JPS63105996A - Surface treatment of metallic bar - Google Patents
Surface treatment of metallic barInfo
- Publication number
- JPS63105996A JPS63105996A JP25241786A JP25241786A JPS63105996A JP S63105996 A JPS63105996 A JP S63105996A JP 25241786 A JP25241786 A JP 25241786A JP 25241786 A JP25241786 A JP 25241786A JP S63105996 A JPS63105996 A JP S63105996A
- Authority
- JP
- Japan
- Prior art keywords
- bar
- tank
- plating
- metal strip
- surface treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroplating Methods And Accessories (AREA)
- Metal Rolling (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は例えば半導体素子のリードフレーム材として
利用される金属条材の表面処理方法に関するものである
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for surface treatment of a metal strip used as a lead frame material of a semiconductor element, for example.
電子機器に多数使用されている半導体素子のリードフレ
ーム材料は、一般に打抜加工またはエツチング加工によ
りリードフレームに成形された後。Lead frame materials for semiconductor devices, which are used in many electronic devices, are generally formed into lead frames by punching or etching.
全面にNiめっきが施され、半導体チップが装置される
ダイノセットおよび半導体チップとワイヤボンディング
されるリードに部分的にAgめっきが施される。Ni plating is applied to the entire surface, and Ag plating is applied to parts of the dyno set in which the semiconductor chip is mounted and the leads to which the semiconductor chip is wire-bonded.
しかしながら近年では、このAgめつきを省略する試み
がなされており、同時に従来のワイヤボンディング材料
であるAuまたはAlの細線の代わりにCu細線を用い
る、いわゆるダイレクトボンディング技術の開発が盛ん
に行われている。However, in recent years, attempts have been made to omit this Ag plating, and at the same time, so-called direct bonding technology, which uses thin Cu wires instead of thin wires of Au or Al, which are conventional wire bonding materials, has been actively developed. There is.
このダイレクトボンディング技術は、銅合金素地とCu
細線を直接接合する技術であるが、接合の信頼性をより
高めるために、りん青銅等の銅合金系リードフレーム材
表面に銅を被覆した材料を使用する試みが一部ではなさ
れているのが現状である。This direct bonding technology connects copper alloy base and Cu
This is a technology that directly joins thin wires, but some attempts have been made to use copper-coated materials such as phosphor bronze on the surface of copper alloy lead frame materials to improve the reliability of the joint. This is the current situation.
第2図は従来のこの種のリードフレーム材に銅を被覆す
るための連続的な表面処理方法を示す工程図である。図
において、(1)は金属条材、(2)はアルカリ電解脱
脂槽、(3)は酸洗浄槽、(4)はめつき槽、(5)は
水洗槽、(6)は変色防止処理槽、(7)は乾燥装置で
ある。従来の表面処理方法では、所定板厚に圧延加工し
たリードフレーム材たる金属条材(1)を連続的に移動
させながら、アルカリ電解脱脂槽(2)におけるアルカ
リ電解脱脂、酸洗浄槽(3)における酸洗浄等の前処理
を施した後、めっき槽(4)でめっきが施されて金属条
材(1)の表面にめっき金冠の被膜が形成される。この
場合、各処理工程間には水洗槽(5)による水洗が入り
、最終的には変色防止処理槽(6)における変色防止処
理および乾燥装置(7)における乾燥を経て、再びコイ
ル状に巻き取られるものであった。FIG. 2 is a process diagram showing a conventional continuous surface treatment method for coating this type of lead frame material with copper. In the figure, (1) is a metal strip, (2) is an alkaline electrolytic degreasing tank, (3) is an acid cleaning tank, (4) is a plating tank, (5) is a water washing tank, and (6) is a discoloration prevention treatment tank. , (7) is a drying device. In the conventional surface treatment method, a metal strip (1), which is a lead frame material rolled to a predetermined thickness, is continuously moved while being subjected to alkaline electrolytic degreasing in an alkaline electrolytic degreasing tank (2) and acid cleaning tank (3). After performing pretreatment such as acid cleaning in , plating is performed in a plating bath (4) to form a coat of a plated gold crown on the surface of the metal strip (1). In this case, between each treatment process, water is washed in a water washing tank (5), and finally, after undergoing discoloration prevention treatment in a discoloration prevention treatment tank (6) and drying in a drying device (7), it is coiled again. It was to be taken.
上記のような従来の表面処理方法では、たとえ変色防止
処理を施したとしても、めっき表面が極めて活性度の高
い析出金冠粒子であるために、比較的短時間で変色して
しまい、例えば銅めっきを施したリードフレーム材では
、ダイレクトボンディングに悪影響を及ぼすという問題
点があった。In the conventional surface treatment methods described above, even if anti-discoloration treatment is applied, the plating surface is made of precipitated gold crown particles with extremely high activity, so it discolors in a relatively short period of time.For example, copper plating Lead frame materials subjected to this treatment had a problem in that they had an adverse effect on direct bonding.
