JPS6316111Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement of the intermediate ring of a vacuum switch valve, which is comprised of insulating cylinders whose opposing ends are brazed to each other via an intermediate ring.

FIG. 1 is a side sectional view showing a state in which a vacuum switch valve, which is an example of a vacuum device manufactured by a conventional manufacturing method, is installed in a vacuum furnace.

1 is a vacuum furnace, 2 and 3 are insulating cylinders, 4 and 6 are end caps,
5 is a brazing metal, 7 is an intermediate ring, 8 is a support fitting, 9
is an intermediate shield, 10 is a bellows, 11 is a bellows cover, 12 is a movable electrode rod, 13 is a fixed electrode rod, 12a, 13a are contacts, 14 is an exhaust port, 15
is a heater.

When performing the general assembly and brazing of a vacuum switch valve (hereinafter referred to as a valve) in the vacuum furnace 1, the parts to be brazed or welded in advance are the contact 12a, the movable electrode rod 12, and the contact 1.
3a and a fixed electrode rod 13, a bellows 10 and a bellows cover 11, an intermediate shield 9 at one end of the support fitting,
At the other end there is an intermediate ring 7. The components thus welded or brazed are assembled in a vacuum furnace 1 as shown in the figure. That is, the bellows 10 is placed on the end cover 6 through the brazing material 5 with the side to which the bellows cover 11 is fixed at the top, and the movable electrode rod 12 is placed at the center of the bellows cover 11 through the brazing material 5. The movable electrode rod 12 is inserted into a hole larger in diameter than the movable electrode rod 12 provided therein. In order to prevent the movable electrode rod 12 from falling out of the hole in the bellows cover 11, the movable electrode rod 12 has a different diameter at a predetermined location so as to be larger than the hole.

Next, the insulating cylinder 3 is disposed on the end cover 6 through the brazing material 5, and the intermediate ring 7 is disposed on the upper end of the insulating cylinder 3 through the brazing material 5. An insulating tube 2 is disposed with a brazing material 5 interposed therebetween. Furthermore, an end cover 4 is disposed at the upper end of the insulating cylinder 2 with a brazing material 5 interposed therebetween. A hole larger than the contact 13a is provided in the center of the end cover 4, and the brazing material 5 is inserted through this hole.
The fixed electrode rod 13 is inserted from above and disposed so as to face the contact 12a through the contact point 12a.

After the overall assembly of the valve components is completed as described above, the exhaust is evacuated from the exhaust port 14 by an exhaust pump (not shown) to a high vacuum of 10 ^-4 Torr or less. In order to raise the temperature of the entire interior of the vacuum furnace 1 while continuing evacuation in this manner, the heater 15 installed on the wall of the vacuum furnace 1 is turned on. After that, after degassing sufficiently from each component, the temperature is raised to brazing temperature in as short a time as possible.
Valves were manufactured using brazing.

However, in such a valve structure, when each component is temporarily assembled as an exhaust line in the valve, the only way to exhaust air is through the gap in the part to be brazed through the brazing material 5, and the gap created in this part is Because it was very narrow and small, it took a long time to exhaust the air. In addition, when manufacturing multiple valves in a large-capacity vacuum furnace with a constant pumping speed, the degree of vacuum inside the large-capacity vacuum furnace is measured at once. Since the gaps used for the degassing are different, the exhaust time for degassing is not constant, and the time setting must be determined based on intuition gained from valve manufacturing experience. As a result, variations in the degree of vacuum occurred in the valve products, which was not a desirable result in terms of quality control.

The present invention was made in order to eliminate the above-mentioned drawbacks.The intermediate flange is opened with a plurality of holes or elongated holes for exhaust gas on the side surface of the intermediate flange. It is an object of the present invention to provide a vacuum switch valve which is fitted so that the side surface fits along the inner surface of an insulating cylinder, thereby shortening the evacuation time and eliminating variations in the degree of vacuum.

FIG. 2 is a side sectional view showing an embodiment of the present invention in which a vacuum switch valve is installed in a vacuum furnace and an exhaust hole is opened during degassing. In FIGS. 2 and 3, only the parts necessary for explaining the present invention are given the reference numerals, and the other parts are the same as or equivalent to the parts shown in FIG. 1, so the reference numerals are omitted.

