JPS63185236U - - Google Patents
Info
- Publication number
- JPS63185236U JPS63185236U JP7683687U JP7683687U JPS63185236U JP S63185236 U JPS63185236 U JP S63185236U JP 7683687 U JP7683687 U JP 7683687U JP 7683687 U JP7683687 U JP 7683687U JP S63185236 U JPS63185236 U JP S63185236U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- doping
- impurities
- chip
- monitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図、第２図は本考案の実施例に係るウエー
ハ平面図である。 １，２，３……モニタチツプ、１０……ウエー
ハ。
ハ平面図である。 １，２，３……モニタチツプ、１０……ウエー
ハ。
Claims (1)
- 【実用新案登録請求の範囲】 半導体装置のウエーハ製造工程において、 ウエーハの所定の位置に配置して、不純物ドー
ピングによる、層抵抗を測定可能なチツプとして
形成され、不純物ドーピング後、その部位におけ
る被覆絶縁膜を除去し、電気特性を測ることによ
り、製品ウエーハごとの工程チツクを行なうこと
を特徴とするモニタ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7683687U JPS63185236U (ja) | 1987-05-21 | 1987-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7683687U JPS63185236U (ja) | 1987-05-21 | 1987-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185236U true JPS63185236U (ja) | 1988-11-29 |
Family
ID=30924286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7683687U Pending JPS63185236U (ja) | 1987-05-21 | 1987-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185236U (ja) |
-
1987
- 1987-05-21 JP JP7683687U patent/JPS63185236U/ja active Pending
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