JPS6312757U - - Google Patents

Info

Publication number
JPS6312757U
JPS6312757U JP10620786U JP10620786U JPS6312757U JP S6312757 U JPS6312757 U JP S6312757U JP 10620786 U JP10620786 U JP 10620786U JP 10620786 U JP10620786 U JP 10620786U JP S6312757 U JPS6312757 U JP S6312757U
Authority
JP
Japan
Prior art keywords
substrate
gas detection
gas
utility
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10620786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10620786U priority Critical patent/JPS6312757U/ja
Publication of JPS6312757U publication Critical patent/JPS6312757U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP10620786U 1986-07-10 1986-07-10 Pending JPS6312757U (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10620786U JPS6312757U (2) 1986-07-10 1986-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10620786U JPS6312757U (2) 1986-07-10 1986-07-10

Publications (1)

Publication Number Publication Date
JPS6312757U true JPS6312757U (2) 1988-01-27

Family

ID=30981350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10620786U Pending JPS6312757U (2) 1986-07-10 1986-07-10

Country Status (1)

Country Link
JP (1) JPS6312757U (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03130654A (ja) * 1989-10-14 1991-06-04 Fuji Electric Co Ltd ガスセンサ
WO1993016377A1 (fr) * 1992-02-14 1993-08-19 Seiko Epson Corporation Capteur d'humidite et son procede de fabrication

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199097A (ja) * 1975-02-26 1976-09-01 Kyoto Ceramic Gasukenchisoshi
JPS5246889A (en) * 1975-10-11 1977-04-14 Hitachi Ltd Solid electrolyte oxygen detector
JPS5549706A (en) * 1978-10-02 1980-04-10 Omron Tateisi Electronics Co Pi or pid regulator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199097A (ja) * 1975-02-26 1976-09-01 Kyoto Ceramic Gasukenchisoshi
JPS5246889A (en) * 1975-10-11 1977-04-14 Hitachi Ltd Solid electrolyte oxygen detector
JPS5549706A (en) * 1978-10-02 1980-04-10 Omron Tateisi Electronics Co Pi or pid regulator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03130654A (ja) * 1989-10-14 1991-06-04 Fuji Electric Co Ltd ガスセンサ
WO1993016377A1 (fr) * 1992-02-14 1993-08-19 Seiko Epson Corporation Capteur d'humidite et son procede de fabrication

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