8' is a supporting metal fitting, 9' is an intermediate shield, 15' is a small heater, and 16 is an intermediate flange having a plurality of holes or elongated exhaust holes 17 at predetermined positions.

The difference between FIG. 2 and FIG. 1 is that the position of the intermediate shield 9' welded to one end of the support fitting 8' is
This intermediate shield 9' is welded to the upper side, and the intermediate flange 16 is welded to the other end of the support fitting 8'.
A plurality of holes or elongated exhaust holes 17 are provided at predetermined positions on the side surface of the intermediate flange 16. Compared to the brazing range of the heater 15, the small heater 15' is limited to the intermediate flange 16 and is installed close to the intermediate flange 16. Therefore, the insulating cylinder 3 and the intermediate flange 16
Since the fitting and brazing are performed after degassing, the parts other than these parts have been pre-assembled.

The intermediate flange 16 is disposed along the inner surface of the insulating cylinder 3, and is exhausted from the exhaust port 14 by an exhaust pump (not shown), as well as through an exhaust hole 17 provided on the side surface of the intermediate flange 16 of the present invention. Degassing is performed from then on, and the subsequent steps will be explained with reference to FIG.

FIG. 3 is a side sectional view showing an embodiment of the present invention in which a vacuum switch valve is installed in a vacuum furnace and the exhaust hole is closed after sufficient degassing has been performed.

After sufficient degassing is performed while a heater 15 installed on the wall of the vacuum furnace 1 is installed to raise the temperature of the entire interior of the vacuum furnace 1, the intermediate flange 16 is
The side surface with the exhaust hole 17 provided on the side surface of the insulating tube 3 is lowered along the inner surface of the insulating tube 3 and then fitted. Thereafter, the power to the small heater 15' is turned on to perform brazing, and the brazing material 5 previously placed on the upper part of the insulating cylinder 3 is melted, completing the brazing.

As described above, the present invention provides an exhaust hole in the side surface of the intermediate flange, and after degassing from this hole, the intermediate flange is fitted so that this side surface is in contact with the inner surface of the insulating cylinder, and the pair of insulating cylinders are connected to each other. The ends are brazed.

In addition, by fitting and forming the intermediate flange so that the side surface is in contact with the inner surface of the insulating cylinder, the axis of the movable electrode rod is aligned with the axis of the fixed electrode rod, so that eccentricity does not occur. It's for a reason.

According to the structure of the present invention, the time required for degassing is significantly shorter than that of conventional structures, and it is now possible to completely degas the inside of the valve.
This has great practical effects in terms of energy saving measures and quality control.

[Brief explanation of the drawing]

Figure 1 is a side cross-sectional view showing a vacuum switch valve, which is an example of vacuum equipment manufactured using a conventional manufacturing method, installed in a vacuum furnace. Fig. 3 is an embodiment of the present invention, in which a vacuum switch valve is installed in a vacuum furnace and sufficient degassing is performed. FIG. 3 is a side sectional view showing a state in which the exhaust hole is closed. 1... Vacuum furnace, 2, 3... Insulating tube, 5... Brazing metal, 7... Intermediate ring, 8, 8'... Supporting metal fittings,
9,9'...Intermediate shield, 14...Exhaust port, 1
5... Heater, 15'... Small heater, 1
6... Intermediate flange, 17... Exhaust hole.

Claims (1)

[Scope of utility model registration request] a pair of insulating cylinders whose opposing ends are brazed together via an intermediate flange; a pair of electrode rods housed in the insulating cylinder; A contact that can be freely connected and separated within the insulating cylinder, an intermediate shield that surrounds the contact and is housed in the insulating cylinder, and at least one of the pair of electrode rods are movably connected to each other within the insulating cylinder via a bellows. A vacuum switch valve that is airtightly penetrated through an end cover, characterized in that an exhaust hole is formed on a side surface of the intermediate flange, and the side surface is fitted so as to fit along the inner surface of the insulating cylinder. switch valve.