JPS63154152U

JPS63154152U -

Info

Publication number: JPS63154152U
Application number: JP1987047019U
Authority: JP
Priority date: 1987-03-30
Filing date: 1987-03-30
Publication date: 1988-10-11

Description

[Brief explanation of the drawing]

第１図〜第３図は本考案の定盤修正装置の一実
施例を示す図であり、第１図は平面図、第２図は
正面図、第３図ａは修正リングの底面図および同
図ｂは同図ａのＸ_３―Ｘ_３線断面図である。第４
図は研摩装置を示す正面図であり、第５図は上定
盤の底面図である。第６図は従来の定盤修正装置
を示す模式平面図である。２……上定盤、２ａ……真空吸着部、２ａ_１…
…真空吸着面、１０……定盤修正装置、１１……
修正用定盤、１２……修正用リング、１２ａ……
収納部、１２ｄ……周側面、１３……ローラ部、
１３ａ……ローラ、１４……支持具。 1 to 3 are views showing one embodiment of the surface plate correction device of the present invention, in which FIG. 1 is a plan view, FIG. 2 is a front view, and FIG. 3a is a bottom view of the correction ring and the same. Figure b is a sectional view taken along the line X ₃ -X ₃ in figure a. Fourth
The figure is a front view showing the polishing device, and FIG. 5 is a bottom view of the upper surface plate. FIG. 6 is a schematic plan view showing a conventional surface plate correction device. 2...Upper surface plate, 2a...Vacuum suction part, 2a ₁ ...
...Vacuum suction surface, 10...Surface plate correction device, 11...
Correction surface plate, 12... Correction ring, 12a...
Storage section, 12d...circumferential side, 13...roller section,
13a...Roller, 14...Support.

Claims

[Scope of utility model registration request]

Either one of the upper surface plate and the lower surface plate of the polishing device is an object fixing surface plate to which the object to be polished is fixed by a means for fixing the object to be polished, and the object to be polished on the object fixing surface plate is the object to be polished. A surface plate correction device for correcting a contact surface that comes into contact with the object to be polished, including a correction surface plate that corrects the abutment surface of the surface plate for fixing the object to be polished; The correction ring includes a correction ring provided with a storage section for storing a fixed surface plate, and at least two roller parts supported by a support having rollers that abut against the circumferential side of the correction ring. The object-to-be-polished fixing surface plate is stored in the storage section, the contact surface that contacts the object to be polished is brought into contact with the correction surface plate, the correction surface plate is rotated, and the correction ring and the A surface plate correction device characterized by rotating a roller and rotating the surface plate fixing the object to be polished.