JPS63137934U - - Google Patents

Info

Publication number
JPS63137934U
JPS63137934U JP2902987U JP2902987U JPS63137934U JP S63137934 U JPS63137934 U JP S63137934U JP 2902987 U JP2902987 U JP 2902987U JP 2902987 U JP2902987 U JP 2902987U JP S63137934 U JPS63137934 U JP S63137934U
Authority
JP
Japan
Prior art keywords
die bonding
voice coil
electromagnetic force
coil section
bonding arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2902987U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2902987U priority Critical patent/JPS63137934U/ja
Publication of JPS63137934U publication Critical patent/JPS63137934U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)

Description

【図面の簡単な説明】
第１図ａは本考案の第１の実施例を示す正面図
、ｂは同平面図、第２図ａは本考案の第２の実施
例を示す正面図、ｂは同平面図である。 １…ダイボンデイングアーム、２…スライドテ
ーブル、３…モータ、４…カム、５…カムフオロ
ア、６，７…センサ、８…ボイスコイル部、９…
吸着コレツト、１０…クランパ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 下向きの荷重を与えるダイボンデイングアーム
    と、該ダイボンデイングアームを押上げる方向に
    電磁力を発生するボイスコイル部と、該ボイスコ
    イル部の発生電磁力を調整する制御部とからなる
    ダイボンデイング荷重機構を装備したことを特徴
    とするダイボンデイング装置。
JP2902987U 1987-02-28 1987-02-28 Pending JPS63137934U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2902987U JPS63137934U (ja) 1987-02-28 1987-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2902987U JPS63137934U (ja) 1987-02-28 1987-02-28

Publications (1)

Publication Number Publication Date
JPS63137934U true JPS63137934U (ja) 1988-09-12

Family

ID=30832541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2902987U Pending JPS63137934U (ja) 1987-02-28 1987-02-28

Country Status (1)

Country Link
JP (1) JPS63137934U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53139975A (en) * 1977-05-12 1978-12-06 Fujitsu Ltd Production of multi-element semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53139975A (en) * 1977-05-12 1978-12-06 Fujitsu Ltd Production of multi-element semiconductor device

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