JPS63108628U - - Google Patents

Info

Publication number
JPS63108628U
JPS63108628U JP20169286U JP20169286U JPS63108628U JP S63108628 U JPS63108628 U JP S63108628U JP 20169286 U JP20169286 U JP 20169286U JP 20169286 U JP20169286 U JP 20169286U JP S63108628 U JPS63108628 U JP S63108628U
Authority
JP
Japan
Prior art keywords
heat treatment
reaction tube
semiconductor heat
wall
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20169286U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20169286U priority Critical patent/JPS63108628U/ja
Publication of JPS63108628U publication Critical patent/JPS63108628U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図ないし第３図は、この考案の各実施例に
係る半導体熱処理装置用反応管の横断面図、第４
図は、公知の半導体熱処理装置用反応管の横断面
図である。 １０，２０，３０：反応管、１１：反応管の内
壁、１２，２２，３２：ウエーハ、１４，２４，
３４：間隙（反応ガスの流路）、２５，３５：オ
リフラ、２７：円弧部材、３８：熱電対保護管。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) ウエーハと相似な形状の壁面を持つ半導体
    熱処理装置用反応管。 (2) 内壁自体をウエーハと相似な形状にした実
    用新案登録請求の範囲第１項記載の半導体熱処理
    装置用反応管。 (3) 円形の内壁に隔壁部材を取付けた実用新案
    登録請求の範囲第１項記載の半導体熱処理装置用
    反応管。 (4) ウエーハのオリフラと平行に、複数の熱電
    対保護管を内壁に取付けた実用新案登録請求の範
    囲第１項記載の半導体熱処理装置用反応管。
JP20169286U 1986-12-27 1986-12-27 Pending JPS63108628U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20169286U JPS63108628U (ja) 1986-12-27 1986-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20169286U JPS63108628U (ja) 1986-12-27 1986-12-27

Publications (1)

Publication Number Publication Date
JPS63108628U true JPS63108628U (ja) 1988-07-13

Family

ID=31165381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20169286U Pending JPS63108628U (ja) 1986-12-27 1986-12-27

Country Status (1)

Country Link
JP (1) JPS63108628U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613720A (en) * 1979-07-16 1981-02-10 Fujitsu Ltd Heat treating device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613720A (en) * 1979-07-16 1981-02-10 Fujitsu Ltd Heat treating device

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