JPS63128683A - Manufacture of electrostrictive element - Google Patents

Abstract

PURPOSE:To simplify manufacturing processes and to improve an element in its insulating capability by a method wherein every other end face of conductive layers in one side and the same in the opposite side of a laminate are covered by a mask, the end faces not masked are covered by an insulating material, sintering is accomplished, and then the mask is removed. CONSTITUTION:A piezoelectric sheet 100A is built of a piezoelectric material sheet 100 and an inner electrode 1 built of a conductive paste placed on the sheet 100 by printing. A plurality of piezoelectric sheets 100A are stacked one upon another, to be combined into a sintered laminate 110 by thermal contact bonding. Outer leadout electrodes 2 are printed on the sintered laminate 110. Next, an insulating resin 3 is electrodeposited on the end face of every other layer of inner electrodes 1 in one side and on the same in the opposite side, which results in a sintered laminate 110B. Glass powder is electrodeposited and them sintered on the end face of each of the inner electrodes 1 for the formation of a glass layer 4, and then the insulating resin 3 is burned and removed. A process follows wherein outer electrodes 5 are symmetrically formed by printing a conductive paste on the two opposing sides, and the electrodes 5 are subjected to sintering. Segmentation is accomplished in the direction, indicated by an arrow (a), so that an outer electrode 5 may be located at the middle of a side. By using this method, an electrostrictive element 130 provided with an excellent performance characteristics is manufactured.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention has a top layer and a bottom layer formed of an electrostrictive material, and 61 layers of an electrostrictive material and a conductive material alternately formed between the top layer and the bottom layer. All of the end faces of the conductive material are exposed from one opposing side of the laminate, and the end faces of every other conductive material are exposed from the other both sides, and no end faces of the conductive material are exposed. The present invention relates to a method of manufacturing an electrostrictive element in which an insulator is adhered to the end face.

[Conventional technology]

Conventionally, this type of electric work effect element is made by depositing glass powder on the end face of the conductive material on one side of the surface where all the ends of the conductive material are exposed every other layer by electrophoresis, and then firing it. ,
Among the end faces of the conductive material exposed on the side surface opposite to the side surface on which the glass powder has been deposited, glass powder is deposited and fired on the end surface of the conductive material to which the glass powder is not deposited. It was manufactured by

(Problems to be Solved by the Invention) In the conventional manufacturing method of the electrostrictive effect element described above, a voltage opposite to that applied to the layer of the conductive material on which the glass powder is to be electrodeposited is applied to the layer of the conductive material on which the glass powder is not to be attached. This has the disadvantage that a strong electric field is applied between adjacent layers of conductive material, causing the glass powder to be electrodeposited unevenly.In addition, if the opposite voltage is not applied, the glass powder may not be attached to adjacent layers. The drawback is that the glass powder is electrodeposited even on the layer of conductive material that is to be used.Furthermore, if the glass powder is melted during the firing process, air bubbles are likely to form in the glass, which causes the heat of the firing to There is a drawback that the glass on the side surface, which is subjected to hysteresis twice and is first deposited and fired, has a high proportion of bubbles, resulting in deterioration of its '1 north air characteristics and strength.

[Failure to solve the problem]

The manufacturing method of 7- for "electrostrictive effect" of the present invention includes the steps of: 1 masking the ends of the conductive material on one side of the laminate every other layer, in which the ends of all the conductive materials are exposed; , 0 "a step of masking an end face of the conductive material that is not masked among the conductive materials exposed on the other side surface opposite to the masked side surface; The method includes the steps of simultaneously depositing an insulator on both sides of the unmasked end portions of the conductive material on both sides of the body, firing it, and removing all the masking.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