この発明はかかる問題点を解決するためになされたもの
で、長時間変色しない被膜を形成できる金冠条材の表面
処理方法を得ることを目的とする。The present invention was made to solve these problems, and an object of the present invention is to provide a surface treatment method for gold crown strips that can form a coating that does not discolor for a long time.
この発明にかかる金属条材の表面処理方法は、金冠条材
を連続的に移動させながらめっきを施した後、引続いて
圧延加工を行う方法である。The method for surface treatment of a metal strip according to the present invention is a method in which a metal strip is plated while being continuously moved, and then rolled.
この発明において、母材となる金属条材としてはリード
フレーム材として使用される銅合金などがあるが、これ
に限定されない。またこの金属条材に施されるめっきと
しては銅めっきなど、それぞれの金属条材に応じて逍ば
れるものがあり、一般的には母材である金属条材とは別
の金冠のめつきであり、従来と同様にして行われる。圧
延加工は金属条材の表面に圧延油を付着させて行い、塑
性変形を生じさせる。In this invention, the metal strip serving as the base material includes a copper alloy used as a lead frame material, but is not limited thereto. In addition, the plating applied to this metal strip varies depending on each metal strip, such as copper plating, and generally it is a gold crown plating that is different from the base metal strip. Yes, it is done in the same way as before. Rolling is performed by applying rolling oil to the surface of the metal strip to cause plastic deformation.
この発明の金属条材の表面処理方法においては、金属条
材を連続的に移動させながらめっきを施した後、引続い
て圧延加工を行うことにより金属条材に表面処理を行う
。この場合、活性度の高い状態にあるめっき被膜を金冠
条材に形成した後、極めて短時間のうちに、めっきされ
た金属条材に圧延油を付着して、空気を遮断した状態で
、圧延加工による塑性変形を施すので、極度に活性度の
高い状態が失われて安定な表面状態となり、変色が防止
される。In the method for surface treatment of a metal strip of the present invention, the metal strip is plated while being moved continuously, and then rolled to perform surface treatment on the metal strip. In this case, after a highly active plating film is formed on the gold crown strip, rolling oil is applied to the plated metal strip within a very short period of time, and the plated metal strip is rolled with rolling oil blocked from air. Since plastic deformation is applied through processing, the extremely highly active state is lost, resulting in a stable surface state and preventing discoloration.
第1図はこの発明の一実施例を示す金属条材の表面処理
方法の工程図であり、図において、(1)〜(5)およ
び(7)は第2図と同一または相当部分を示す。(8)
は連続走行するめっき後の金属条材(1)の板厚を連続
測定する板厚計、(9)は圧延ロールであって、板厚計
(8)の測定値により加圧制御させるものである。(1
0)は溶剤脱脂槽であり、金属条材(1)を有機溶剤に
浸漬して、圧延加工中に付着した圧延油を除去する役割
をもつ。FIG. 1 is a process diagram of a method for surface treatment of metal strips showing an embodiment of the present invention, and in the figure, (1) to (5) and (7) indicate the same or equivalent parts as in FIG. 2. . (8)
1 is a plate thickness meter that continuously measures the thickness of the plated metal strip (1) that is continuously running, and 9 is a rolling roll whose pressure is controlled based on the measured value of the plate thickness meter (8). be. (1
0) is a solvent degreasing tank, which has the role of immersing the metal strip (1) in an organic solvent to remove rolling oil adhering during rolling.
金属条材の表面処理方法は、まず金冠条材(1)を連続
的に移動させながら、アルカリ電解脱脂槽(2)におけ
るアルカリ電解脱脂、酸洗浄槽(3)における酸洗浄等
の前処理を施した後、めっき槽(4)におけるめっきに
より金冠被膜を形成し、水洗槽(5)における水洗後そ
のまま乾燥装置(7)における乾燥を施す。この工程に
引続いて、板厚計(8)により板厚を測定し、その測定
値により加圧制御しながら、金属条材(1)の表面に圧
延油を付着させて、圧延ロール(9)による圧延加工を
施し、溶剤脱脂槽(10)において有機溶剤により脱脂
して圧延油を除去する。この場合、めっき被膜表面が極
めて活性度の高い状態はごく短時間に限られ、このため
めっき金属原子と条材金属原子との拡散の進行は全く無
視でき、めっき加工を施した条材をその後に圧延する方
法に比べ、経時変化がなく、安定した表面状態が得られ
る。The method for surface treatment of metal strips involves first performing pretreatments such as alkaline electrolytic degreasing in an alkaline electrolytic degreasing tank (2) and acid cleaning in an acid cleaning tank (3) while continuously moving the metal strip (1). After that, a gold crown coating is formed by plating in a plating tank (4), and after washing in a water washing tank (5), drying is performed in a drying device (7). Following this process, the plate thickness is measured using a plate thickness meter (8), and while controlling the pressure based on the measured value, rolling oil is applied to the surface of the metal strip (1), and the rolling roll (9) is applied to the surface of the metal strip (1). ) and degreased with an organic solvent in a solvent degreasing tank (10) to remove rolling oil. In this case, the state in which the surface of the plating film is extremely highly active is limited to a very short period of time, and therefore the progress of diffusion between the plating metal atoms and the strip metal atoms can be completely ignored, and the plated strip material is then Compared to the rolling method, there is no change over time and a stable surface condition can be obtained.
