JPS63108629U - - Google Patents
Info
- Publication number
- JPS63108629U JPS63108629U JP1987000296U JP29687U JPS63108629U JP S63108629 U JPS63108629 U JP S63108629U JP 1987000296 U JP1987000296 U JP 1987000296U JP 29687 U JP29687 U JP 29687U JP S63108629 U JPS63108629 U JP S63108629U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion material
- bubbler
- liquid diffusion
- carrier gas
- inlet pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987000296U JPS63108629U (mo) | 1987-01-07 | 1987-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987000296U JPS63108629U (mo) | 1987-01-07 | 1987-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63108629U true JPS63108629U (mo) | 1988-07-13 |
Family
ID=30777137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987000296U Pending JPS63108629U (mo) | 1987-01-07 | 1987-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63108629U (mo) |
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1987
- 1987-01-07 JP JP1987000296U patent/JPS63108629U/ja active Pending