Figures 1 to 1θ are process diagrams of an embodiment of the method for manufacturing the electrostrictive effect element f of the present invention, in which Figure 1 is an exploded perspective view showing the structure of a 41-layer body, and Figure 2 is the same as Figure 1. FIG. 3 is a perspective view of a sintered body 11OA on which an electrode 2 for external extraction is formed, and FIG. 4 is a perspective view of a sintered body 11OA formed with an insulating resin 3. FIG. 5 is a perspective view of the sintered body 110B with the insulating resin 3 formed on both sides, FIG. 6 is a side view of the sintered body 1108, and FIG. 7 is a perspective view of the sintered body 110. 8 is a side view of the sintered body 1108 of FIG. 7, FIG. 9 is a perspective view of the sintered body 110B on which the external electrode 5 is formed, and FIG. FIG. 10 is a perspective view of the electrostrictive element 130.

First, a conductive paste is printed on one surface of a piezoelectric sheet IOQ cut into a rectangular shape, leaving one end in a band shape, and this is used as the internal electrode 1 to form a piezoelectric sheet 100^ (first figure). Next, under the piezoelectric sheet +00 on which the internal mold ViA1 is not formed, internal electrodes +008 are laminated so that the strip-shaped portions are alternately located on the left and right to form a laminate, and this laminate is subjected to a pressure of Z9Q kg/ crn', thermocompression bonded at a temperature of 110° C. for 70 minutes, and then fired under conditions of a maximum holding temperature of 1120° C. and a holding time of 2 hours to produce a sintered body +10 (Figure 2). Next, external extraction electrodes 2 are printed on the left and right sides of the sintered body 110 where the end surfaces of the internal electrodes 1 are exposed every other layer, and the maximum holding temperature is 700°C.
A sintered body 1108 is produced by firing under conditions of a holding time of 15 minutes (Fig. 3). Next, this sintered body 1108 is set in a jig, and the entire sintered body +10^ is kept in a stirring state with a stirrer such as an EDR-2 (epoxy resin).
Corresponds to the side surface of the sintered body 110^ on which all internal electrodes are exposed by immersion in an aqueous solution of an insulating resin with electrodepositing properties such as the one on which the insulating resin 3 is to be electrodeposited. The insulating resin 3 is electrodeposited on every other layer on the internal electrode 1 by applying a DC voltage of 100 V for 3 minutes with the external lead electrode 2 set as negative (FIG. 4). After washing the sintered body +10^ in this state with pure water and completely wiping off the resin attached to the back side, the temperature was 180°C.
The electrodeposited insulating resin 3 is cured under the conditions of ℃ and 30 minutes. Next, among the internal electrodes 1 exposed on the side surface opposite to the side surface on which the insulating resin 3 is formed, the insulating resin 3
The insulating resin 3 is electrodeposited on the end face of the interior 'rrj, 74l which was not electrodeposited in the same manner as described above, and is cured to form a sintered body 110B with masking on both sides (Fig. 5, Figure 6). Next, this sintered body 110B is set in a jig, immersed in an ethanol solution of glass powder that is kept stirred with a stirrer, etc., and the negative side is connected to the internal/external extraction electrode 2, and a DC current is applied. Glass powder was electrodeposited on the end face of the unmasked internal electrode 1 by electrophoresis under conditions of a voltage of 10 V/ci and a time of 1 minute, and then glass powder was deposited under the conditions of a maximum holding temperature of 620°C and a holding time of 10 minutes. is fired to form a glass layer 4, and the insulating resin 3, which is a masking material, is burned and removed (FIGS. 7 and 8).

Next, a pattern of external electrodes 5 orthogonal to the internal voltage Vit is printed with conductive paste symmetrically on both opposing sides of the sintered body 110B on which the glass layer 4 is adhered, and the maximum holding temperature is 590°C. Sintered body 1 is fired under conditions of holding time 10 minutes.
Make 20 (Figure 9). This sintered body +20 is cut and separated in the direction of arrow a so that the external electrode 5 is located at the center of the side surface to obtain an electrostrictive effect element 7-13Or (FIG. 1O).

