JPS63137934U - - Google Patents
Info
- Publication number
- JPS63137934U JPS63137934U JP2902987U JP2902987U JPS63137934U JP S63137934 U JPS63137934 U JP S63137934U JP 2902987 U JP2902987 U JP 2902987U JP 2902987 U JP2902987 U JP 2902987U JP S63137934 U JPS63137934 U JP S63137934U
- Authority
- JP
- Japan
- Prior art keywords
- die bonding
- voice coil
- electromagnetic force
- coil section
- bonding arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Die Bonding (AREA)
Description
第１図ａは本考案の第１の実施例を示す正面図
、ｂは同平面図、第２図ａは本考案の第２の実施
例を示す正面図、ｂは同平面図である。
１…ダイボンデイングアーム、２…スライドテ
ーブル、３…モータ、４…カム、５…カムフオロ
ア、６，７…センサ、８…ボイスコイル部、９…
吸着コレツト、１０…クランパ。
FIG. 1a is a front view showing a first embodiment of the present invention, FIG. 2b is a plan view thereof, and FIG. 2a is a front view showing a second embodiment of the present invention, and FIG. DESCRIPTION OF SYMBOLS 1...Die bonding arm, 2...Slide table, 3...Motor, 4...Cam, 5...Cam follower, 6, 7...Sensor, 8...Voice coil section, 9...
Suction collet, 10... Clamper.
Claims (1)
と、該ダイボンデイングアームを押上げる方向に
電磁力を発生するボイスコイル部と、該ボイスコ
イル部の発生電磁力を調整する制御部とからなる
ダイボンデイング荷重機構を装備したことを特徴
とするダイボンデイング装置。 A die bonding load mechanism includes a die bonding arm that applies a downward load, a voice coil section that generates an electromagnetic force in a direction to push up the die bonding arm, and a control section that adjusts the electromagnetic force generated by the voice coil section. A die bonding device characterized by being equipped with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2902987U JPS63137934U (en) | 1987-02-28 | 1987-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2902987U JPS63137934U (en) | 1987-02-28 | 1987-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137934U true JPS63137934U (en) | 1988-09-12 |
Family
ID=30832541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2902987U Pending JPS63137934U (en) | 1987-02-28 | 1987-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137934U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53139975A (en) * | 1977-05-12 | 1978-12-06 | Fujitsu Ltd | Production of multi-element semiconductor device |
-
1987
- 1987-02-28 JP JP2902987U patent/JPS63137934U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53139975A (en) * | 1977-05-12 | 1978-12-06 | Fujitsu Ltd | Production of multi-element semiconductor device |