JPS63185444U - - Google Patents

Info

Publication number
JPS63185444U
JPS63185444U JP7598987U JP7598987U JPS63185444U JP S63185444 U JPS63185444 U JP S63185444U JP 7598987 U JP7598987 U JP 7598987U JP 7598987 U JP7598987 U JP 7598987U JP S63185444 U JPS63185444 U JP S63185444U
Authority
JP
Japan
Prior art keywords
opening
sample
vacuum
sample stage
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7598987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7598987U priority Critical patent/JPS63185444U/ja
Publication of JPS63185444U publication Critical patent/JPS63185444U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP7598987U 1987-05-22 1987-05-22 Pending JPS63185444U (bg)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7598987U JPS63185444U (bg) 1987-05-22 1987-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7598987U JPS63185444U (bg) 1987-05-22 1987-05-22

Publications (1)

Publication Number Publication Date
JPS63185444U true JPS63185444U (bg) 1988-11-29

Family

ID=30922650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7598987U Pending JPS63185444U (bg) 1987-05-22 1987-05-22

Country Status (1)

Country Link
JP (1) JPS63185444U (bg)

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