JPS63180922U - - Google Patents
Info
- Publication number
- JPS63180922U JPS63180922U JP7150287U JP7150287U JPS63180922U JP S63180922 U JPS63180922 U JP S63180922U JP 7150287 U JP7150287 U JP 7150287U JP 7150287 U JP7150287 U JP 7150287U JP S63180922 U JPS63180922 U JP S63180922U
- Authority
- JP
- Japan
- Prior art keywords
- reflecting mirror
- exposure apparatus
- reflecting
- light source
- prevention means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
Landscapes
- Projection-Type Copiers In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7150287U JPS63180922U (2) | 1987-05-13 | 1987-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7150287U JPS63180922U (2) | 1987-05-13 | 1987-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63180922U true JPS63180922U (2) | 1988-11-22 |
Family
ID=30914114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7150287U Pending JPS63180922U (2) | 1987-05-13 | 1987-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63180922U (2) |
-
1987
- 1987-05-13 JP JP7150287U patent/JPS63180922U/ja active Pending
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