in the pipe was transferred to the other adsorption tower using the pressure difference. As a result, the impure component-containing gas in the pipe communicating with the adsorption tower that was scheduled for desorption was removed, making it possible to significantly reduce the concentration of impure components in the product gas extracted by desorption. .
尚圧力差によるガス穆勤の為の配管システムについて、
後記実施例においては連結配管10a〜10cを相互に
バイパスする配管を形成する場合を代表的に取上げて説
明するが、本発明においては一切制限を受けるものでは
なく、専用配管の形成、その他の手段も採用できる。Regarding the piping system for gas supply due to pressure difference,
In the embodiments described later, a case will be described as a representative case in which pipes are formed that bypass each other between the connecting pipes 10a to 10c, but the present invention is not limited at all, and may be formed by forming dedicated pipes or by other means. can also be adopted.
[実施例]
第1図は本発明方法に利用されるPSA装置の代表的実
施例を示す概略説明図であり、第2図に示した従来のP
SA装置に比較して次の点に特徴が存在する。[Example] FIG. 1 is a schematic explanatory diagram showing a typical example of a PSA device used in the method of the present invention, and is similar to the conventional PSA device shown in FIG.
It has the following features compared to the SA device.
即ちこの装置では各連結配管IQa、10b。That is, in this device, each connection pipe IQa, 10b.
10cを相互にバイパスする配管A、B、Cを設け、各
配管A、B、Cには夫々弁21〜Z、を配設している。Pipes A, B, and C that mutually bypass 10c are provided, and each of the pipes A, B, and C is provided with valves 21 to Z, respectively.
この他の例としては第6図に示す様に連結配管10a〜
10cの最上流端(各吸着塔3a〜3Cの下部側)及び
最下流端(各吸着塔38〜3cの頂部側)の夫々に開閉
弁”10−a+v11−a+ V 12−a及びvlo
−b+ vII−b+ V 12−bを設けて逆流防止
に備えることもできる。As another example, as shown in FIG.
10-a+v11-a+ V 12-a and vlo
-b+ vII-b+ V 12-b may also be provided to provide for backflow prevention.
例えば第1図に示す様にPSA装置の吸着塔3aにおけ
る洗浄工程が終了した時点で、弁Z3を開放して吸着塔
3c(脱着工程が終了した後であり減圧状態になってい
る)と連結配管10aとを瞬間的(数秒間)に連通させ
ると、連結配管10a中のガスは第1図の矢印に沿って
吸着塔3cへ8動される。尚このとき回収工程の終了し
た吸着塔3b中のガスの一部も吸着塔3Cへ8勤される
ことになる。For example, as shown in Fig. 1, when the cleaning process in the adsorption tower 3a of the PSA device is completed, valve Z3 is opened and connected to the adsorption tower 3c (which is after the desorption process has been completed and is in a reduced pressure state). When the pipe 10a is brought into instantaneous communication (for several seconds), the gas in the connecting pipe 10a is moved along the arrow in FIG. 1 to the adsorption tower 3c. At this time, a portion of the gas in the adsorption tower 3b that has completed the recovery step is also transferred to the adsorption tower 3C.
洗浄工程の実施の後不純ガスが除去されるので本工程は
以下浄化工程と呼ぶが、不純ガス中の回収成分は吸着塔
3Cに入って昇圧工程の一部を構成することとなる。Since the impure gas is removed after the cleaning step, this step will be referred to as a purification step hereinafter, but the recovered components in the impure gas will enter the adsorption tower 3C and constitute a part of the pressure increasing step.
即ち第5図はある吸着塔の工程順序を示す説明図であり
、洗浄工程終了後に上述の浄化工程を設定し、上記連結
配管と他の吸着塔を連通させて前記配管中の低純度N2
ガスの放出を行ない、一方脱着工程終了後には他の吸着
塔の浄化工程におけるレシーバ−として昇圧工程の一部
を形成する。That is, FIG. 5 is an explanatory diagram showing the process order of a certain adsorption tower, in which the above-mentioned purification step is set after the cleaning step is completed, and the connecting pipe is connected to another adsorption tower to remove low-purity N2 in the pipe.
