JPS63143798U - - Google Patents

Info

Publication number
JPS63143798U
JPS63143798U JP3612487U JP3612487U JPS63143798U JP S63143798 U JPS63143798 U JP S63143798U JP 3612487 U JP3612487 U JP 3612487U JP 3612487 U JP3612487 U JP 3612487U JP S63143798 U JPS63143798 U JP S63143798U
Authority
JP
Japan
Prior art keywords
rotor
stator
turbo
molecular pump
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3612487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3612487U priority Critical patent/JPS63143798U/ja
Publication of JPS63143798U publication Critical patent/JPS63143798U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP3612487U 1987-03-11 1987-03-11 Pending JPS63143798U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3612487U JPS63143798U (fr) 1987-03-11 1987-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3612487U JPS63143798U (fr) 1987-03-11 1987-03-11

Publications (1)

Publication Number Publication Date
JPS63143798U true JPS63143798U (fr) 1988-09-21

Family

ID=30846237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3612487U Pending JPS63143798U (fr) 1987-03-11 1987-03-11

Country Status (1)

Country Link
JP (1) JPS63143798U (fr)

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