JPS63162537U - - Google Patents
Info
- Publication number
- JPS63162537U JPS63162537U JP1987054303U JP5430387U JPS63162537U JP S63162537 U JPS63162537 U JP S63162537U JP 1987054303 U JP1987054303 U JP 1987054303U JP 5430387 U JP5430387 U JP 5430387U JP S63162537 U JPS63162537 U JP S63162537U
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- plasma
- semiconductor device
- oxygen
- interlayer insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987054303U JPS63162537U (de) | 1987-04-10 | 1987-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987054303U JPS63162537U (de) | 1987-04-10 | 1987-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63162537U true JPS63162537U (de) | 1988-10-24 |
Family
ID=30881168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987054303U Pending JPS63162537U (de) | 1987-04-10 | 1987-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162537U (de) |
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1987
- 1987-04-10 JP JP1987054303U patent/JPS63162537U/ja active Pending