JPS63145866U - - Google Patents

Info

Publication number
JPS63145866U
JPS63145866U JP3780887U JP3780887U JPS63145866U JP S63145866 U JPS63145866 U JP S63145866U JP 3780887 U JP3780887 U JP 3780887U JP 3780887 U JP3780887 U JP 3780887U JP S63145866 U JPS63145866 U JP S63145866U
Authority
JP
Japan
Prior art keywords
molecular beam
crucible
beam source
evaporated material
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3780887U
Other languages
English (en)
Other versions
JPH0345953Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3780887U priority Critical patent/JPH0345953Y2/ja
Publication of JPS63145866U publication Critical patent/JPS63145866U/ja
Application granted granted Critical
Publication of JPH0345953Y2 publication Critical patent/JPH0345953Y2/ja
Expired legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は、この考案の一実施例を示す分子線源
の縦断面図、第２図は、分子線エピタキシー装置
の成膜室である真空チヤンバの概略構成図、第３
図は、一般的な分子線源の上記密度空間分布特性
線図、第４図は、一般的な分子線源の概略縦断面
図である。 ２……基板、２１……坩堝、２３……開口、２
４……底部、２６……ヒータ、５′……蒸発物（
溶湯）。

Claims (1)

  1. 【実用新案登録請求の範囲】 真空の成長室内に設けられた成膜基板へ向かつ
    て傾斜させて設けられた有底筒状の坩堝と、坩堝
    を加熱するヒータとからなる分子線源において、 上記坩堝を、縦断面でみて、蒸発物を噴出させ
    る開口と蒸発物を溜める底部とを対向辺とする平
    行四辺形状に設定したことを特徴とする分子線エ
    ピタキシー装置の分子線源。
JP3780887U 1987-03-13 1987-03-13 Expired JPH0345953Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3780887U JPH0345953Y2 (ja) 1987-03-13 1987-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3780887U JPH0345953Y2 (ja) 1987-03-13 1987-03-13

Publications (2)

Publication Number Publication Date
JPS63145866U true JPS63145866U (ja) 1988-09-27
JPH0345953Y2 JPH0345953Y2 (ja) 1991-09-27

Family

ID=30849467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3780887U Expired JPH0345953Y2 (ja) 1987-03-13 1987-03-13

Country Status (1)

Country Link
JP (1) JPH0345953Y2 (ja)

Also Published As

Publication number Publication date
JPH0345953Y2 (ja) 1991-09-27

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