JPS63102766U - - Google Patents

Info

Publication number
JPS63102766U
JPS63102766U JP1986204094U JP20409486U JPS63102766U JP S63102766 U JPS63102766 U JP S63102766U JP 1986204094 U JP1986204094 U JP 1986204094U JP 20409486 U JP20409486 U JP 20409486U JP S63102766 U JPS63102766 U JP S63102766U
Authority
JP
Japan
Prior art keywords
boat
cooling
carbon
liquid phase
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986204094U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986204094U priority Critical patent/JPS63102766U/ja
Publication of JPS63102766U publication Critical patent/JPS63102766U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の液相エピタキシヤル成長装置
の縦断面図、第２図は実施例２の縦断面図、第３
図は従来の液相エピタキシヤル成長装置の断面図
である。 １……カーボンボート、２……反応管、３……
抵抗ヒータ、４……スライダー・メルトカツト駆
動部、５……ボート移動機構、６，９，１３，１
４……ボート冷却室、７……ゲートバルブ、８…
…ボート上下移動機構、１０……シヤツター、１
１……フロントハツチ、１２……作業ＢＯＸ、１
５……ハツチ、１６……ボート搬送系。 FIG. 1 is a vertical cross-sectional view of the liquid phase epitaxial growth apparatus of the present invention, FIG. 2 is a vertical cross-sectional view of Example 2, and FIG.
The figure is a cross-sectional view of a conventional liquid phase epitaxial growth apparatus. 1...Carbon boat, 2...Reaction tube, 3...
Resistance heater, 4...Slider/melt cut drive unit, 5...Boat moving mechanism, 6, 9, 13, 1
4... Boat cooling room, 7... Gate valve, 8...
...Boat vertical movement mechanism, 10...Shutter, 1
1...Front hatch, 12...Work box, 1
5...Hatsuchi, 16...Boat transport system.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 作業ＢＯＸ内の基板搭載用カーボンボートを反
応管内に該ボートを冷却させるボート冷却室を介
して出し入れする液相エピタキシヤル成長装置に
おいて、前記カーボンボートを冷却させる第２の
ボート冷却室を前記第１のボート冷却室に隣接し
て付設し、さらに反応管から第１のボート冷却室
に搬送されたカーボンボートを第２のボート冷却
室に移送する搬送系及び第２のボート冷却室から
作業ＢＯＸ内にカーボンボートを帰還させる搬送
系を具備したことを特徴とする液相エピタキシヤ
ル成長装置。 In a liquid phase epitaxial growth apparatus in which a carbon boat for mounting a substrate in a work box is taken in and out of a reaction tube through a boat cooling chamber for cooling the boat, a second boat cooling chamber for cooling the carbon boat is connected to the first boat cooling chamber. A transport system is installed adjacent to the boat cooling room, and a transfer system for transferring the carbon boat transported from the reaction tube to the first boat cooling room to the second boat cooling room, and a transport system from the second boat cooling room to the inside of the work box. A liquid phase epitaxial growth apparatus characterized by comprising a transport system for returning a carbon boat to a liquid phase epitaxial growth apparatus.
JP1986204094U 1986-12-24 1986-12-24 Pending JPS63102766U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986204094U JPS63102766U (en) 1986-12-24 1986-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986204094U JPS63102766U (en) 1986-12-24 1986-12-24

Publications (1)

Publication Number Publication Date
JPS63102766U true JPS63102766U (en) 1988-07-04

Family

ID=31170032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986204094U Pending JPS63102766U (en) 1986-12-24 1986-12-24

Country Status (1)

Country Link
JP (1) JPS63102766U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004003262A1 (en) * 2002-06-28 2004-01-08 Sharp Kabushiki Kaisha Thin sheet production method and thin sheet production device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004003262A1 (en) * 2002-06-28 2004-01-08 Sharp Kabushiki Kaisha Thin sheet production method and thin sheet production device
US7186578B2 (en) 2002-06-28 2007-03-06 Sharp Kabushiki Kaisha Thin sheet production method and thin sheet production device
CN1324657C (en) * 2002-06-28 2007-07-04 夏普株式会社 Thin plate manufacturing method and thin plate manufacturing apparatus
US7485477B2 (en) 2002-06-28 2009-02-03 Sharp Kabushiki Kaisha Thin plate manufacturing method and thin plate manufacturing apparatus

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