Gas is released, and on the other hand, after the desorption step is completed, it forms part of the pressure increasing step as a receiver in the purification step of another adsorption tower.
上記連結配管10a、10b、10cと減圧下にある脱
着終了後の吸着塔との接続ルートについては、第1図の
実施例に限定されず、前記した様に第6図に示す実施例
も採用できる。The connection route between the connecting pipes 10a, 10b, 10c and the adsorption tower under reduced pressure after the completion of desorption is not limited to the embodiment shown in Fig. 1, but as described above, the embodiment shown in Fig. 6 is also adopted. can.
例えば吸着塔3aの浄化工程において、連結配管10a
のガスは矢印に沿って吸着塔3Cへ8勤するが、このと
き回収工程の終了した吸着塔3b中のガスは開閉弁10
+o−bによって遮断されているため、吸着塔3Cへ
は8動しない。For example, in the purification process of the adsorption tower 3a, the connecting pipe 10a
The gas flows to the adsorption tower 3C along the arrow, but at this time, the gas in the adsorption tower 3b, which has completed the recovery process, passes through the on-off valve 10.
Since it is blocked by +o-b, it does not move to the adsorption tower 3C.
罠豊1
第1図に示したPSA装置を利用し、第5図に示す工程
順序に沿って、N2ガス(79%)及び02ガス(21
%)からなる混合ガスよりN鵞ガスを選択回収する実験
を行なった。吸着塔の大きさは内径450III11.
高さ2000++uaのものを使用し、吸着剤には合成
ゼオライト5A型を使用した。Trapho 1 Using the PSA device shown in Figure 1, N2 gas (79%) and 02 gas (21
An experiment was conducted in which N gas was selectively recovered from a mixed gas consisting of (%). The size of the adsorption tower is an inner diameter of 450III11.
A material with a height of 2000++ ua was used, and synthetic zeolite type 5A was used as the adsorbent.
吸着圧力は4.0 kg/cm’Gとし、原料ガスは7
ONm’/hで吸着塔へ供給し、脱着圧力は0.1 k
g/cm2Gに設定して吸着塔の工程1サイクルを3分
とした。The adsorption pressure was 4.0 kg/cm'G, and the raw material gas was 7.
Supplied to the adsorption tower at ONm'/h, desorption pressure is 0.1 k
g/cm2G, and one cycle of the adsorption tower process was 3 minutes.
一方第3図に示す従来の工程順序に沿って上記と同様の
条件でN、ガスの回収を行なった場合、製品N2ガス純
度は99.998%であったが、本発明方法を利用した
場合の製品N2ガス純度は99.999%を達成できる
様になり、深冷分離装置を使ってN2ガスの分離回収を
行なうのとほぼ同等純度のものが得られる様になった。On the other hand, when N and gas were recovered under the same conditions as above according to the conventional process sequence shown in Figure 3, the product N2 gas purity was 99.998%, but when the method of the present invention was used It has become possible to achieve a product N2 gas purity of 99.999%, which is approximately the same purity as when N2 gas is separated and recovered using a cryogenic separator.
また本発明方法によるN2ガスの回収率は40%強であ
り、従来方法の回収率に比べてほとんど変らなかった。Furthermore, the recovery rate of N2 gas by the method of the present invention was over 40%, which was almost unchanged compared to the recovery rate of the conventional method.
上記した例ではN2ガスの濃縮回収の例を示して説明し
たが、本発明方法はこの他H2ガスやCOガス等の回収
にも適用される。In the above example, an example of concentration and recovery of N2 gas was shown and explained, but the method of the present invention is also applicable to recovery of H2 gas, CO gas, etc.
[発明の効果]
本発明方法は以上の様に構成されているので、回収率を
低下させることなく高純度の回収目的成分ガスが分離精
製できる様になった。[Effects of the Invention] Since the method of the present invention is configured as described above, it has become possible to separate and purify the target component gas to be recovered with high purity without reducing the recovery rate.
