JPS63145329U - - Google Patents
Info
- Publication number
- JPS63145329U JPS63145329U JP3675287U JP3675287U JPS63145329U JP S63145329 U JPS63145329 U JP S63145329U JP 3675287 U JP3675287 U JP 3675287U JP 3675287 U JP3675287 U JP 3675287U JP S63145329 U JPS63145329 U JP S63145329U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- arm
- holding surface
- buffer member
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 230000032258 transport Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3675287U JPS63145329U (2) | 1987-03-13 | 1987-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3675287U JPS63145329U (2) | 1987-03-13 | 1987-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145329U true JPS63145329U (2) | 1988-09-26 |
Family
ID=30847451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3675287U Pending JPS63145329U (2) | 1987-03-13 | 1987-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145329U (2) |
-
1987
- 1987-03-13 JP JP3675287U patent/JPS63145329U/ja active Pending
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