JPS63180923U - - Google Patents
Info
- Publication number
- JPS63180923U JPS63180923U JP1987071612U JP7161287U JPS63180923U JP S63180923 U JPS63180923 U JP S63180923U JP 1987071612 U JP1987071612 U JP 1987071612U JP 7161287 U JP7161287 U JP 7161287U JP S63180923 U JPS63180923 U JP S63180923U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- vacuum evacuation
- vacuum
- transferring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987071612U JPS63180923U (de) | 1987-05-15 | 1987-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987071612U JPS63180923U (de) | 1987-05-15 | 1987-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63180923U true JPS63180923U (de) | 1988-11-22 |
Family
ID=30914320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987071612U Pending JPS63180923U (de) | 1987-05-15 | 1987-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63180923U (de) |
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1987
- 1987-05-15 JP JP1987071612U patent/JPS63180923U/ja active Pending