JPS63190U - - Google Patents
Info
- Publication number
- JPS63190U JPS63190U JP9289686U JP9289686U JPS63190U JP S63190 U JPS63190 U JP S63190U JP 9289686 U JP9289686 U JP 9289686U JP 9289686 U JP9289686 U JP 9289686U JP S63190 U JPS63190 U JP S63190U
- Authority
- JP
- Japan
- Prior art keywords
- pump device
- cooler
- turbo
- molecular pump
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 4
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図はこの考案の一実施例によるターボ分子
ポンプ装置を示す断面図、第２図はこの考案の他
の実施例によるターボ分子ポンプ装置を示す断面
図、第３図は従来のターボ分子ポンプ装置を示す
断面図である。図において、１は、ロータ翼、２
はステータ翼、３はケーシング、４は電動機回転
子、５は電動機ステータ、６ａ，６ｂは軸受、７
は排気口、９はベース、１０はフレーム、１１ａ
，１１ｂは気体、１２は回転胴、２１は冷却フイ
ン、２２は冷却パイプである。なお、図中、同一
符号は同一又は相当部分を示す。
FIG. 1 is a cross-sectional view showing a turbo-molecular pump device according to one embodiment of this invention, FIG. 2 is a cross-sectional view showing a turbo-molecular pump device according to another embodiment of this invention, and FIG. 3 is a conventional turbo-molecular pump. FIG. 2 is a cross-sectional view showing the device. In the figure, 1 is a rotor blade, 2
is a stator blade, 3 is a casing, 4 is a motor rotor, 5 is a motor stator, 6a, 6b are bearings, 7
is the exhaust port, 9 is the base, 10 is the frame, 11a
, 11b is a gas, 12 is a rotating body, 21 is a cooling fin, and 22 is a cooling pipe. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
、冷却器を取りつけたことを特徴とするターボ分
子ポンプ装置。 (2) 冷却器は冷却フアンである実用新案登録請
求の範囲第１項記載のターボ分子ポンプ装置。 (3) 冷却器は冷却パイプである実用新案登録請
求の範囲第１項記載のターボ分子ポンプ装置。[Claims for Utility Model Registration] (1) A turbomolecular pump device characterized in that a cooler is attached to the outer periphery of a casing that holds stator blades. (2) The turbo-molecular pump device according to claim 1, wherein the cooler is a cooling fan. (3) The turbo-molecular pump device according to claim 1, wherein the cooler is a cooling pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9289686U JPS63190U (en) | 1986-06-18 | 1986-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9289686U JPS63190U (en) | 1986-06-18 | 1986-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63190U true JPS63190U (en) | 1988-01-05 |
Family
ID=30954994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9289686U Pending JPS63190U (en) | 1986-06-18 | 1986-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63190U (en) |
-
1986
- 1986-06-18 JP JP9289686U patent/JPS63190U/ja active Pending