JPS6312831U - - Google Patents
Info
- Publication number
- JPS6312831U JPS6312831U JP10619886U JP10619886U JPS6312831U JP S6312831 U JPS6312831 U JP S6312831U JP 10619886 U JP10619886 U JP 10619886U JP 10619886 U JP10619886 U JP 10619886U JP S6312831 U JPS6312831 U JP S6312831U
- Authority
- JP
- Japan
- Prior art keywords
- push rod
- tube
- furnace
- boat
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 7
- 238000011017 operating method Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Description
第１図は本考案押し込み棒の実施例を示す構成
図、第２図は本考案の押し込み棒によりウエーハ
搭載のボートを拡散チユーブ内に挿入した構成図
、第３図は本考案の押し込み棒を用いた拡散チユ
ーブの温度制御ループの構成図、第４図はその操
作手順を示すフロー図、第５図は従来技術の一例
を示す構成図、第６図はその操作手順を示すフロ
ー図である。
１……拡散チユーブ、２……保護管、３……ヒ
ーター、４１，４２，４３……熱電対、５……温
度調節計、６１，６２〜６ｎ……ウエーハ、７…
…ボート、８……押し込み棒、９……リード棒。
Fig. 1 is a block diagram showing an embodiment of the push rod of the present invention, Fig. 2 is a block diagram showing a boat loaded with wafers inserted into a diffusion tube using the push rod of the present invention, and Fig. 3 is a block diagram showing the push rod of the present invention. A configuration diagram of the temperature control loop of the diffusion tube used, FIG. 4 is a flow diagram showing its operating procedure, FIG. 5 is a configuration diagram showing an example of the conventional technology, and FIG. 6 is a flow diagram showing its operating procedure. . DESCRIPTION OF SYMBOLS 1...Diffusion tube, 2...Protective tube, 3...Heater, 41 , 42 , 43 ...Thermocouple, 5...Temperature controller, 61 , 62-6n ...Wafer, 7...
...Boat, 8... Push rod, 9... Lead rod.
Claims (1)
搭載したボートを押し込み又は取り出すための押
し込み棒の内部に、上記拡散チユーブ内温度を直
接測定するための温度センサーを内蔵せしめたこ
とを特徴とする半導体拡散炉用ボート押し込み棒
。 A semiconductor diffusion method characterized in that a temperature sensor for directly measuring the temperature inside the diffusion tube is built into a push rod for pushing or taking out a boat carrying a wafer to be diffused into the tube for a semiconductor diffusion furnace. Furnace boat push rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10619886U JPS6312831U (en) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10619886U JPS6312831U (en) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312831U true JPS6312831U (en) | 1988-01-27 |
Family
ID=30981332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10619886U Pending JPS6312831U (en) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312831U (en) |
-
1986
- 1986-07-10 JP JP10619886U patent/JPS6312831U/ja active Pending
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