実験によると、第1図に例示した方法によって、アルカ
リ電解脱脂、酸洗浄を施した板厚0.3nnのりん青銅
条(C5101R)を、一般に中濃度浴として知られて
いる青化浴により銅めっきを15μm施し、乾燥後、直
径250nnの圧延ロールにより5μmのスキンパスを
行い、1,1.1−トリクロロエタンに浸漬して圧延油
を除去したところ、室温での保存状態において、充分に
変色の発生が防止できた。According to experiments, a phosphor bronze strip (C5101R) with a thickness of 0.3 nm, which had been subjected to alkaline electrolytic degreasing and acid cleaning, was treated with copper in a cyanizing bath, generally known as a medium concentration bath, using the method illustrated in Figure 1. Plating was applied to 15 μm, and after drying, a 5 μm skin pass was performed using a rolling roll with a diameter of 250 nn, and when the rolling oil was removed by immersion in 1,1.1-trichloroethane, sufficient discoloration occurred when stored at room temperature. could be prevented.
、 ところで上記説明では、リードフレーム材の表面に
銅の被膜を形成する場合について述べたが、他に変色感
受性の高い全屈の被膜を形成する場合にも適用できるこ
とば釘うまでもない。また、溶剤脱脂中あるいはその後
に適当な変色防止処理を施すことを妨げるものではない
。圧延加工は数μm程度のスキンパスでもよく、金属条
材の材料強度および形状の変化が許容される範囲内であ
れば、大きな加工率の塑性変形を施してもこの発明の目
的は達しうるものである。By the way, in the above explanation, the case where a copper coating is formed on the surface of the lead frame material is described, but it goes without saying that it can also be applied to the case of forming a fully curved coating that is highly sensitive to discoloration. Furthermore, this does not preclude applying an appropriate discoloration prevention treatment during or after solvent degreasing. The rolling process may be performed by a skin pass of approximately several μm, and the object of the present invention can be achieved even if plastic deformation is performed at a large processing rate, as long as changes in the material strength and shape of the metal strip are within an acceptable range. be.
この発明は以上説明したとおり、金属条材を連続的に移
動させながらめっきを施した後、引続いて圧延加工を施
すという簡単な方法により、条材表面に形成した金属被
膜の変色を防止できるという効果がある。As explained above, this invention can prevent discoloration of the metal coating formed on the surface of the strip by a simple method of plating the strip while continuously moving it and then rolling it. There is an effect.
第1図はこの発明の一実施例を示す工程図、第2図は従
来の金属条材の表面処理方法を示す工程図である。
図において、(1)は金属条材、(4)はめっき槽、(
5)は水洗槽、(7)は乾燥装置、(9)は圧延ロール
、(10)は溶剤脱脂槽である。
なお、各図中、同一符号は同一または相当部分を示す。FIG. 1 is a process diagram showing an embodiment of the present invention, and FIG. 2 is a process diagram showing a conventional surface treatment method for metal strips. In the figure, (1) is a metal strip, (4) is a plating tank, (
5) is a washing tank, (7) is a drying device, (9) is a rolling roll, and (10) is a solvent degreasing tank. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (2)
た後、引続いて圧延加工を行うことを特徴とする金属条
材の表面処理方法。(1) A method for surface treatment of a metal strip, characterized in that the metal strip is plated while being moved continuously, and then rolled.
ことを特徴とする特許請求の範囲第1項記載の金属条材
の表面処理方法。(2) The method for surface treatment of a metal strip according to claim 1, wherein the plating is made of a metal different from that of the metal strip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25241786A JPS63105996A (en) | 1986-10-23 | 1986-10-23 | Surface treatment of metallic bar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25241786A JPS63105996A (en) | 1986-10-23 | 1986-10-23 | Surface treatment of metallic bar |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63105996A true JPS63105996A (en) | 1988-05-11 |
Family
ID=17237063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25241786A Pending JPS63105996A (en) | 1986-10-23 | 1986-10-23 | Surface treatment of metallic bar |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63105996A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02117701A (en) * | 1988-10-25 | 1990-05-02 | Mitsui High Tec Inc | Manufacture of composite material for lead frame |
-
1986
- 1986-10-23 JP JP25241786A patent/JPS63105996A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02117701A (en) * | 1988-10-25 | 1990-05-02 | Mitsui High Tec Inc | Manufacture of composite material for lead frame |
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