JPS63190765A - Manufacture of ceramic sintered body - Google Patents
Manufacture of ceramic sintered bodyInfo
- Publication number
- JPS63190765A JPS63190765A JP62000052A JP5287A JPS63190765A JP S63190765 A JPS63190765 A JP S63190765A JP 62000052 A JP62000052 A JP 62000052A JP 5287 A JP5287 A JP 5287A JP S63190765 A JPS63190765 A JP S63190765A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- ceramic sintered
- ceramic
- powder
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Inorganic Insulating Materials (AREA)
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の目的〕
(産業上の利用分野)
本発明はセラミックス焼結体の製造方法に係り、特に焼
成時の付着防止液およびその塗布方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a method for manufacturing a ceramic sintered body, and particularly to an anti-adhesion liquid during firing and a method for applying the same.
(従来の技術)
近年、セラミックス粉体を所定の形状に成形し高温で焼
成してなるセラミックス焼結体がその耐熱性や耐摩耗性
等の種々の性質を利用して各種製品に使用されている。(Prior art) In recent years, ceramic sintered bodies, which are made by molding ceramic powder into a predetermined shape and firing it at high temperatures, have been used in various products due to their various properties such as heat resistance and abrasion resistance. There is.
これらのセラミックス焼結体のうち、例えば窒化アルミ
ニウム焼結体は、その高熱伝導性を利用して回路基板等
の各種基板に使用されている。Among these ceramic sintered bodies, for example, aluminum nitride sintered bodies are used for various substrates such as circuit boards by utilizing their high thermal conductivity.
このような焼結窒化アルミニウム系基板は、例えばドク
ターブレード法により薄板状に成形して、次いで所定の
形状に切断し、これを積層して脱脂を行った後、焼成す
ることにより得られる。Such a sintered aluminum nitride-based substrate can be obtained by, for example, forming a thin plate shape using a doctor blade method, then cutting it into a predetermined shape, stacking the sheets, degreasing them, and then firing them.
ところで、このような焼結窒化アルミニウム系基板は積
層して焼成しているため、焼成時にそれぞれが付着しな
いように付着防止液を璧布している。Incidentally, since such a sintered aluminum nitride-based substrate is fired in a laminated manner, an anti-adhesion liquid is applied to prevent each layer from adhering to each other during firing.
従来、この付着防止液としては、窒化ホウ素微粉末を適
量のバインダと分散剤とともにアルコール系溶剤に溶解
したものを使用していた。。Conventionally, this anti-adhesion liquid has been prepared by dissolving fine boron nitride powder in an alcoholic solvent together with appropriate amounts of a binder and a dispersant. .
(発明が解決しようとする問題点)
しかしながらこのような付着防止液は、セラミックス成
形体中に含まれているバインダを溶出してしまうために
、脱脂工程後でなければ塗布することができなかった。(Problem to be Solved by the Invention) However, such an anti-adhesion liquid dissolves the binder contained in the ceramic molded body, so it could only be applied after the degreasing process. .
したがって成形体を切断し積層して脱脂し、この脱脂体
1枚々に付着防止液を塗布して、再度積層した後焼成し
なければならなかった。このように非常に腕い脱脂体を
取扱うために、作業中に欠けや割れ等の作業破損が発生
しゃずいという問題があった。また、切断後の脱脂体の
1枚々に付着防止液を塗布する工数や再積層にかかる工
数により作業性を低下させるという問題もあった。Therefore, it was necessary to cut the molded bodies, stack them, degrease them, apply an anti-adhesion liquid to each of the degreased bodies, stack them again, and then fire them. Since the degreased body is handled in such a manner that it is extremely difficult to handle it, there is a problem in that work damage such as chips and cracks may occur during the work. Further, there is also the problem that workability is reduced due to the number of steps required to apply an anti-adhesion liquid to each degreased body after cutting and the number of steps required for re-stacking.
本発明はこのような間U点を解決するためになされたも
ので、作業能率が良く、かつ欠けや割れ等の作業破損の
少ないセラミックス焼結体の製造方法を提供することを
目的とする。The present invention has been made to solve this problem, and aims to provide a method for manufacturing a ceramic sintered body that is highly efficient and causes less damage during work such as chipping and cracking.
[発明の構成コ
(問題点を解決するための手段)
本発明のセラミックス焼結体の製造方法は、非極性分散
媒に離型用微粉末を分散させた焼成用付着防止液を表面
に塗布したセラミックス成形体を、所定の形状に切断し
積層した後、脱脂、焼成することを特徴としている。[Structure of the Invention (Means for Solving the Problems)] The method for manufacturing a ceramic sintered body of the present invention includes applying an anti-adhesion liquid for firing on the surface, in which fine mold release powder is dispersed in a non-polar dispersion medium. The ceramic molded body is cut into a predetermined shape, laminated, degreased, and fired.
本発明の方法は、各種常温成形法により形成されたセラ
ミックス成形体に適用でき、特に有機バインダを大量に
含有するセラミックス成形体に好適している。The method of the present invention can be applied to ceramic molded bodies formed by various cold forming methods, and is particularly suitable for ceramic molded bodies containing a large amount of organic binder.