第1図は本発明方法に利用する代表的なPSA装置例を
示す概略説明図、第2図は従来の方法に用いられるPS
A装置の例を示す概略説明図、第3図は従来の圧力スイ
ング吸着の工程を示す説明図、第4図(a) 、 (b
)は吸着塔3aの回収工程及び洗浄工程を示す説明図、
第5図は本発明方法の圧力スイング吸着の工程を示す説
明図、第6図は本発明方法に利用する他のPSA装置例
を示す概略説明図である。Fig. 1 is a schematic explanatory diagram showing a typical example of a PSA device used in the method of the present invention, and Fig. 2 is a schematic illustration of a typical PSA device used in the method of the present invention.
A schematic explanatory diagram showing an example of apparatus A, Fig. 3 is an explanatory diagram showing the conventional pressure swing adsorption process, and Figs. 4 (a) and (b).
) is an explanatory diagram showing the recovery process and cleaning process of the adsorption tower 3a,
FIG. 5 is an explanatory diagram showing the pressure swing adsorption step of the method of the present invention, and FIG. 6 is a schematic explanatory diagram showing another example of a PSA apparatus used in the method of the present invention.
Claims (1)
浄、脱着の各工程を行なう易吸着性成分の分離精製にお
いて、洗浄工程が終って脱着工程に移る前に、当該洗浄
の実施された吸着塔に連通されている配管を既に脱着工
程の終了した後の吸着塔に連通せしめ、前記連通されて
いる配管中に残存するガスを圧力差により、前記脱着工
程の終了した後の吸着塔へ導入することを特徴とする圧
力スイング吸着方法。In the separation and purification of easily adsorbable components in which at least the adsorption, washing, and desorption steps are performed using multiple pressure swing adsorption towers, after the washing step is completed and before moving on to the desorption step, the adsorption tower that has been washed is Connecting the connected piping to the adsorption tower after the desorption step has already been completed, and introducing the gas remaining in the connected piping to the adsorption tower after the desorption step has been completed by a pressure difference. A pressure swing adsorption method characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61248179A JPS63100914A (en) | 1986-10-17 | 1986-10-17 | Adsorption method for pressure swing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61248179A JPS63100914A (en) | 1986-10-17 | 1986-10-17 | Adsorption method for pressure swing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63100914A true JPS63100914A (en) | 1988-05-06 |
| JPH0372326B2 JPH0372326B2 (en) | 1991-11-18 |
Family
ID=17174374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61248179A Granted JPS63100914A (en) | 1986-10-17 | 1986-10-17 | Adsorption method for pressure swing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100914A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05305214A (en) * | 1992-04-28 | 1993-11-19 | Kanebo Ltd | Separation of oxygen gas |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60168513A (en) * | 1983-12-15 | 1985-09-02 | ベルクヴエルクスフエルバント・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Separation and recovery of gas relatively strongly adsorbable by adsorbent from gaseous mixture of said gas and other gas relatively weakly adsorbable by adsorbent |
| JPS60221304A (en) * | 1984-04-19 | 1985-11-06 | Showa Denko Kk | Preparation of oxygen-rich gas by pressure changing adsorption method under atmospheric pressure |
-
1986
- 1986-10-17 JP JP61248179A patent/JPS63100914A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60168513A (en) * | 1983-12-15 | 1985-09-02 | ベルクヴエルクスフエルバント・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Separation and recovery of gas relatively strongly adsorbable by adsorbent from gaseous mixture of said gas and other gas relatively weakly adsorbable by adsorbent |
| JPS60221304A (en) * | 1984-04-19 | 1985-11-06 | Showa Denko Kk | Preparation of oxygen-rich gas by pressure changing adsorption method under atmospheric pressure |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05305214A (en) * | 1992-04-28 | 1993-11-19 | Kanebo Ltd | Separation of oxygen gas |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0372326B2 (en) | 1991-11-18 |
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