In the embodiments described above, an electrodepositable insulating resin was used for masking, but a photosensitive resin may also be used.

The masking process in this case is as follows. Apply a photosensitive insulating resin such as photovarnish to one of the opposing sides where the end faces of all the internal electrodes ViA1 of the sintered body +1OA with the external extraction electrodes 2 formed are exposed. After printing, the internal electrodes 1 were exposed to light in a pattern that formed every other layer of the insulating resin 3, and then developed.
Further, heat treatment is performed at 400° C. for 30 minutes to form insulating resin 3 on every other layer of internal electrode 1 . Next, the insulating resin 3 is formed in the same manner on the end face of the internal electrode 1 on which the insulating resin 3 is not formed among the internal electrodes Vi1 exposed on the other side. The subsequent steps are similar to those in the previous embodiment, and the electrostrictive effect element 130 shown in FIG. 10 is obtained.

〔Effect of the invention〕

As explained above, in the present invention, by adding a masking step, when glass powder is electrodeposited by electrophoresis on every other layer of internal electrodes on the surface where all internal electrodes are exposed, it is possible to remove Glass powder can be electrodeposited uniformly without glass powder adhering, there is no need to apply an opposite charge to the electrodes on which you do not want glass powder to be attached, and glass powder can be electrodeposited and fired on both sides at the same time. This simplifies the process, and since the glass powder is fired only once, the generation of air bubbles in the glass is eliminated and the electrical insulation and strength are improved.

[Brief Description of the Drawings] Fig. 1 is an exploded perspective view showing the structure of a laminate according to an embodiment of the method for manufacturing an electrostrictive element of the present invention, and Fig. 2 shows the laminate shown in Fig. 1 heated and pressed and fired. FIG. 3 is a perspective view of the sintered body 110^ in which the M for external extraction and the pole 2 are formed, and FIG. 4 is a perspective view of the sintered body +10^ in which the insulating resin 3 is formed.
, FIG. 5 is a perspective view of a sintered body 110B with insulating resin 3 formed on both sides, FIG. 6 is a side view of sintered body 110B, and FIG. 7 is a side view of sintered body 110B, and FIG. FIG. 8 is a perspective view of the sintered body 1108 in a state where the sintered body 110 in FIG.
A side view of B, FIG. 9 is a sintered body with external electrodes 5 formed +
The perspective view of 20 and the 1θth view are perspective views of the electrostrictive effect element 130. DESCRIPTION OF SYMBOLS 1... Internal electrode, 2... External lead-out electrode, 3... Insulating resin, 4... Glass layer, 5...
・External electrode, 100-...Piezoelectric sheet, 100^
...Piezoelectric sheets 110, 11 forming internal electrodes 1
0^, 11011.120-...Sintered body, +30-...
・Electrostrictive effect element. 110 Illustration of childbirth Figure 8 Figure 10

Claims (1)

[Claims] 1. A laminate in which the uppermost layer and the lowermost layer are formed of an electrostrictive material, and the electrostrictive material and the conductive material are alternately laminated between the uppermost layer and the lowermost layer; All the end faces of the conductive material are exposed from one opposing side, and the end faces of the conductive material are exposed every other layer from the other side, and an insulator is coated on the unexposed end faces. A method for manufacturing an electrostrictive element, which includes the steps of: masking every other layer of the end face of the conductive material on one side surface of the laminate where all the end faces of the conductive material are exposed; and the masked side surface. a step of masking an end face of the conductive material that is not masked among the conductive materials exposed on the other side surface facing the laminate; 1. A method for manufacturing an electrostrictive effect element, comprising the steps of: simultaneously depositing an insulator on both sides of an unconducted conductive material and firing it; and removing all the masking. 2. The method for manufacturing an electrostrictive effect element according to claim 1, wherein the masking is performed using an electrodepositable substance. 3. The method for manufacturing an electrostrictive effect element according to claim 1, wherein the masking is performed using a photosensitive material.