本発明に使用される焼成用付着防止液は、離型用V&粉
末を主成分とするものであり、この離型用M粉末を非極
性分i2媒中に必要に応じてバインダ、分散剤とともに
混合したものである。この離型用微粉末としては、一般
に高温下で使用される各種無機質微粉末を使用すること
ができ、適用するセラミックスの種類によって、例えば
窒化物セラミックスであれば窒化ホウ素というように適
宜選択されるものである。また、非極性分散媒としては
、n−ヘキサン、n−オクタン、ベンゼン、四塩化炭素
等が挙げられ、無機質微粉末の溶解性の点で炭素数6以
上のru鎖状炭化水素が好ましく、特にn−ヘキサンが
好ましい。The anti-adhesive liquid for firing used in the present invention is mainly composed of V& powder for mold release, and this M powder for mold release is added to a non-polar i2 medium together with a binder and a dispersant as necessary. It is a mixture. As this mold release fine powder, various inorganic fine powders that are generally used at high temperatures can be used, and depending on the type of ceramic to be applied, boron nitride is selected as appropriate for nitride ceramics. It is something. In addition, examples of the non-polar dispersion medium include n-hexane, n-octane, benzene, carbon tetrachloride, etc. From the viewpoint of solubility of the inorganic fine powder, ru chain hydrocarbons having 6 or more carbon atoms are preferable, and especially N-hexane is preferred.
この付着防止液のセラミックス表面への塗布は、スプレ
ー法や刷毛塗りで厚さ0.01〜0.08mm程度にな
るように行う。The anti-adhesion liquid is applied to the ceramic surface by spraying or brushing to a thickness of about 0.01 to 0.08 mm.
(作 用)
本発明のセラミックス焼結体の製造方法において、焼成
用付着防止液として非極性分散媒中に離型用微粉末を分
散させたものを使用しているので、セラミックス成形体
中のバインダ成分を溶出してしまうおそれがなくなり、
これによって脱脂工程前の成形体に付着防止液を塗布す
ることが可能となり、脱脂体を再積層する等取り扱う必
要がなくなる。(Function) In the method for producing a ceramic sintered body of the present invention, a non-polar dispersion medium containing fine mold release powder dispersed is used as the anti-adhesion liquid for firing, so that it is possible to prevent mold release from occurring in the ceramic molded body. There is no risk of elution of the binder component,
This makes it possible to apply an anti-adhesion liquid to the molded body before the degreasing process, and there is no need to handle the degreased body by re-stacking or otherwise handling it.
(実施例) 次に本発明の一実施例について説明する。(Example) Next, one embodiment of the present invention will be described.
実施例
まず、平均粒径0.8μmの窒化ホウ素粉末39.71
1%、ワックス系バインダE−730(中京油脂製、商
品名)9.7重量%、分散剤として非イオン系活性剤E
−787(中京油脂製、商品名)3.2重I%および分
散媒としてn−ヘキサン47.4重L%をアルミナボー
ルを入れたポリエチレン製容器にそれぞれ投入し、ボッ
トローラで約24時間混合して焼成用付着防止液を作製
した。Example First, boron nitride powder with an average particle size of 0.8 μm
1%, wax binder E-730 (trade name, Chukyo Yushi Co., Ltd.) 9.7% by weight, nonionic activator E as a dispersant
-787 (manufactured by Chukyo Yushi Co., Ltd., trade name) 3.2% by weight and 47.4% by weight of n-hexane as a dispersion medium were placed in a polyethylene container containing alumina balls, and mixed for about 24 hours using a bot roller. An anti-adhesion liquid for baking was prepared.
次に、焼結助剤として1Mtのアルミナとイツトリアと
を加えて十分に混合した窒化アルミニウム(AβN)i
l[]合粉に対して、有機バインダを10重I%と溶媒
を30重]%加えてボットミルで十分に混合してスラリ
ーを形成した。このスラリーを用いてドクターブレード
法により薄板状の成形体を形成し、この表面に上述した
焼成用付着防止液を厚さ約0,1Bになるようにスプレ
ー法により塗布した。Next, 1 Mt of alumina and ittria were added as sintering aids and aluminum nitride (AβN) was thoroughly mixed.
10% by weight of an organic binder and 30% by weight of a solvent were added to the l[] mixture powder and thoroughly mixed in a bot mill to form a slurry. Using this slurry, a thin plate-shaped molded body was formed by a doctor blade method, and the above-mentioned anti-adhesion liquid for firing was applied to the surface of the molded body by a spray method to a thickness of about 0.1 B.
次いでこの成形体を80X40mに切断し10枚づつ積
層した。そして、この積層した成形体を窒素ガス雰囲気
中T約700℃(昇温速度100°C/時I’Ql>で
約3時間脱脂し、次いで窒素ガス雰囲気中で約1800
’C(昇温速度145℃/時間)で約2時間焼成した。Next, this molded body was cut into a size of 80×40 m, and 10 sheets each were laminated. Then, this laminated molded body was degreased in a nitrogen gas atmosphere at a T of about 700°C (temperature increase rate of 100°C/hour I'Ql) for about 3 hours, and then in a nitrogen gas atmosphere at a temperature of about 1800°C.
