JPS63102757U - - Google Patents
Info
- Publication number
- JPS63102757U JPS63102757U JP19514786U JP19514786U JPS63102757U JP S63102757 U JPS63102757 U JP S63102757U JP 19514786 U JP19514786 U JP 19514786U JP 19514786 U JP19514786 U JP 19514786U JP S63102757 U JPS63102757 U JP S63102757U
- Authority
- JP
- Japan
- Prior art keywords
- current
- pvd
- thyristor
- flash
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011084 recovery Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 241000219793 Trifolium Species 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Power Conversion In General (AREA)
Description
第１図はこの考案の一実施例の構成を示す回路
図、第２図はＰＶＤ装置のバイアス回路の既提案
例を示す回路図、第３図は第１図および第２図の
各部の波形図である。
１……交流電源、２……限流インピーダンス素
子、３……全波整流器、３Ｅ，３Ｆ……サイリス
タ、４……クローバサイリスタ、６……ＰＶＤ装
置、６Ａ，６Ｂ……バイアス電圧端子、７……塞
流インピーダンス素子、８……主点弧回路、１１
……副点弧回路、１２……リアクトル、１３……
抵抗器、１４……ダンパ用ダイオード。
Figure 1 is a circuit diagram showing the configuration of an embodiment of this invention, Figure 2 is a circuit diagram showing an already proposed example of a bias circuit for a PVD device, and Figure 3 is a waveform of each part in Figures 1 and 2. It is a diagram. 1... AC power supply, 2... Current limiting impedance element, 3... Full wave rectifier, 3E, 3F... Thyristor, 4... Clover thyristor, 6... PVD device, 6A, 6B... Bias voltage terminal, 7 ... Obstruction impedance element, 8 ... Main ignition circuit, 11
... Sub-ignition circuit, 12 ... Reactor, 13 ...
Resistor, 14...Damper diode.
Claims (1)
素子および少なくとも隣接する２辺の構成要素を
サイリスタとしたブリツジ型の全波整流器を直列
に介してクローバサイリスタを接続し、このクロ
ーバサイリスタの両端を寒流インピーダンス素子
を介してＰＶＤ装置の一対のバイアス電圧端子に
接続し、前記ＰＶＤ装置の電極間閃絡を検出して
前記クローバサイリスタにパルス状の点弧電流を
加える主点弧回路を設けるとともに、前記ＰＶＤ
装置の電極間閃絡を検出して前記サイリスタへの
点弧電流の供給を遮断し前記ＰＶＤ装置の電極間
閃絡の回復後復旧させる副点弧回路を設けたＰＶ
Ｄ装置のバイアス回路において、 前記限流インピーダンス素子と並列にリアクト
ルおよび抵抗器の直列回路を接続し、前記リアク
トルと並列にダンパ用ダイオードを接続したこと
を特徴とするＰＶＤ装置のバイアス回路。[Claims for Utility Model Registration] A crowbar thyristor is connected in series to an AC power source through a current-limiting impedance element consisting of a lamp and a bridge-type full-wave rectifier in which thyristors are the components on at least two adjacent sides. a main ignition circuit that connects both ends of the thyristor to a pair of bias voltage terminals of a PVD device via a cold current impedance element, detects a flash between electrodes of the PVD device, and applies a pulsed ignition current to the crowbar thyristor; and the PVD
A PV device equipped with a sub-ignition circuit that detects a flash between electrodes of the device, cuts off the supply of ignition current to the thyristor, and restores the PVD device after recovery from the flash between the electrodes of the PVD device.
D. A bias circuit for a PVD device, characterized in that a series circuit of a reactor and a resistor is connected in parallel with the current limiting impedance element, and a damper diode is connected in parallel with the reactor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19514786U JPS63102757U (en) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19514786U JPS63102757U (en) | 1986-12-18 | 1986-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102757U true JPS63102757U (en) | 1988-07-04 |
Family
ID=31152770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19514786U Pending JPS63102757U (en) | 1986-12-18 | 1986-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102757U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03191056A (en) * | 1989-12-19 | 1991-08-21 | Mitsubishi Electric Corp | Thin film forming device |
-
1986
- 1986-12-18 JP JP19514786U patent/JPS63102757U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03191056A (en) * | 1989-12-19 | 1991-08-21 | Mitsubishi Electric Corp | Thin film forming device |
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