JPS63103741U - - Google Patents
Info
- Publication number
- JPS63103741U JPS63103741U JP19792686U JP19792686U JPS63103741U JP S63103741 U JPS63103741 U JP S63103741U JP 19792686 U JP19792686 U JP 19792686U JP 19792686 U JP19792686 U JP 19792686U JP S63103741 U JPS63103741 U JP S63103741U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- semiconductor element
- utility
- model registration
- thermal shock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000035939 shock Effects 0.000 claims 2
- 230000005679 Peltier effect Effects 0.000 claims 1
- 238000005192 partition Methods 0.000 description 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19792686U JPS63103741U (2) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19792686U JPS63103741U (2) | 1986-12-23 | 1986-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63103741U true JPS63103741U (2) | 1988-07-05 |
Family
ID=31158141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19792686U Pending JPS63103741U (2) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63103741U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11105800A (ja) * | 1997-10-01 | 1999-04-20 | Nec Eng Ltd | 熱真空チャンバ |
-
1986
- 1986-12-23 JP JP19792686U patent/JPS63103741U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11105800A (ja) * | 1997-10-01 | 1999-04-20 | Nec Eng Ltd | 熱真空チャンバ |
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