It was fired for about 2 hours at 'C (heating rate: 145°C/hour).
このようにして得た窒化アルミニウム焼結体の外観検査
を行ったところ、積層間での付着もなく、また欠けや割
れ等も認められなかった。When the appearance of the aluminum nitride sintered body thus obtained was inspected, it was found that there was no adhesion between the laminated layers, and no chips or cracks were observed.
・この実施例によれば、焼成用付着防止液として非極性
分散媒であるn−ヘキサンに窒化ホウ素粉末を溶解して
用いているので、成形体内に含まれる有機バインダを溶
出してしまうおそれがなくなり、脱脂工程前に焼成用付
着防止液を成形体表面に塗布することが可能となる。こ
れにより従来方法のように脱脂工程後に積層済みの脱脂
体を取り扱う必要が無くなり、欠けや割れ等の不良の発
生を防止することができる。また作業工程を一工程省く
ことにより作業能率をアップすることもできる。・According to this example, since boron nitride powder is dissolved in n-hexane, which is a non-polar dispersion medium, as the anti-adhesion liquid for firing, there is a risk that the organic binder contained in the molded object will be eluted. This makes it possible to apply the anti-adhesion liquid for baking to the surface of the molded body before the degreasing process. This eliminates the need to handle the laminated degreased body after the degreasing process as in the conventional method, and can prevent defects such as chips and cracks. Furthermore, by omitting one work step, work efficiency can be improved.
[発明の効果]
以上説明したように本発明のセラミックス焼結体の製造
方法によれば、脱脂工程前に焼成用付着防止液を塗布す
ることにより、脱脂体を取り扱う必要が無くなり、欠け
や割れ等の作業破損を大幅に減少することができる。ま
た、作業工程を一工程省くことにより作業能率もアップ
できる。[Effects of the Invention] As explained above, according to the method for manufacturing a ceramic sintered body of the present invention, by applying an anti-stick liquid for firing before the degreasing process, there is no need to handle the degreased body, and chips and cracks can be avoided. It is possible to significantly reduce the damage caused by such operations. In addition, work efficiency can be improved by omitting one work step.
Claims (4)
付着防止液を表面に塗布したセラミックス成形体を、所
定の形状に切断し積層した後、脱脂、焼成することを特
徴とするセラミックス焼結体の製造方法。(1) A ceramic molded body whose surface is coated with an anti-adhesive liquid for firing in which fine mold release powder is dispersed in a non-polar dispersion medium is cut into a predetermined shape and laminated, then degreased and fired. A method for producing a ceramic sintered body.
である特許請求の範囲第1項記載のセラミックス焼結体
の製造方法。(2) The method for producing a ceramic sintered body according to claim 1, wherein the ceramic sintered body is a nitride ceramic sintered body.
範囲第1項または第2項記載のセラミックス焼結体の製
造方法。(3) The method for producing a ceramic sintered body according to claim 1 or 2, wherein the mold release fine powder is boron nitride powder.
囲第1項ないし第3項のいずれか1項記載のセラミック
ス焼結体の製造方法。(4) The method for producing a ceramic sintered body according to any one of claims 1 to 3, wherein the nonpolar dispersion medium is n-hexane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62000052A JPS63190765A (en) | 1987-01-05 | 1987-01-05 | Manufacture of ceramic sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62000052A JPS63190765A (en) | 1987-01-05 | 1987-01-05 | Manufacture of ceramic sintered body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63190765A true JPS63190765A (en) | 1988-08-08 |
Family
ID=11463477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62000052A Pending JPS63190765A (en) | 1987-01-05 | 1987-01-05 | Manufacture of ceramic sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63190765A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007131491A (en) * | 2005-11-10 | 2007-05-31 | Tokuyama Corp | Method for producing aluminum nitride sintered body |
| WO2013054852A1 (en) * | 2011-10-11 | 2013-04-18 | 日立金属株式会社 | Silicon nitride substrate and method for manufacturing silicon nitride substrate |
-
1987
- 1987-01-05 JP JP62000052A patent/JPS63190765A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007131491A (en) * | 2005-11-10 | 2007-05-31 | Tokuyama Corp | Method for producing aluminum nitride sintered body |
| WO2013054852A1 (en) * | 2011-10-11 | 2013-04-18 | 日立金属株式会社 | Silicon nitride substrate and method for manufacturing silicon nitride substrate |
| CN103781742A (en) * | 2011-10-11 | 2014-05-07 | 日立金属株式会社 | Silicon nitride substrate and method for manufacturing silicon nitride substrate |
| JP5673847B2 (en) * | 2011-10-11 | 2015-02-18 | 日立金属株式会社 | Silicon nitride substrate and method for manufacturing silicon nitride substrate |
| US9655237B2 (en) | 2011-10-11 | 2017-05-16 | Hitachi Metals, Ltd. | Silicon nitride substrate and method for producing silicon nitride substrate |
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