JPS63149536U - - Google Patents
Info
- Publication number
- JPS63149536U JPS63149536U JP4173687U JP4173687U JPS63149536U JP S63149536 U JPS63149536 U JP S63149536U JP 4173687 U JP4173687 U JP 4173687U JP 4173687 U JP4173687 U JP 4173687U JP S63149536 U JPS63149536 U JP S63149536U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- multilayer wiring
- wiring structure
- polycide
- polysilicon layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4173687U JPS63149536U (2) | 1987-03-20 | 1987-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4173687U JPS63149536U (2) | 1987-03-20 | 1987-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149536U true JPS63149536U (2) | 1988-10-03 |
Family
ID=30857003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4173687U Pending JPS63149536U (2) | 1987-03-20 | 1987-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149536U (2) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03251457A (ja) * | 1990-02-28 | 1991-11-08 | Canon Inc | 記録装置及び記録ヘッド |
| JPH043962A (ja) * | 1990-04-20 | 1992-01-08 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| JP2005285991A (ja) * | 2004-03-29 | 2005-10-13 | Nec Electronics Corp | 半導体装置及びその製造方法 |
-
1987
- 1987-03-20 JP JP4173687U patent/JPS63149536U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03251457A (ja) * | 1990-02-28 | 1991-11-08 | Canon Inc | 記録装置及び記録ヘッド |
| JPH043962A (ja) * | 1990-04-20 | 1992-01-08 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| JP2005285991A (ja) * | 2004-03-29 | 2005-10-13 | Nec Electronics Corp | 半導体装置及びその製造方法 |
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