JPS6310546U - - Google Patents

Info

Publication number
JPS6310546U
JPS6310546U JP10321686U JP10321686U JPS6310546U JP S6310546 U JPS6310546 U JP S6310546U JP 10321686 U JP10321686 U JP 10321686U JP 10321686 U JP10321686 U JP 10321686U JP S6310546 U JPS6310546 U JP S6310546U
Authority
JP
Japan
Prior art keywords
core tube
furnace core
heat treatment
processed
treatment apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10321686U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10321686U priority Critical patent/JPS6310546U/ja
Publication of JPS6310546U publication Critical patent/JPS6310546U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図及び第２図は本考案の実施例に係る加熱
処理装置を示し、第１図は全体概略説明図、第２
図は炉芯管の要部構成を示す斜視図である。第３
図及び第４図は従来技術に係る加熱処理装置を示
す全体概略説明図である。 １：炉芯管、２：駆動手段、３：被処理物、４
：被処理物塔載体、５：蓋体、６：開口部、７：
加熱炉。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 炉芯管内に装填された半導体ウエハー等の
    被処理物を熱処理する装置において、炉芯管を軸
    線方向に移動させる手段と、該炉芯管の周面方向
    より被処理物又は／及び被処理物塔載体を搬出入
    する手段とからなる事を特徴とする熱処理装置。 (2) 前記搬出入手段が、炉芯管の被処理物又は
    ／及び被処理物塔載体設置位置と対応する位置に
    形成された、蓋体により隠蔽可能な開口部である
    実用新案登録請求の範囲第１項記載の熱処理装置
    。 (3) 前記開口部が、炉芯管周囲に囲繞された加
    熱炉より抜出される位置まで炉芯管を移動可能に
    構成した実用新案登録請求の範囲第２項記載の熱
    処理装置。 (4) 前記炉芯管の片側を保持する駆動手段によ
    り、該炉芯管が軸線方向に移動可能に構成した実
    用新案登録請求の範囲第１項から第３項までのい
    ずれか１項記載の熱処理装置。
JP10321686U 1986-07-07 1986-07-07 Pending JPS6310546U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10321686U JPS6310546U (ja) 1986-07-07 1986-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10321686U JPS6310546U (ja) 1986-07-07 1986-07-07

Publications (1)

Publication Number Publication Date
JPS6310546U true JPS6310546U (ja) 1988-01-23

Family

ID=30975564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10321686U Pending JPS6310546U (ja) 1986-07-07 1986-07-07

Country Status (1)

Country Link
JP (1) JPS6310546U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58204529A (ja) * 1982-05-24 1983-11-29 Toshiba Corp 半導体ウエハ−の熱処理炉

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58204529A (ja) * 1982-05-24 1983-11-29 Toshiba Corp 半導体ウエハ−の熱処理炉

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