JPS63120030U - - Google Patents

Info

Publication number
JPS63120030U
JPS63120030U JP1072387U JP1072387U JPS63120030U JP S63120030 U JPS63120030 U JP S63120030U JP 1072387 U JP1072387 U JP 1072387U JP 1072387 U JP1072387 U JP 1072387U JP S63120030 U JPS63120030 U JP S63120030U
Authority
JP
Japan
Prior art keywords
clean
clean room
ceiling
exhaust port
taken
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1072387U
Other languages
English (en)
Other versions
JPH0416099Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987010723U priority Critical patent/JPH0416099Y2/ja
Publication of JPS63120030U publication Critical patent/JPS63120030U/ja
Application granted granted Critical
Publication of JPH0416099Y2 publication Critical patent/JPH0416099Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)

Description

【図面の簡単な説明】
第１図は、この考案をダウンフロー型クリーン
トンネルに適用した一実施例の清浄室装置の概略
縦断面図、第２図は同じくコンベンシヨナル型ク
リーントンネルに適用した他の実施例の第１図相
当図、第３図は、従来例の第１図相当図、第４図
は、従来例の第２図相当図である。 １……クリーンルーム、１Ｔ１……エピタキシ
ヤル装置側天井、３……排気口、６……排風機。

Claims (1)

    【実用新案登録請求の範囲】
  1. クリーントンネルシステムにおいて、作業装置
    側の天井の一部に排気口を設け、排風機により吸
    気し排除する構成としたことを特徴とする清浄室
    装置。
JP1987010723U 1987-01-29 1987-01-29 Expired JPH0416099Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987010723U JPH0416099Y2 (ja) 1987-01-29 1987-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987010723U JPH0416099Y2 (ja) 1987-01-29 1987-01-29

Publications (2)

Publication Number Publication Date
JPS63120030U true JPS63120030U (ja) 1988-08-03
JPH0416099Y2 JPH0416099Y2 (ja) 1992-04-10

Family

ID=30797284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987010723U Expired JPH0416099Y2 (ja) 1987-01-29 1987-01-29

Country Status (1)

Country Link
JP (1) JPH0416099Y2 (ja)

Also Published As

Publication number Publication date
JPH0416099Y2 (ja) 1992-04-10

Similar Documents

Publication Publication Date Title
JPS63120030U (ja)
JPS6272540U (ja)
JPS63120786U (ja)
JPH01122106U (ja)
JPS62171843U (ja)
JPS6229929U (ja)
JPS63102820U (ja)
JPH0160146U (ja)
JPS62145834U (ja)
JPS61177966U (ja)
JPS6223481U (ja)
JPS61185418U (ja)
JPS61104135U (ja)
JPS6159744U (ja)
JPH0184629U (ja)
JPS6343431U (ja)
JPS61109357U (ja)
JPS6216015U (ja)
JPS5891359U (ja) 電気掃除機
JPS61203843U (ja)
JPS63167495U (ja)
JPS626630U (ja)
JPS6243812U (ja)
JPS63130309U (ja)
JPS62192421U (ja)